Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US9327307B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9327307-B2 |
| Application number | US-201414228607-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 28, 2014 |
| Priority date | Oct 28, 2011 |
| Publication date | May 3, 2016 |
| Grant date | May 3, 2016 |
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Official abstract text for this publication.
A dispenser for applying small amounts of liquid to a substrate. The dispenser includes a dispenser body, an actuator in the dispenser body, and a dispensing element including a dispensing element body removably coupled to the dispenser body. A valve stem is mounted for reciprocating movement within the dispensing element body. Additional aspects include a deformable valve seat, a deformable and resilient valve stem tip and a method of applying liquid in discrete amounts to a substrate.
Opening claim text (preview).
What is claimed is: 1. A dispenser for applying small amounts of liquid to a substrate, the dispenser comprising: a dispenser body; an actuator operatively coupled with said dispenser body and mounted for movement between first and second positions; a dispensing element including a dispensing element body removably coupled to said dispenser body and a valve stem mounted for reciprocating movement within said dispensing element body, said dispensing element body further including a liquid chamber and said valve stem including a tip mounted for reciprocating movement within said liquid chamber between open and closed positions, a valve seat engaging said valve stem tip in the closed position, a liquid dispensing outlet and a liquid supply passage, said valve seat positioned between said liquid chamber and said liquid dispensing outlet, and said liquid supply passage communicating with said liquid chamber, said valve stem further including an opposite end relative to said tip, said valve stem mechanically affixed as a unit with said dispensing element body such that said valve stem and said dispensing element body are capable of being removably coupled to said dispenser body as said unit, said valve stem tip is captured within said liquid chamber such that removing said dispensing element body from said dispenser body necessarily removes said valve stem from said dispenser body, and said opposite end is engageable by said actuator when said dispensing element is coupled to said dispenser body such that said actuator moves said valve stem to the closed position when said actuator moves from the first position to the second position. 2. The dispenser of claim 1 , wherein said dispensing element body further comprises: an air supply passage and an air discharge passage communicating with said air supply passage, said air discharge passage positioned adjacent to said liquid dispensing outlet and adapted to discharge a pressurized air curtain surrounding the liquid as the liquid is dispensed from said liquid dispensing outlet. 3. The dispenser of claim 1 , wherein said dispensing element body further comprises: a connector element adapted to couple with a container of the liquid. 4. The dispenser of claim 3 , wherein said dispenser body further comprises an opening adapted to receive an outlet portion of the container, and the connector element is positioned in said opening when the dispensing element body is coupled to said dispenser body. 5. The dispenser of claim 1 , wherein said dispensing element is disposable and said dispensing clement body comprises a plastic material. 6. The dispenser of claim 5 , wherein said valve seat includes a portion that is malleable, said portion of said valve seat overlying said plastic material and being deformed by said valve stem tip in the closed position, said plastic material of said dispensing element body further being deformable to allow deformation of said valve seat portion, thereby damping impact of the valve stem tip against said valve seat and forming an area of sealing contact between said valve stem tip and said valve seat. 7. The dispenser of claim 6 , wherein said valve seat further comprises a cone shaped portion for engaging said valve stem tip and an elongate tip portion including a liquid dispensing passage communicating with said liquid dispensing outlet. 8. The dispenser of claim 7 , wherein said dispensing element body further comprises: an air supply passage and an air discharge passage communicating with said air supply passage; and a securing cap removably coupled to said dispenser body and securing said dispensing element to said dispenser body, said securing cap including an opening that receives said elongate tip portion of said valve seat, said opening communicating with said air discharge passage and configured to direct a pressurized air curtain surrounding liquid dispensing from said liquid dispensing outlet. 9. The dispenser of claim 1 , wherein said dispensing element further comprises a dynamic seal engaging said valve stem and preventing escape of liquid from said liquid chamber, said valve stem extending through said dynamic seal such that said opposite end of said valve stem is positioned outwardly of said liquid chamber and into engagement with said actuator. 10. The dispenser of claim 9 , further comprising a spring element coupled with said dispensing element body and said valve stem for biasing said opposite end into engagement with said actuator. 11. The dispenser of claim 1 , wherein said valve seat includes a first portion that is malleable and a second portion formed from a plastic material, said first and second portions being deformed by said valve stem tip in the closed position thereby damping impact of the valve stem tip against said valve seat and forming an area of sealing contact between said valve stem tip and said valve seat.
provided with electric controlling means (G01F11/022 and G01F11/024 take precedence) · CPC title
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
the material being discharged on the work through discrete orifices as discrete droplets, beads or strips that coalesce on the work or are spread on the work so as to form a continuous coating · CPC title
of the piston type (G01F11/04 takes precedence) · CPC title
specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material (B05C5/0225, B05C11/1026 take precedence) · CPC title
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