Multichip wafer level package (WLP) optical device

Patent metadata

Field	Value
Publication number	US-9322901-B2
Application number	US-201314141611-A
Country	US
Kind code	B2
Filing date	Dec 27, 2013
Priority date	Feb 20, 2013
Publication date	Apr 26, 2016
Grant date	Apr 26, 2016

Abstract

Optical devices are described that integrate multiple heterogeneous components in a single, compact package. In one or more implementations, the optical devices include a carrier substrate having a surface that includes two or more cavities formed therein. One or more optical component devices are disposed within the respective cavities in a predetermined arrangement. A cover is disposed on the surface of the carrier substrate so that the cover at least substantially encloses the optical component devices within their respective cavities. The cover, which may be glass, is configured to transmit light within the predetermined spectrum of wavelengths.

First claim

What is claimed is:

1. An optical device comprising:
a carrier substrate having a surface, the surface including at least a first cavity and a second cavity formed therein;
a light source disposed in the first cavity, the light source configured to emit light in a predetermined spectrum of wavelengths;
an optical sensor disposed in the second cavity, the optical sensor configured to detect light in the predetermined spectrum of wavelengths and to provide a signal in response thereto, the optical sensor including a wafer level package device die having a glass substrate formed thereon; and
a cover disposed on the surface of the carrier substrate so that the cover at least substantially encloses the light source within the first cavity and the optical sensor within the second cavity, the cover configured to transmit light within the predetermined spectrum of wavelengths.

2. The optical device as recited in claim 1 , wherein the cover comprises at least one of a first lens assembly disposed over the first cavity to collimate light emitted by the light source or a second lens assembly disposed over the second cavity to collimate light incident on the second lens assembly and to pass the collimated light to the optical sensor.

3. The optical device as recited in claim 1 , wherein the carrier substrate comprises at least one through-substrate-via (TSV), the through-substrate-via extending from one of the first cavity or the second cavity through the carrier substrate to furnish electrical connection to the light source or the optical sensor.

4. The optical device as recited in claim 3 , further comprising a redistribution trace disposed within at least one of the first cavity or the second cavity, the redistribution trace configured to furnish electrical connection between the light source or the optical sensor and the through-substrate-via.

5. The optical device as recited in claim 1 , further comprising at least one of a first reflective liner disposed within the first cavity, the first reflective liner configured to reflect light emitted by the light source, or a second reflective liner disposed within the second cavity, the second reflective liner configured to reflect light incident on the second cavity.

6. The optical device as recited in claim 1 , wherein the cover is configured to at least partially reflect light from the light source to the optical sensor as an optical waveguide.

7. The optical device as recited in claim 1 , wherein the light source comprises a light emitting diode (LED) or a vertical cavity surface emitting laser (VCSEL).

8. The optical device as recited in claim 1 , wherein the wafer level package die comprises a through-substrate-via (TSV) formed therein to facilitate connection of the optical sensor to the carrier substrate.

9. The optical device as recited in claim 1 , wherein the cover comprises glass.

10. An optical device comprising:
a carrier substrate having a surface, the surface including at least a first cavity and a second cavity formed therein;
a light source disposed in the first cavity, the light source configured to emit light in a predetermined spectrum of wavelengths;
a sensor disposed in the second cavity, the sensor configured to detect light in the predetermined spectrum of wavelengths and to provide a signal in response thereto;
a cover disposed on the surface of the carrier substrate so that the cover at least substantially encloses the light source within the first cavity and the sensor within the second cavity, the cover configured to transmit light within the predetermined spectrum of wavelengths; and
an optical baffle disposed between the first cavity and the second cavity and extending from the surface of the carrier substrate into the cover, the optical baffle configured to at least substantially prevent the transmission of crosstalk light from the light source to the sensor through the cover, wherein the optical baffle comprises a trench formed in the cover to receive light blocking material, the light blocking material configured to block light in the predetermined spectrum of wavelengths.

11. An optical device comprising:
a carrier substrate having a surface, the surface including at least a first cavity and a second cavity formed therein;
a light source disposed in the first cavity, the light source configured to emit light in a predetermined spectrum of wavelengths;
an optical sensor disposed in the second cavity, the optical sensor configured to detect light in the predetermined spectrum of wavelengths and to provide a signal in response thereto, the optical sensor including a wafer level package device die having a glass substrate formed thereon;
a glass cover disposed on the surface of the carrier substrate so that the cover at least substantially encloses the light source within the first cavity and the optical sensor within the second cavity, the glass cover configured to transmit light within the predetermined spectrum of wavelengths;
a first lens assembly disposed in the glass cover over the first cavity to collimate light emitted by the light source;
a second lens assembly disposed in the glass cover over the second cavity to collimate light incident on the second lens assembly and to pass the collimated light to the optical sensor; and
at least one through-substrate-via (TSV) disposed in the carrier substrate, the through-substrate-via extending from one of the first cavity or the second cavity through the carrier substrate to furnish electrical connection to at least one of the light source or the optical sensor.

12. The optical device as recited in claim 11 , further comprising at least one of a first reflective liner disposed within the first cavity, the first reflective liner configured to reflect light emitted by the light source, or a second reflective liner disposed within the second cavity, the second reflective liner configured to reflect light incident on the second cavity.

13. The optical device as recited in claim 11 , further comprising a redistribution trace disposed within at least one of the first cavity or the second cavity, the redistribution trace configured to furnish electrical connection between the light source or the optical sensor and the through-substrate-via.

14. The optical device as recited in claim 11 , wherein the light source comprises a light emitting diode (LED).

15. The optical device as recited in claim 11 , wherein the wafer level package die comprises a through-substrate-via (TSV) formed therein to facilitate electrical connection of the wafer level package die.

16. The optical device as recited in claim 15 , further comprising a second wafer level package die, the wafer level package die attached to the second wafer level package die in a stacked arrangement, wherein the through-substrate-via (TSV) is configured to facilitate electrical connection of the wafer level package die to the second wafer level package die.

17. An optical device comprising:
a carrier substrate having a surface, the surface including at least a first cavity and a second cavity formed therein;
a light source disposed in the first cavity, the light source configured to emit light in a predetermined spectrum of wavelengths;
a sensor disposed in the second cavity, the sensor configured to detect light in the predetermined spectrum of wavelengths and to provide a signal in response thereto;
a glass cover disposed on the surface of the carrier substrate so that the cover at least substantially encloses the light source within the first cavity and the sensor within the second cavity, the glass cov

Assignees

• Maxim Integrated Products

Inventors

• Kerness Nicole D
• Jones Joy T
• Edwards Christopher F
• Samoilov Arkadii V
• Benzel Phillip J
• Olsen Richard I
• Harper Peter R

Classifications

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• G01S17/58

  Velocity or trajectory determination systems; Sense-of-movement determination systems · CPC title

• G01S7/4813 Primary

  Housing arrangements · CPC title

• G01S17/04

  Systems determining the presence of a target · CPC title

• H10F77/407

  indirectly associated with the devices · CPC title