Target supply device and target supply method

Patent metadata

Field	Value
Publication number	US-9310686-B2
Application number	US-201313953350-A
Country	US
Kind code	B2
Filing date	Jul 29, 2013
Priority date	Aug 1, 2012
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

A target supply method uses a target supply device that includes a target generation unit having a nozzle, a pressure control unit having a pressure sensor and an actuator, an electrode, a potential application unit, and a timer; further, the method include raising the pressure inside the target generation unit to a setting pressure by the actuator, applying different potentials to the electrode and a target material from each other by the potential application unit in the case where it is detected that the pressure inside the target generation unit is halfway raised to the setting pressure, and applying a constant first potential to the target material and a first pulse voltage to the electrode by the potential application unit to extract the target material with electrostatic force in the case where it is detected that the pressure inside the target generation unit has been raised to the setting pressure.

First claim

What is claimed is:

1. A target supply method using a target supply device that includes:
a target generation unit which has a nozzle and is configured to accommodate a target material in an interior of the target generation unit;
a pressure control unit which has a pressure sensor configured to detect a pressure inside the target generation unit and has an actuator configured to control the pressure inside the target generation unit;
an electrode configured to extract the target material through a nozzle hole of the nozzle with electrostatic force;
a potential application unit configured to apply a potential to the electrode and the target material inside the target generation unit; and
a timer, the target supply method comprising:
raising the pressure inside the target generation unit to a setting pressure by the actuator based on a detection result of the pressure inside the target generation unit detected by the pressure sensor;
applying different potentials to the electrode and the target material from each other by the potential application unit in the case where it is detected based on a time of the timer that the pressure inside the target generation unit is halfway raised to the setting pressure; and applying a constant first potential to the target material and a first pulse voltage to the electrode by the potential application unit in order to extract the target material with the electrostatic force in the case where it is detected based on the detection result by the pressure sensor that the pressure inside the target generation unit has been raised to the setting pressure.

2. The target supply method according to claim 1 ,
wherein, if it is detected that the pressure inside the target generation unit is halfway raised to the to the setting pressure, applying of different potentials to the electrode and the target material from each other by the potential application unit is performed by the potential application applying a constant second potential which is the same as or different from the first potential to the target material and also applying a second pulse voltage which is the same as or different from the first pulse voltage to the electrode from time before raising of the pressure toward the setting pressure is started until time at which the pressure has been raised to the setting pressure.

3. The target supply method according to claim 1 ,
wherein, if it is detected that the pressure inside the target generation unit is halfway raised to the setting pressure, applying of different potentials to the electrode and the target material from each other by the potential application unit is performed by the potential application unit applying a constant second potential which is the same as or different from the first potential to the target material and also applying a constant third potential which is lower than the second potential to the electrode from time before the raising of the pressure to the setting pressure is started until time when the pressure has been raised to the setting pressure.

4. A target supply device comprising:
a target generation unit that has a nozzle and is configured to accommodate a target material in the interior of the target generation unit;
a pressure control unit that has a pressure sensor configured to detect a pressure inside the target generation unit and has an actuator configured to control the pressure inside the target generation unit;
an electrode configured to extract the target material through a nozzle hole of the nozzle with electrostatic force;
a potential application unit configured to apply a potential to the electrode and the target material inside the target generation unit;
a timer; and
a controlling unit configured to:
control the actuator such that the pressure inside the target generation unit is raised to a setting pressure based on a detection result of the pressure inside the target generation unit detected by the pressure sensor and a time of the timer;
control the potential application unit such that applying different potentials are applied to the electrode and the target material from each other in the case where it is detected that the pressure inside the target generation unit is halfway raised to the setting pressure based on the detection result of the pressure inside the target generation unit by the pressure sensor and the time of the timer; and
control the potential application unit such that a constant first potential is applied to the target material and a first pulse voltage is applied to the electrode in order to extract the target material with the electrostatic force in the case where it is detected that the pressure inside the target generation unit has been raised to the setting pressure based on the detection result of the pressure inside the target generation unit detected by the pressure sensor and the time of the timer.

5. The target supply device according to claim 4 ,
wherein, if it is detected that the pressure inside the target generation unit is halfway raised to the setting pressure, the controlling unit controls the potential application unit such that different potentials are applied to the electrode and the target material from each other through applying a constant second potential which is the same as or different from the first potential to the target material and also applying a second pulse voltage which is the same as or different from the first pulse voltage to the electrode in the case where the controlling unit detects that the raising of the pressure toward the setting pressure is before being started and that the pressure is before being raised up to the setting pressure based on the detection result of the pressure inside the target generation unit detected by the pressure sensor and the time of the timer.

6. The target supply device according to claim 4 ,
wherein, if it is detected that the pressure inside the target generation unit is halfway raised to the setting pressure, the controlling unit controls the potential application unit such that different potentials are applied to the electrode and the target material from each other through applying a constant second potential which is the same as or different from the first potential to the target material and also applying a constant third potential which is lower than the second potential to the electrode in the case where the controlling unit detects that the raising of the pressure toward the setting pressure is before being started and that the pressure is before being raised up to the setting pressure based on the detection result of the pressure inside the target generation unit detected by the pressure sensor and the time of the timer.

Assignees

• Gigaphoton Inc

Inventors

• Yabu Takayuki
• Abe Tamotsu

Classifications

• H05G2/0027

  Arrangements for controlling the supply; Arrangements for measurements · CPC title

• H05G2/007

  involving electric or magnetic fields in the process of plasma generation · CPC title

• B05B12/02

  for controlling time, or sequence, of delivery · CPC title

• B05B5/0531

  Power generators · CPC title

• B05B5/0255

  spraying and depositing by electrostatic forces only · CPC title