Contactless capacitive distance sensor
US-9410999-B2 · Aug 9, 2016 · US
Method for measuring displacement of planar motor rotor
US9310782B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9310782-B2 |
| Application number | US-201314382221-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 21, 2013 |
| Priority date | Mar 1, 2012 |
| Publication date | Apr 12, 2016 |
| Grant date | Apr 12, 2016 |
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Abstract
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A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals B sx , B cx , B sy and B cy and magnetic field reference values B ksx , B kcx , B ksy and B kcy ; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δ x and Δ y are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value. B ksx B cx - B kcx B sx B M 2 ≥ Δ x ( I ) B ksy B cy - B kcy B sy B M 2 ≥ Δ y ( II )
First claim
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The invention claimed is: 1. A method for measuring the displacement of a rotor of a planar motor, characterized in that, the said method comprising: 1) a magnetic field is generated by a magnetic steel array ( 2 ) on a stator ( 1 ) of the planar motor and four magnetic induction intensity sensors are disposed on a rotor ( 3 ) of the planar motor; the coordinates of the first sensor ( 4 ) are (X 1 , Y 1 ), the coordinates of the second sensor ( 5 ) are (X 3 , Y 1 ), the coordinates of the third sensor ( 6 ) are (X 2 , Y 2 ) and the coordinates of the fourth sensor ( 7 ) are (X 4 , Y 2 ); the sampled signals of the first sensor, the second sensor, the third sensor and the fourth sensor are B a , B b , B c and B d respectively and the sampled signals B a , B b , B c and B d are processed in a signal processing circuit ( 8 ), wherein, the X-direction coordinates X 1 , X 2 , X 3 and X 4 are spaced apart from each other sequentially by a distance of one fourth of the X-direction magnetic field pitch τ x of the planar motor, and the Y-direction coordinates Y 1 and Y 2 are spaced apart from each other by a distance of one fourth of the Y-direction magnetic field pitch τ y of the planar motor; 2) supposing the X-direction displacement resolution as Δx and the Y-direction displacement resolution as Δy, the magnitude of the magnetic induction intensity of the magnetic field generated by the magnetic steel array ( 2 ) is measured as B M , the X-direction counting unit is initialized to be n x =0, the Y-direction counting unit is initialized to be n y =0, the X-direction magnetic field reference values are initialized to be B ksx = B a 0 - B b 0 2 , B kcx = B c o - B d o 2 , and the Y-direction magnetic field reference values are initialized to be B ksy = B a 0 + B b 0 2 , B kcy = B c 0 + B d 0 2 , wherein B a0 , B b0 , B c0 and B d0 are respectively the sampled signals from the first sensor, the second sensor, the third sensor and the fourth sensor when the rotor of the planar motor is at the initial position; 3) the measurement starts, and the sampled signals B a , B b , B c and B d of the first sensor ( 4 ), the second sensor ( 5 ), the third sensor ( 6 ) and the fourth sensor ( 7 ) are obtained by sampling, and the sampled signals B a , B b , B c and B d are processed in the signal processing circuit ( 8 ) to obtain four signals B sx , B cx , B sy and B cy , wherein B sx = B a - B b 2 , B cx = B c - B d 2 , B sy = B a + B b 2 , B cy = B c + B d
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- What does patent US9310782B2 cover?
- A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals B sx , B cx , B sy and B cy and magnetic field reference values B ksx , B kcx , B ksy and B kcy ; and X-direction displacement and Y…
- Who is the assignee on this patent?
- Shanghai Microelectronics Equi, Univ Tsinghua
- What technology area does this patent fall under?
- Primary CPC classification G01B7/023. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 12 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).