Isolation of microwave sources through bellows

Patent metadata

Field	Value
Publication number	US-9315900-B2
Application number	US-201314371415-A
Country	US
Kind code	B2
Filing date	Jan 11, 2013
Priority date	Jan 27, 2012
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

A bellows which forms a flexible coupling between the lid of a processing chamber and an antenna feed through. One embodiment provides an apparatus comprising a chamber body having a chamber lid, a feed through extending through the chamber lid, an antenna coupled to and extending through the feed through to an internal volume of the chamber body, and a bellows comprising a first flange, the first flange coupled to the feed through, a second flange, the second flange coupled to the chamber lid, and a center portion extending between the first flange and the second flange.

First claim

The invention claimed is:

1. An apparatus, comprising:
a chamber body having a chamber lid;
a feed through extending through the chamber lid;
an antenna coupled to and extending through the feed through to an internal volume of the chamber body; and
a bellows comprising:
a first flange, the first flange coupled to the feed through;
a second flange, the second flange coupled to the chamber lid; and
a center portion extending between the first flange and the second flange.

2. The apparatus of claim 1 , wherein the feed through is not coupled directly to the chamber lid.

3. The apparatus of claim 1 , wherein the bellows forms a vacuum seal between the feed through and the chamber lid.

4. The apparatus of claim 1 , wherein the center portion comprises a flexible region adapted to expand in response a tensile force between the first and second flanges and contract in response to a compressive force between the first and second flanges.

5. The apparatus of claim 1 , further comprising a dielectric layer disposed around the antenna, wherein the dielectric layer is coupled to the feed through.

6. The apparatus of claim 5 , wherein the dielectric layer forms a vacuum seal with the feed through.

7. The apparatus of claim 5 , further comprising an end cap coupled to the feed through, the end cap forming a vacuum seal with the feed through and the dielectric layer.

8. The apparatus of claim 1 , further comprising:
a support framework coupled to the chamber body; and
a microwave power head coupled to the support framework, the feed through being coupled to the microwave power head.

9. The apparatus of claim 8 , wherein the support framework is not coupled directly to the chamber lid.

10. The apparatus of claim 9 , wherein at least one end of the support framework forms a sliding connection with the chamber body.

11. The apparatus of claim 1 , wherein the bellows comprises a metal alloy.

12. The apparatus of claim 1 , wherein the bellows is disposed in a recess formed in the chamber lid.

13. An apparatus, comprising:
a chamber body having a chamber lid;
a feed through extending through the chamber lid, the feed through not being coupled directly to the chamber lid;
an antenna coupled to and extending through the feed through to an internal volume of the chamber body; and
a bellows forming a vacuum seal between the feed through and the chamber lid, the bellows comprising:
a first flange, the first flange coupled to the feed through;
a second flange, the second flange coupled to the chamber lid; and
a center portion comprising a flexible region, the center portion extending between the first flange and the second flange.

14. A method for isolating an antenna, comprising:
providing a chamber body having a chamber lid;
coupling a bellows to the chamber body;
coupling a feed through to the bellows;
disposing an antenna in the feed through; and
evacuating the chamber body to form a vacuum condition in the chamber, wherein the chamber lid undergoes a deflection in response to the evacuating, and the bellows reduces the degree to which the deflection of the chamber lid is translated to the feed through and the antenna.

15. The method of claim 14 , wherein the feed through is not coupled directly to the chamber lid.

16. The method of claim 14 , wherein the bellows comprises a center portion having a flexible region adapted to expand in response a tensile force between a first flange and a second flange of the bellows and contract in response to a compressive force between the first flange and the second flange of the bellows.

17. The method of claim 14 , further comprising forming a vacuum seal between the chamber lid and the feed through with the bellows.

18. The method of claim 14 , further comprising coupling the feed through to a dielectric layer disposed around the antenna.

19. The method of claim 14 , wherein the coupling comprises forming a vacuum seal between the bellows and the chamber lid and forming a vacuum seal between the feed through and the bellows.

20. The method of claim 14 , wherein the bellows comprises a metal alloy.

Assignees

• Applied Materials Inc

Inventors

• Johnston Benjamin M
• Kurita Shinichi

Classifications

• H01J37/32513

  Sealing means, e.g. sealing between different parts of the vessel · CPC title

• C23C16/4409

  characterised by sealing means · CPC title

• H01J37/3222

  Antennas · CPC title

• C23C16/511 Primary

  using microwave discharges · CPC title