Semiconductor devices with graphene nanoribbons

Patent metadata

Field	Value
Publication number	US-9318323-B2
Application number	US-201314057166-A
Country	US
Kind code	B2
Filing date	Oct 18, 2013
Priority date	Oct 18, 2013
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

Semiconductor devices with graphene nanoribbons and methods of manufacture are disclosed. The method includes forming at least one layer of Si material on a substrate. The method further includes forming at least one layer of carbon based material adjacent to the at least one layer of Si. The method further includes patterning at least one of the at least one layer of Si material and the at least one layer of carbon based material. The method further includes forming graphene on the patterned carbon based material.

First claim

What is claimed is:

1. A method, comprising:
forming at least one layer of Si material on a substrate;
forming at least one layer of carbon based material adjacent to the at least one layer of Si;
patterning at least one of the at least one layer of Si material and the at least one layer of carbon based material to form at least one vertical stack of alternating Si and carbon based material; and
forming graphene on the patterned carbon based material.

2. The method of claim 1 , wherein the carbon based material is SiC material.

3. The method of claim 2 , wherein the forming of the graphene comprises an annealing step.

4. The method of claim 3 , wherein the annealing step comprises an anneal of about 1150° C. to about 1400° C. for about 30 to 300 minutes.

5. The method of claim 3 , wherein the graphene is a mono layer of a graphene nanoribbon formed about each layer of the SiC material.

6. The method of claim 2 , wherein:
the forming at least one layer of Si material is multiple layers;
the forming at least one layer of SiC material is multiple layers;
the multiple layers of Si material and SiC material are alternately stacked; and

the patterning of the alternating layers of the Si material and SiC material form one or more fin stacks.

7. The method of claim 6 , wherein a size of the graphene nanoribbons are based on a thickness of the SiC material in the one or more fin stacks.

8. The method of claim 7 , wherein the at least one layer of SiC material has a thickness of about 0.5 nm to 5 nm.

9. The method of claim 6 , further comprising forming one or more gate structures on the one or more fin stacks with graphene nanoribbons.

10. A method, comprising:
forming at least one layer of Si material on a substrate;
forming at least one layer of carbon based material adjacent to the at least one layer of Si;
patterning at least one of the at least one layer of Si material and the at least one layer of carbon based material; and
forming graphene on the patterned carbon based material,
wherein:
the carbon based material is SiC material;
the patterning comprises forming trenches within the at least one layer of Si material; and
the method further comprises:
depositing the SiC material within the trenches, thereby forming alternate layers of SiC material and Si material.

11. A method, comprising:
forming alternating layers of Si material and SiC material over a substrate;
patterning the alternating layers of Si material and SiC material into one or more fin stacks; and
forming graphene nanoribbons about the SiC material of the fin stacks by annealing at a predetermined annealing temperature and time, wherein:
the alternating layers of Si material and SiC material comprise plural layers of the Si material and plural layers of the SiC material;
the patterning comprises etching the plural layers of the Si material and the plural layers of the SiC material; and
the patterning forms trenches in the plural layers of the Si material and the plural layers of the SiC material, such that adjacent ones of the fin stacks are separated by one of the trenches.

12. The method of claim 11 , wherein the predetermined annealing temperature and time is about 1150° C. to about 1400° C. for about 30 to 300 minutes.

13. The method of claim 12 , wherein the graphene nanoribbons is a mono layer of graphene about each of the layers of SiC material.

14. The method of claim 12 , further comprising forming one or more gate structures on the one or more fin stacks with graphene nanoribbons.

15. The method of claim 12 , wherein the patterning is a sidewall image transfer process.

16. The method of claim 12 , wherein the alternating layers of Si material and SiC material are at least two layers each of Si material and SiC material.

17. The method of claim 11 , wherein each layer of SiC material has a thickness of about 0.5 nm to 5 nm.

18. The method of claim 17 , wherein each layer of SiC material has a thickness of about 1 nm to 5 nm.

19. The method of claim 18 , wherein each layer of SiC material has a thickness of about 2 nm to 3 nm.

Assignees

• IBM
• Globalfoundries Inc

Inventors

• Alptekin Emre
• Sardesai Viraj Y
• Vega Reinaldo A

Classifications

• H10P14/3466

  Crystal orientation · CPC title

• H10P14/3451

  Structure · CPC title

• H10P14/3406

  Carbon, e.g. diamond-like carbon · CPC title

• H10P14/3258

  Crystal orientation · CPC title

• H10P14/3252

  Alternating layers, e.g. superlattice · CPC title