Deflection plate and deflection device for deflecting charged particles

Patent metadata

Field	Value
Publication number	US-9312092-B2
Application number	US-201214397026-A
Country	US
Kind code	B2
Filing date	May 31, 2012
Priority date	May 31, 2012
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

A deflection plate having a non-planar shape, for deflecting charged particles is provided. An associated method is also provided.

First claim

The invention claimed is:

1. A deflection device for deflecting charged particles, wherein the deflection device is configured to deflect a charged particle, which is moving in a third spatial direction, in a second spatial direction, the deflection device comprising:
a first deflection plate; and
a second deflection plate;
wherein the first deflection plate and the second deflection plate have a non-planar shape, and are both curved about an axis oriented in a first spatial direction;
wherein the second deflection plate is disposed in a mirror-imaged manner in relation to the first deflection plate;
wherein the first spatial direction, the second spatial direction, and the third spatial direction are perpendicular to each other.

2. The deflection device as claimed in claim 1 , wherein at least one of the first deflection plate and the second deflection plate has an arced shape, the arced shape forming a cylinder lateral surface of the first deflection plate or the second deflection plate.

3. The deflection device as claimed in claim 1 , wherein at least one of the first deflection plate and the second deflection plate includes a conductive material, the conductive material being a metal.

4. The deflection device as claimed in claim 1 , wherein the deflection device deflects a charged particle moving in the third spatial direction into the second spatial direction.

5. The deflection device as claimed in claim 1 , wherein the second deflection plate disposed in the mirror-imaged manner in relation to the first deflection plate such that the first deflection plate and the second deflection plate are aligned with respect to third spatial direction.

Assignees

• Aptaker Peter Simon
• Beasley Paul
• Heid Oliver
• Siemens Ag

Inventors

• Aptaker Peter Simon
• Beasley Paul
• Heid Oliver

Classifications

• H05H7/00 Primary

  Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00 · CPC title

• H05H2007/002

  for modifying beam trajectory, e.g. gantries · CPC title

• H01J2237/15

  Means for deflecting or directing discharge · CPC title

• H01J37/147 Primary

  Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10) · CPC title