Method and arrangement for operating pump system
US-2024405705-A1 · Dec 5, 2024 · US
System and method for position control of a mechanical piston in a pump
US9309872B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9309872-B2 |
| Application number | US-201414152866-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 10, 2014 |
| Priority date | Dec 2, 2005 |
| Publication date | Apr 12, 2016 |
| Grant date | Apr 12, 2016 |
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Abstract
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Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
First claim
Opening claim text (preview).
What is claimed is: 1. A method, comprising: connecting a brushless DC motor to a mechanical piston in a pump having an inlet and an outlet; configuring a controller for controlling the brushless DC motor and directing a fluid from the inlet of the pump to the outlet of the pump, the controller having a non-transitory computer-readable medium carrying software instructions for controlling the pump and a processor communicatively coupled to the non-transitory computer-readable me…
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- What does patent US9309872B2 cover?
- Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback t…
- Who is the assignee on this patent?
- Entegris Inc
- What technology area does this patent fall under?
- Primary CPC classification F04B17/03. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Apr 12 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).