Method for growing germanium epitaxial films

Patent metadata

Field	Value
Publication number	US-9305779-B2
Application number	US-53900309-A
Country	US
Kind code	B2
Filing date	Aug 11, 2009
Priority date	Aug 11, 2009
Publication date	Apr 5, 2016
Grant date	Apr 5, 2016

Abstract

A method for growing germanium epitaxial films is disclosed. Initially, a silicon substrate is preconditioned with hydrogen gas. The temperature of the preconditioned silicon substrate is then decreased, and germane gas is flowed over the preconditioned silicon substrate to form an intrinsic germanium seed layer. Next, a mixture of germane and phosphine gases can be flowed over the intrinsic germanium seed layer to produce an n-doped germanium seed layer. Otherwise, a mixture of diborane and germane gases can be flowed over the intrinsic germanium seed layer to produce a p-doped germanium seed layer. At this point, a bulk germanium layer can be grown on top of the doped germanium seed layer.

First claim

What is claimed is:

1. A method for growing germanium epitaxial films, said method comprising:
flowing germane gas over a silicon substrate at a first temperature to form an intrinsic germanium seed layer on said silicon substrate;
increasing said first temperature of said silicon substrate to a second temperature;
flowing a mixture of diborane gas and germane gas over said intrinsic germanium seed layer to produce a doped germanium seed layer; and
growing a bulk germanium film layer on top of said doped germanium layer.

2. The method of claim 1 , wherein said first temperature is approximately 350° C.

3. The method of claim 1 , wherein said flowing germane gas further includes flowing germane gas at approximately 1.5E −3 mBar.

4. The method of claim 1 , wherein said second temperature is approximately 600° C.

5. A method for growing germanium epitaxial films, said method comprising:
flowing germane gas over a silicon substrate at a first temperature to form an intrinsic germanium seed layer on said silicon substrate;
increasing said first temperature of said silicon substrate to a second temperature;
flowing a mixture of dopant gas and germane gas over said intrinsic germanium seed layer to produce a doped germanium seed layer, wherein said dopant gas contains phosphine; and
growing a bulk germanium film layer on top of said doped germanium layer.

6. The method of claim 1 , wherein said mixture of gases is flowed over said intrinsic germanium seed layer at approximately 6E −4 mBar.

7. The method of claim 1 , wherein said bulk germanium film layer is intrinsic germanium film.

8. The method of claim 1 , wherein said bulk germanium film layer is doped germanium film.

9. The method of claim 1 , wherein said flowing a mixture of said gases further includes flowing said mixture of said gases while increasing temperature from said first temperature to said second temperature.

10. A method for growing germanium epitaxial films, said method comprising:
flowing germane gas over a silicon substrate at a first temperature to form an intrinsic germanium seed layer on said silicon substrate;
increasing said first temperature of said silicon substrate to a second temperature;
flowing a mixture of dopant gas and germane gas over said intrinsic germanium seed layer to produce a doped germanium seed layer, wherein said flowing a mixture of said gases further includes flowing a mixture of said gases over said intrinsic germanium seed layer to produce said doped germanium seed layer capable of reducing crystalline defects in said intrinsic germanium seed layer via lattice mismatch reduction; and
growing a bulk germanium film layer on top of said doped germanium layer.

Assignees

• Carothers Daniel N
• Hill Craig M
• Pomerene Andrew T S
• Vu Vu A
• Bae Sys Inf & Elect Sys Integ

Inventors

• Carothers Daniel N
• Hill Craig M
• Pomerene Andrew T S
• Vu Vu A

Classifications

• H10P14/3444

  P-type · CPC title

• H10P14/3248

  consisting of two layers · CPC title

• H10P14/3211

  Silicon, silicon germanium or germanium · CPC title

• H10P14/2905

  Silicon, silicon germanium or germanium · CPC title

• H10P14/274

  using seed materials · CPC title