Semiconductor device and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-9324883-B2
Application number	US-201414479362-A
Country	US
Kind code	B2
Filing date	Sep 7, 2014
Priority date	Jan 15, 2009
Publication date	Apr 26, 2016
Grant date	Apr 26, 2016

Abstract

In a power feeding region of a memory cell (MC) in which a sidewall-shaped memory gate electrode (MG) of a memory nMIS (Qnm) is provided by self alignment on a side surface of a selection gate electrode (CG) of a selection nMIS (Qnc) via an insulating film, a plug (PM) which supplies a voltage to the memory gate electrode (MG) is embedded in a contact hole (CM) formed in an interlayer insulating film ( 9 ) formed on the memory gate electrode (MG) and is electrically connected to the memory gate electrode (MG). Since a cap insulating film (CAP) is formed on an upper surface of the selection gate electrode (CG), the electrical conduction between the plug (PM) and the selection gate electrode (CG) can be prevented.

First claim

The invention claimed is:

1. A method of manufacturing a semiconductor device having a memory cell and a capacitive element,
wherein a process of forming the memory cell and the capacitive element comprises:
(a) a step of forming a first insulating film in a memory cell formation region over a semiconductor substrate having the memory cell formation region and a capacitive element formation region, thereby forming a first gate insulating film of the memory cell;
(b) a step of forming a first conductive film over the first gate insulating film in the memory cell formation region and over the semiconductor substrate in the capacitive element formation region;
(c) a step of forming a second insulating film over the first conductive film in the memory cell formation region and the capacitive element formation region;
(d) a step of patterning the second insulating film and the first conductive film in the memory cell formation region, thereby forming a selection gate electrode of the memory cell from the first conductive film and a first cap insulating film from the second insulating film over the selection gate electrode in the memory cell formation region, and patterning the second insulating film and the first conductive film in the capacitive element formation region, thereby forming a lower electrode of the capacitive element from the first conductive film and a second cap insulating film from the second insulating film over the lower electrode in the capacitive element formation region;
(e) a step of removing the second cap insulating film in the capacitive element formation region while leaving the first cap insulating film over the selection gate electrode in the memory cell formation region;
(f) after the step (e), a step of forming a third insulating film over the semiconductor substrate in the memory cell formation region and the capacitive element formation region, thereby forming a second gate insulating film of the memory cell from the third insulating film over the semiconductor substrate in the memory cell formation region and forming a capacitive insulating film of the capacitive element from the third insulating film over the semiconductor substrate in the capacitive element formation region;
(g) a step of forming a second conductive film over the second gate insulating film in the memory cell formation region and over the capacitive insulating film in the capacitive element formation region;
(h) a step of subjecting the second conductive film in the memory cell formation region to anisotropic etching, thereby forming a memory gate electrode of the memory cell over a side surface of a stacked film made up of the first cap insulating film and the selection gate electrode, and patterning the second conductive film in the capacitive element formation region, thereby forming an upper electrode of the capacitive element over the capacitive insulating film; and
(i) after the step (h), a step of forming a source region and a drain region of the memory cell in the semiconductor substrate in the memory cell formation region.

2. The method of manufacturing a semiconductor device according to claim 1 ,
wherein the second gate insulating film is an insulating film including a charge accumulating layer.

3. The method of manufacturing a semiconductor device according to claim 1 ,
wherein the step (f) includes:
(f1) a step of forming a first silicon oxide film over the semiconductor substrate;
(f2) a step of forming a silicon nitride film over the first silicon oxide film; and
(f3) a step of forming a second silicon oxide film over the silicon nitride film.

4. The method of manufacturing a semiconductor device according to claim 1 ,
wherein the capacitive element is formed over a device isolation part formed over the semiconductor substrate in the capacitive element formation region.

5. The method of manufacturing a semiconductor device according to claim 1 ,
wherein the second insulating film includes a silicon nitride film.

6. The method of manufacturing a semiconductor device according to claim 1 ,
wherein the step (c) includes:
(c1) a step of forming a fourth insulating film including a silicon oxide film over the first conductive film in the memory cell formation region and the capacitive element formation region; and
(c2) a step of forming a fifth insulating film including a silicon nitride film and having a thickness larger than that of the fourth insulating film over the third insulating film,
the first conductive film includes a silicon film, and
in the step (e), the fourth insulating film functions as an etching stopper in etching the fifth insulating film.

Assignees

• Renesas Electronics Corp

Inventors

• Funayama Kota
• Chakihara Hiraku
• Ishii Yasushi

Classifications

• H10W20/4441

  the principal metal being a refractory metal · CPC title

• H10W20/4405

  the principal metal being aluminium · CPC title

• H10W20/20

  Interconnections within wafers or substrates, e.g. through-silicon vias [TSV] · CPC title

• H10D64/037

  comprising charge-trapping insulators · CPC title

• H10D64/035

  comprising conductor-insulator-conductor-insulator-semiconductor structures · CPC title