Multilayer filter

Patent metadata

Field	Value
Publication number	US-9327217-B2
Application number	US-201214346392-A
Country	US
Kind code	B2
Filing date	Sep 20, 2012
Priority date	Sep 21, 2011
Publication date	May 3, 2016
Grant date	May 3, 2016

Abstract

This invention relates to a multilayer filter. The filter comprises at least a first layer comprising a plurality of openings and at least a second permeable layer overlaying the first layer and reducing the size of the openings. The filter may further comprise one or more successive layers overlaying the second layer, wherein each layer further successively reduces the size of the openings. The filter may be used for separation of particles from fluid or gas. There is also provided a method for fabricating a multilayer filter.

First claim

The invention claimed is:

1. A multilayer filter comprising at least a first layer comprising a plurality of openings and at least a second permeable layer overlaying the first layer and reducing the size of the openings, wherein the overlaying second layer comprises a configuration partitioning substantially every individual opening to reduce its size, and wherein the configuration of the second layer comprises an array of strips partitioning the openings.

2. The multilayer filter according to claim 1 , further comprising one or more successive permeable layers overlaying the second layer, wherein each layer further successively reduces the size of the openings.

3. The multilayer filter according to claim 1 , wherein the largest dimension of an opening is ≦500 μm.

4. The multilayer filter according to claim 1 , further comprising at least one supporting permeable layer.

5. The multilayer filter according to claim 1 , wherein the layers are coherent.

6. A method for fabricating a multilayer filter, comprising the steps of:
(i) depositing a sacrificial layer on a substrate;
(ii) depositing a first layer onto the sacrificial layer; either
A)(iii) identifying on the first layer a first pattern comprising regions to be removed for so as to form a plurality of openings in the first layer;
(iv) depositing at least a second layer to overlay the first layer;
(v) identifying on the second layer a second pattern comprising regions to be removed so as to form a configuration in the second layer; and fabricating a plurality of openings in the first layer according to the first pattern and fabricating a configuration in the second layer according to the second pattern, wherein the configuration reduces the size of the openings of the first layer; or
B(iii) fabricating a plurality of openings in the first layer;
(iv) depositing at least a second layer to overlay the first layer;
(v) fabricating a configuration in the second layer, wherein the configuration reduces the size of the openings of the first layer;
and for (A) or (B), (vi) releasing the layers minus the sacrificial layer from the substrate to give the multilayer filter, wherein the configuration of the second layer comprises an array of strips partitioning the openings.

7. The method according to claim 6 , wherein the configuration partitions substantially every individual opening, thereby reducing the size of the openings.

8. The method according to claim 6 , wherein step (ii) comprises depositing a first photoresist layer onto the sacrificial layer.

9. The method according to claim 8 , wherein step A(iii) comprises contacting the first photoresist layer with a mask comprising a pattern of a plurality of openings to be copied to the first photoresist layer and exposing the masked first photoresist layer to a suitable light source or step B(iii) comprises contacting the first photoresist layer with a mask comprising a pattern of a plurality of openings to be copied to the first photoresist layer and performing photolithography to form a plurality of openings on the first photoresist layer.

10. The method according to claim 6 , wherein step A(iv) or B(iv) comprises depositing at least a second photoresist layer onto the first layer.

11. The method according to claim 10 , wherein step A(v) comprises contacting the second photoresist layer with a mask comprising a pattern of a configuration to be copied to the second photoresist layer and exposing the masked second photoresist layer to a suitable light source or step B(v) comprises contacting the second photoresist layer with a mask comprising a pattern of a configuration to be copied to the photoresist layer and performing photolithography to form a configuration on the second photoresist layer; wherein the configuration of the second layer reduces the size of the openings of the first layer.

12. The method according to claim 6 , wherein the largest dimension of an opening is 500 μm.

13. The method according to claim 6 , further comprising fabricating at least one supporting permeable layer over the multilayer filter.

14. A method of preparing a filter comprising the steps of:
(i) fabricating a first layer comprising a plurality of openings;
(ii) fabricating at least a separate second permeable layer comprising a configuration;
(iii) positioning the second layer to overlay the first layer, wherein the configuration of the second layer reduces the size of the openings, and wherein the configuration of the second layer comprises an array of strips partitioning the openings.

15. The method according to claim 14 , further comprising fabricating one or more successive permeable layers to overlay the second layer, wherein each successive permeable layer further successively reduces the size of the openings.

16. The method according to claim 14 , wherein the filter further comprises at least one supporting permeable layer.

17. The method according to claim 16 , wherein the supporting permeable layer comprises a grid structure.

18. The method according to claim 6 , wherein the layers are coherent.

Assignees

• Univ Nanyang Tech

Inventors

• Ebrahimi Warkiani Majid
• Gong Haiqing

Classifications

• B01D67/0062

  by micromachining techniques, e.g. using masking and etching steps, photolithography · CPC title

• B01D2239/1216

  Pore size · CPC title

• Y10T29/49826

  Assembling or joining · CPC title

• B01D29/05 Primary

  supported · CPC title

• B01D2239/065

  More than one layer present in the filtering material · CPC title