Digital exposure device using digital micro-mirror device and a method for controlling the same

Patent metadata

Field	Value
Publication number	US-9310697-B2
Application number	US-201314141147-A
Country	US
Kind code	B2
Filing date	Dec 26, 2013
Priority date	Jul 9, 2013
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

Provided is a digital exposure device. The digital exposure device includes a stage mounted with a substrate on which a pattern is formed, a first light source, a first head, and a digital micro-mirror device control unit. The stage is configured to move in a scan direction. The first light source is configured to provide a first light. The first head is spaced apart from the stage in a first direction and is configured to receive the first light, to generate at least one spot beam by modulating the first light, and to project the at least one spot beam onto the substrate. The digital micro-mirror device control unit is configured to control an energy of the at least one spot beam generated from the first head to be inversely proportional to a size of the at least spot beam generated from the first head.

First claim

What is claimed is:

1. A digital exposure device comprising:
a stage on which a substrate is seated, wherein the stage is configured to move in a scan direction;
a first light source configured to provide a first light;
a first head configured to receive the first light, to generate at least one spot beam by modulating the first light, and to project the at least one spot beam onto the substrate, wherein the first head is spaced apart from the stage in a first direction; and…

Assignees

• Samsung Display Co Ltd

Inventors

• Yun Sanghyun
• Kim Cha-Dong
• Kim Changhoon
• Park Jung-In
• Lee Kibeom
• Lee Hikuk
• Chang Jaehyuk

Classifications

• G03F7/2051

  Physics · mapped topic

• G03F7/70291 Primary

  Physics · mapped topic

• G03F7/70275

  Physics · mapped topic

• G03F7/70208

  Physics · mapped topic

• G03F7/20 Primary

  Physics · mapped topic