Semiconductor device
US-12057459-B2 · Aug 6, 2024 · US
US9306074B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9306074-B2 |
| Application number | US-201414293484-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 2, 2014 |
| Priority date | Jun 5, 2013 |
| Publication date | Apr 5, 2016 |
| Grant date | Apr 5, 2016 |
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Provided is a semiconductor device including a transistor having excellent electrical characteristics (e.g., on-state current, field-effect mobility, or frequency characteristics) or a semiconductor device including a transistor with high reliability. In the channel width direction of a channel-etched transistor in which an oxide semiconductor film is between first and second gate electrodes, the first and second gate electrodes are connected to each other through an opening portion in first and second gate insulating films. In addition, the first and second gate electrodes surround the oxide semiconductor film in a cross-section in the channel width direction, with the first gate insulating film provided between the first gate electrode and the oxide semiconductor film and the second gate insulating film provided between the second gate electrode and the oxide semiconductor film. Furthermore, the channel length of the transistor is 0.5 μm or longer and 6.5 μm or shorter.
Opening claim text (preview).
What is claimed is: 1. A semiconductor device comprising: a first gate electrode; a first gate insulating film over the first gate electrode; an oxide semiconductor film over the first gate insulating film; a second gate insulating film over the oxide semiconductor film; a second gate electrode over the second gate insulating film; and a source electrode and a drain electrode electrically connected to the oxide semiconductor film, wherein a first opening portion is pro…
Physics · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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