High power filter with single adjust for multiple channels

Patent metadata

Field	Value
Publication number	US-9312832-B2
Application number	US-201414339295-A
Country	US
Kind code	B2
Filing date	Jul 23, 2014
Priority date	Jul 23, 2014
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

A RF filter system for filtering radio frequency is provided. A first plurality of capacitors, said first plurality of capacitors comprising at least a first capacitor and a second capacitor is provided. A first conductor and second conductor are wound around a first core member to forma first inductor formed from the first conductor and a second inductor formed from the second conductor, a first end of said first conductor being connected to a first end of a first load and to a first end of said first capacitor, wherein a first end of said second conductor being connected to a second end of the first load and a second end of said second capacitor. A first variable component has a first end connected to ground and a second end connected to a second end of said first capacitor and a first end of said second capacitor.

First claim

What is claimed is:

1. A RF filter system for filtering radio frequency (RF) power transmitted from at least an electrostatic chuck (ESC) in a plasma processing system, said plasma processing system including at least a first load disposed at a first portion of said ESC, said plasma processing system further including at least a power supply, said RF filter system comprising:
a first core member;
a first plurality of capacitors, said first plurality of capacitors comprising at least a first capacitor and a second capacitor;
a first conductor;
a second conductor, wherein first portions of the first conductor and second conductor are wound around and wound along at least a first portion of said first core member to form at least a first set of inductors comprising a first inductor formed from the first conductor and a second inductor formed from the second conductor, a first end of said first conductor being connected to a first end of said first load and to a first end of said first capacitor and a second end of said first conductor being electrically connected to said power supply, wherein a first end of said second conductor being connected to a second end of said first load and a second end of said second capacitor, and wherein a second end of said second conductor being electrically connected to said power supply; and
a first variable component with a first end connected to ground, and a second end connected to a second end of said first capacitor and a first end of said second capacitor.

2. The RF filter system, as recited in claim 1 , further comprising a first motor for controlling the first variable component.

3. The RF filter system, as recited in claim 2 , further comprising a RF sensor controllably connected to the first motor.

4. The RF filter system, as recited in claim 3 , wherein said plasma processing system further includes at least a second load disposed at a second portion of said ESC, wherein the first plurality of capacitors further comprises a third capacitor and a fourth capacitor;
a third conductor; and
a fourth conductor, wherein first portions of the third conductor and the fourth conductor are wound around and wound along at least said first portion of said first core member to form a third inductor formed from the third conductor and a fourth inductor formed from the fourth conductor, wherein a first end of said third conductor being connected to a first end of said second load and a first end of said third capacitor and wherein a second end of said third conductor being connected to said power supply and wherein a first end of said fourth conductor being connected to a second end of said second load and a second end of said fourth capacitor and wherein a second end of said fourth conductor being connected to said power supply and wherein the second end of the first variable component is connected to a second end of said third capacitor and a first end of said fourth capacitor.

5. The RF filter system, as recited in claim 4 , further comprising:
a second core;
a second plurality of capacitors, comprising a fifth capacitor, a sixth capacitor, a seventh capacitor, and an eighth capacitor;
a fifth conductor;
a sixth conductor;
a seventh conductor; and
an eighth conductor wherein portions of the fifth, sixth, seventh, and eight conductors are wound around the second core forming a second set of inductors comprising a fifth inductor formed from the fifth conductor, a sixth inductor formed from the sixth conductor, a seventh inductor formed from the seventh conductor wound around the second core, and an eighth inductor formed by the eighth conductor wound around the second core, wherein the fifth conductor has a first end electrically connected to the second end of the first conductor and a first end of the fifth capacitor and a second end electrically connected to said power supply, wherein the first conductor is electrically connected to said power supply through the fifth conductor, and wherein the sixth conductor has a first end electrically connected to the second end of the second conductor and a second end of the sixth capacitor and a second end electrically connected to said power supply, wherein the second conductor is electrically connected to said power supply through the sixth conductor, and wherein the seventh conductor has a first end electrically connected to the second end of the third conductor and a first end of the seventh capacitor and a second end electrically connected to said power supply, wherein the third conductor is electrically connected to said power supply through the seventh conductor, and wherein the eighth conductor has a first end electrically connected to the second end of the fourth conductor and a second end of the eighth capacitor and a second end electrically connected to said power supply, wherein the fourth conductor is electrically connected to said power supply through the eighth conductor; and
a second variable component electrically connected to the second ends of the fifth and seventh capacitors and connected to the first ends of the sixth and eighth capacitors.

6. The RF filter system, as recited in claim 5 , further comprising:
a third core;
a third plurality of capacitors, comprising a ninth capacitor, a tenth capacitor, an eleventh capacitor, and a twelfth capacitor;
a ninth conductor;
a tenth conductor;
an eleventh conductor; and
a twelfth conductor wherein portions of the ninth, tenth, eleventh, and twelfth conductors are wound around the third core forming a third set of inductors comprising a ninth inductor formed from the ninth conductor, a tenth inductor formed from the tenth conductor, an eleventh inductor formed from the eleventh conductor, and a twelfth inductor formed by the twelfth conductor wound around the third core, wherein the ninth conductor has a first end electrically connected to the second end of the fifth conductor and a first end of the ninth capacitor and a second end electrically connected to said power supply, wherein the first conductor and fifth conductor are electrically connected to said power supply through the ninth conductor, and wherein the tenth conductor has a first end electrically connected to the second end of the sixth conductor and a first end of the tenth capacitor and a second end electrically connected to said power supply, wherein the second and sixth conductors are electrically connected to said power supply through the tenth conductor, and wherein the eleventh conductor has a first end electrically connected to the second end of the seventh conductor and a first end of the eleventh capacitor and a second end electrically connected to said power supply, wherein the third and seventh conductors are electrically connected to said power supply through the eleventh conductor, and wherein the twelfth conductor has a first end electrically connected to the second end of the eighth conductor and a second end of the twelfth capacitor and a second end electrically connected to said power supply, wherein the fourth and eighth conductors are electrically connected to said power supply through the twelfth conductor; and
a third variable component electrically connected to second ends of the ninth and eleventh capacitor and first ends of the tenth and twelfth capacitors.

7. The RF filter system, as recited in claim 6 , wherein at least a section the first, second, third, and fourth conductors are twisted together.

8. The RF filter system, as recited in claim 7 , wherein the first variable component is a first variable capacitor, the second variable component is a second variable capacitor, and the third variable component is a third variable capacitor.

9. The RF filter system, as recited in claim 8 , wherein each of the fi

Assignees

• Lam Res Corp

Inventors

• Jafarian-Tehrani Seyed Jafar

Classifications

• H03H7/0153

  Electrical filters; Controlling thereof · CPC title

• H03H7/06 Primary

  including resistors (H03H7/075, H03H7/09, H03H7/12, H03H7/13 take precedence) · CPC title

• H03H7/0138

  Electrical filters or coupling circuits · CPC title