Diamond electrode nanogap transducers

Patent metadata

Field	Value
Publication number	US-9322798-B2
Application number	US-201113977651-A
Country	US
Kind code	B2
Filing date	Dec 15, 2011
Priority date	Dec 15, 2011
Publication date	Apr 26, 2016
Grant date	Apr 26, 2016

Abstract

Embodiments of the invention provide transducers capable of transducing redox active chemical signals into electrical signals. Transducers comprise two electrodes separated by a nanogap. At least one electrode is comprised of conducting diamond. Methods of fabricating nanogap transducers and arrays of nanogap transducers are provided. Arrays of individually addressable nanogap transducers can be disposed on integrated circuit chips and operably coupled to the integrated circuit chip.

First claim

We claim:

1. A device comprising, a substrate having a surface, and a transducer disposed on the substrate surface, wherein the transducer comprises:
a first electrode and a second electrode, wherein the first or the second electrode is comprised of conducting diamond, wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm, a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, and an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, wherein the substrate is an integrated circuit chip.

2. A device comprising, a substrate having a surface, and a transducer disposed on the substrate surface, wherein the transducer comprises:
a first electrode and a second electrode, wherein the first or the second electrode is comprised of conducting diamond, wherein the first and the second electrodes are each coupled to conducting lines through which voltage can be applied to the first and second electrodes independently and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm, a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, and an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity, wherein the substrate is an integrated circuit chip and the first electrode and the second electrode are independently electrically coupled to electronics within the integrated circuit chip through the conducting lines.

3. The device of claim 2 wherein the conducting diamond is nanocrystalline diamond.

4. The device of claim 2 wherein the conducting diamond is boron doped diamond.

5. The device of claim 2 wherein both the first and second electrodes are comprised of conducting diamond.

6. The device of claim 2 wherein the first electrode is comprised of conducting diamond and the height of the first electrode is between 300 nm and 1000 nm.

7. The device of claim 2 wherein the first or the second electrode is comprise of gold or platinum.

8. The device of claim 1 , wherein the second electrode surrounds at least the face the first electrode and both sides of the first electrode.

9. The device of claim 2 wherein the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm.

10. A device comprising, an integrated circuit chip having a surface, and an array of transducers disposed on the integrated circuit chip surface, wherein the array comprises at least 1000 transducers and at least 85% of the transducers are functional transducers, wherein transducers that make up the array are electrically coupled to and individually addressable through electronics in the integrated circuit chip, and wherein a transducer comprises: a first electrode and a second electrode, wherein the first or the second electrode is comprised of conducting diamond, wherein the first and second electrodes are independently coupled to the integrated circuit chip through which voltage can be applied to the first and second electrodes and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm, a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, and an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity.

11. The device of claim 10 wherein the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm.

12. The device of claim 10 wherein the conducting diamond is nanocrystalline diamond.

13. The device of claim 10 wherein the conducting diamond is boron doped diamond.

14. The device of claim 10 wherein both the first a second electrodes are comprised of conducting diamond.

15. The device of claim 10 wherein the first electrode is comprised of conducting diamond and the height of the first electrode is between 300 nm and 1000 nm.

16. The device of claim 10 wherein the first or the second electrode is comprise of gold or platinum.

17. A system comprising, a computer operably coupled to an integrated circuit chip wherein the integrated circuit chip comprises an array of transducers disposed on a surface of the integrated circuit chip, a fluidic system capable of supplying fluids to the surface of the integrated circuit chip comprising the array of transducers, wherein transducers that make up the array are electrically coupled to and individually addressable through electronics in the integrated circuit chip, and wherein a transducer comprises:
a first electrode and a second electrode, wherein the first or the second electrode is comprised of conducting diamond, wherein the first and second electrodes are independently coupled to the integrated circuit chip through which voltage can be applied to the first and second electrodes and a current measured from each of the first and second electrodes independently, and wherein the first electrode has a face and the second electrode has a face and the face of the first electrode is separated from the face of the second electrode by a distance that is less than 500 nm, a cavity capable of containing a fluid between the face of the first electrode and the face of the second electrode, and an access hole through the second electrode that is capable of allowing a fluid to enter and leave the cavity.

18. The device of claim 17 the face of the first electrode is separated from the face of the second electrode by a distance that is between 10 and 200 nm.

19. The device of claim 17 wherein the array comprises at least 1000 transducers and at least 90% of the transducers are functional transducers.

20. The device of claim 17 wherein the conducting diamond is nanocrystalline diamond.

21. The device of claim 17 wherein the conducting diamond is boron doped diamond.

22. The device of claim 17 wherein both the first and second electrodes are comprised of conducting diamond.

23. The device of claim 17 wherein the first or the second electrode is comprise of gold or platinum.

24. The device of claim 17 wherein the computer is configured to perform data analysis using current measurements from one of the first or the second electrode wherein the one of the first or second electrode from which the current is measured is comprised of conducting diamond.

Assignees

• Elibol Oguz H
• Akkaya Onur C
• Credo Grace M
• Daniels Jonathan S
• Tayebi Noureddine
• Intel Corp

Inventors

• Elibol Oguz H
• Akkaya Onur C
• Credo Grace M
• Daniels Jonathan S
• Tayebi Noureddine

Classifications

• G01N27/26 Primary

  by investigating electrochemical variables; by using electrolysis or electrophoresis · CPC title

• G01N27/3278 Primary

  involving nanosized elements, e.g. nanogaps or nanoparticles (nanopores G01N33/48721; magnetic beads G01N27/745) · CPC title

• C12Q2565/607

  being a sensor, e.g. electrode · CPC title

• B82Y15/00

  Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors · CPC title

• C12Q1/001 Primary

  Enzyme electrodes · CPC title