Shadow mask alignment and management system

Patent metadata

Field	Value
Publication number	US-9325007-B2
Application number	US-90546010-A
Country	US
Kind code	B2
Filing date	Oct 15, 2010
Priority date	Oct 27, 2009
Publication date	Apr 26, 2016
Grant date	Apr 26, 2016

Abstract

A magnetic handling assembly for thin-film processing of a substrate, a system and method for assembling and disassembling a shadow mask to cover a top of a workpiece for exposure to a processing condition. The assembly may include a magnetic handling carrier and a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier to cover a top of a workpiece that is to be disposed between the shadow mask and the magnetic handling carrier when exposed to a processing condition. A system includes a first chamber with a first support to hold the shadow mask, a second support to hold a handling carrier, and an alignment system to align the shadow mask a workpiece to be disposed between the carrier and shadow mask. The first and second supports are moveable relative to each other.

First claim

What is claimed is:

1. An assembly for thin-film processing of a substrate, the assembly comprising:
a magnetic handling carrier comprising a plurality of defined magnetic regions, wherein at least a first magnetic region has a different magnetic field strength than a second magnetic region; and
a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier to cover a top of a workpiece that is to be disposed between the shadow mask and the magnetic handling carrier when exposed to a processing condition.

2. The assembly of claim 1 , wherein the magnetic handling carrier comprises a high temperature compatible permanent magnet or electromagnet and the magnet is encapsulated in a protective casing.

3. The assembly of claim 2 , wherein the protective casing comprises: a plate including a recess to contain the magnet; and a cover affixed to the plate.

4. The assembly of claim 1 , wherein the magnetic handling carrier includes a through hole to conduct a gas from a backside of the carrier to a top surface of the carrier, and wherein the top surface of the carrier includes recesses to distribute the gas from the through hole across an area of the top surface.

5. The assembly of claim 1 , wherein magnetic handling carrier includes a plurality of magnets arranged across an area of the carrier.

6. The assembly of claim 5 , wherein the plurality of magnets comprise:
a first annular magnet disposed proximate to an axial center of the carrier; and
a second annular magnet disposed a radial distance outward from the axial center of the carrier.

7. The assembly of claim 6 , wherein the plurality of magnets comprise a first and second magnet positioned within the carrier to have either magnetic pole centers or magnetic domain interfaces disposed in a region between adjacent openings of the shadow mask.

8. The assembly of claim 1 , wherein the shadow mask comprises a magnetic nickel or cobalt alloy of iron.

Assignees

• Kwak Byung-Sung Leo
• Bangert Stefan
• Hofmann Ralf
• Koenig Michael
• Applied Materials Inc

Inventors

• Kwak Byung-Sung Leo
• Bangert Stefan
• Hofmann Ralf
• Koenig Michael

Classifications

• H01M4/13

  Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof · CPC title

• H01M2004/028

  Positive electrodes · CPC title

• H01M4/139

  Processes of manufacture · CPC title

• H01M4/663

  containing carbon or carbonaceous materials as conductive part, e.g. graphite, carbon fibres · CPC title

• H01M4/621

  Binders · CPC title