Blasting apparatus and volumetric feeder
US-2022250208-A1 · Aug 11, 2022 · US
Apparatus for treating a plate-like member and method of treating the same
US9308624B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9308624-B2 |
| Application number | US-201113514413-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 6, 2011 |
| Priority date | Jun 4, 2010 |
| Publication date | Apr 12, 2016 |
| Grant date | Apr 12, 2016 |
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- Title
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Abstract
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The present invention provides an apparatus for removing the unnecessary thin-film layer on the periphery of the substrate of the plate-like member having a square shape, on the surface of which substrate is formed a thin-film layer. The apparatus comprises a chamber to treat the peripheral part where the peripheral part of the plate-like member is inserted and where the unnecessary thin-film layer on the peripheral part of the plate-like member is removed; and a means to move the plate-like member. The chamber to treat the peripheral part comprises a cover to prevent the scattering of the sprayed particles and the dust for treating the peripheral part, the cover having one of its end-sides that forms a ceiling being closed and having the other end-side that is opposed to the ceiling being open and a suctioning cover for treating the peripheral part, having an opening that has the same shape as the opening of the cover to prevent the scattering of the dust. In the chamber to treat the peripheral part, a blasting nozzle for spraying particles for treating the peripheral part is disposed on the cover to prevent the scattering of the dust, so that the mouth of the blasting nozzle is covered by the wall of the cover to prevent the scattering of the sprayed particles and the dust.
First claim
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The invention claimed is: 1. An apparatus for removing an unnecessary thin-film layer on the periphery of a substrate of a plate-like member having a square shape, on the surface of which substrate is formed a thin-film layer, the apparatus for removing the unnecessary thin-film layer comprising: a chamber to treat the peripheral part comprising an opening into which the peripheral part of the plate-like member is inserted and in which chamber the unnecessary thin-film layer on th…
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- What does patent US9308624B2 cover?
- The present invention provides an apparatus for removing the unnecessary thin-film layer on the periphery of the substrate of the plate-like member having a square shape, on the surface of which substrate is formed a thin-film layer. The apparatus comprises a chamber to treat the peripheral part where the peripheral part of the plate-like member is inserted and where the unnecessary thin-film l…
- Who is the assignee on this patent?
- Hibino Kazumichi, Suzuki Yukinori, Maeda Kazuyoshi, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification B24C3/12. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Apr 12 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).