Distance measurement device, distance measurement method, and distance measurement program
US-2024191984-A1 · Jun 13, 2024 · US
Laser tracking interferometer
US9316487B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9316487-B2 |
| Application number | US-201414280743-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 19, 2014 |
| Priority date | May 24, 2013 |
| Publication date | Apr 19, 2016 |
| Grant date | Apr 19, 2016 |
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Abstract
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A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor calculating a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer.
First claim
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What is claimed is: 1. A laser tracking interferometer for detecting a displacement of a first retroreflector by utilizing interference of a laser beam emitted toward the first retroreflector as a measured body and reflected by the first retroreflector in a return direction, the laser tracking interferometer performing tracking by using a positional change of an optical axis of the laser beam, the laser tracking interferometer comprising: a reference sphere fixed in place; a car…
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- G01B11/14Primary
Physics · mapped topic
- G01B11/002Primary
Physics · mapped topic
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- What does patent US9316487B2 cover?
- A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and…
- Who is the assignee on this patent?
- Mitutoyo Corp
- What technology area does this patent fall under?
- Primary CPC classification G01B11/14. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 19 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).