Method of fabricating a display apparatus

Patent metadata

Field	Value
Publication number	US-9310605-B2
Application number	US-201314014564-A
Country	US
Kind code	B2
Filing date	Aug 30, 2013
Priority date	Mar 8, 2011
Publication date	Apr 12, 2016
Grant date	Apr 12, 2016

Abstract

A display apparatus includes a first substrate and a second substrate. The first substrate includes a light shielding layer including a first opening which transmits a light. The second substrate includes a shutter including a second opening which corresponds to the first opening, and a first flexible electrode part which is connected to one end of the shutter and transmits or blocks the light by moving the shutter. The first flexible electrode part includes a first flexible electrode, a second flexible electrode, and an insulation pattern. The insulation pattern insulates the first flexible electrode and the second flexible electrode from each other, and exposes upper and lower surfaces of the first flexible electrode and the second flexible electrode which are parallel to the second substrate, by covering portions of the first flexible electrode and the second flexible electrode.

First claim

What is claimed is:

1. A method of fabricating a display apparatus including a shutter system, the method comprising:
forming on a first insulating substrate, a light shielding layer in which a first opening is defined;
forming a sacrificial pattern on a second insulating substrate;
forming a conductive layer including a conductive material on the sacrificial pattern;
patterning the conductive layer to form a first flexible electrode, a second flexible electrode and a shutter of the shutter system;
forming an insulation pattern which covers portions of the first and second flexible electrodes, and exposes upper and lower surfaces of the first and second flexible electrodes which are parallel to the second insulating substrate;
removing the sacrificial pattern after the forming the insulation pattern; and
disposing the first insulating substrate to face the second insulating substrate with the shutter system therebetween, after the removing the sacrificial pattern, such that the display apparatus includes the shutter system.

2. The method of claim 1 , wherein the forming the sacrificial pattern comprises:
forming a sacrificial layer on the second insulating substrate; and
patterning the sacrificial layer to have sidewalls perpendicular to an upper surface of the second insulating substrate.

3. The method of claim 1 , wherein
the first flexible electrode comprises a first flexible beam, and a first support which supports the first flexible beam suspended over the second insulating substrate,
the second flexible electrode comprises a second flexible beam which faces the first flexible beam, and a second support which supports the second flexible beam suspended over the second insulating substrate, and
each of the first flexible beam and the second flexible beam further comprises a first surface, and a second surface which opposes the first surface, which are perpendicular to an upper surface of the second insulating substrate, wherein the second surfaces of the first flexible beam and the second flexible beam face each other.

4. The method of claim 3 , wherein the insulation pattern covers at least one of the first surfaces and the second surfaces.

5. The method of claim 4 , wherein the forming the insulation pattern comprises:
forming a first insulation layer including a first insulation material on the second insulating substrate where the first flexible electrode, the second flexible electrode, and the shutter are formed; and
anisotropically etching the first insulation layer in a first direction perpendicular to the upper surface of the second insulating substrate.

6. The method of claim 5 , wherein the forming the insulation pattern further comprises:
forming a second insulation layer including a second insulation material on the sacrificial pattern before the forming of the conductive layer; and
anisotropically etching the second insulation layer in the first direction.

7. The method of claim 6 , wherein the insulation pattern comprises:
a first insulation pattern which covers the first surfaces of the first flexible beam and the second flexible beam, and
a second insulation pattern which covers the second surfaces of the first flexible beam and the second flexible beam,
wherein
the first insulation pattern is formed by patterning the first insulation layer, and
the second insulation pattern is formed by patterning the second insulation layer.

8. The method of claim 1 , wherein the insulation pattern comprises at least one of silicon nitride, silicon oxide, and aluminum oxide.

9. The method of claim 1 , further comprising forming a switching device on the second insulating substrate before the forming the sacrificial pattern.

10. The method of claim 9 , wherein the forming the sacrificial pattern comprises:
forming a first sacrificial pattern including an exposure hole which exposes a portion of the switching device; and
forming a second sacrificial layer including the sidewalls on the first sacrificial layer,
wherein a portion of the first flexible electrode is connected to the switching device through the exposure hole.

11. The method of claim 1 , wherein the sacrificial pattern is removed by isotropic etching.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Dae Hyun
• Park Jae Byung
• Song Chun-Ho
• Cho Donchan
• Yun Sungsik
• Kim Yu-Kwan

Classifications

• G02B26/02

  for controlling the intensity of light {(G02B26/004 takes precedence)} · CPC title

• Y10T29/49117

  Conductor or circuit manufacturing · CPC title

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title

• H04N5/66

  Transforming electric information into light information (scanning details H04N3/00) · CPC title