Information displaying method and computer program product for semiconductor manufacturing apparatus
US-2024231313-A1 · Jul 11, 2024 · US
US9304511B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9304511-B2 |
| Application number | US-201213571780-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 10, 2012 |
| Priority date | Jul 18, 2012 |
| Publication date | Apr 5, 2016 |
| Grant date | Apr 5, 2016 |
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Mechanisms are provided for virtualizing physical sensors and providing sensor data to a requestor using the virtualized physical sensors. The mechanisms obtain sensor data from a plurality of physical sensors and storing the sensor data in a virtual sensor storage system of the data processing system in at least one standardized format. A request from a requestor for a first type of sensor data is received which does not specify a particular physical sensor. A portion of the sensor data stored in the virtual sensor storage system is retrieved in response to receiving the request, the portion of sensor data corresponding to the type of sensor data requested in the request from the requestor. The retrieved portion of the sensor data is returned to the requestor in a format corresponding to a physical sensor configured to provide the requested type of sensor data.
Opening claim text (preview).
What is claimed is: 1. A method, in a data processing system, for virtualizing physical sensors and providing sensor data to a requestor using the virtualized physical sensors, the method comprising: obtaining, in the data processing system, sensor data from a plurality of physical sensors; storing the sensor data in a virtual sensor storage system of the data processing system in at least one standardized format; receiving, in the virtual sensor storage system, a request from a requestor for a first type of sensor data, wherein the request does not specify a particular physical sensor; retrieving, by the virtual sensor storage system, a portion of the sensor data stored in the virtual sensor storage system in response to receiving the request, wherein the portion of sensor data corresponds to the type of sensor data requested in the request from the requestor; and returning, by the virtual sensor storage system, the retrieved portion of the sensor data to the requestor in a format corresponding to a physical sensor configured to provide the requested type of sensor data, wherein: the sensor data is obtained via one or more standardized sensor interfaces that provide a communication pathway between the plurality of physical sensors and the virtual sensor storage system at least by identifying a constraint associated with a subset of the sensor data as specified by a supplier of the subset of the sensor data, the request is received from the requestor via one or more standardized application programming interfaces (APIs), and storing the sensor data in a virtual sensor storage system comprises storing an identification of the constraint in association with the subset of the sensor data in the virtual sensor storage system, wherein the constraint specifies a limitation as to which requestors may be provided the associated subset of the sensor data. 2. The method of claim 1 , wherein the virtual sensor storage system comprises a cloud based storage system comprising a plurality of storage devices coupled to one another via at least one network and represented as a single virtual sensor storage system to the requestor requesting sensor data from the virtual sensor storage system. 3. The method of claim 1 , wherein the plurality of physical sensors comprise a plurality of physical sensors of different types associated with different data processing devices and which sense different types of sensor data. 4. The method of claim 1 , further comprising: comparing sensor data from a subset of physical sensors in the plurality of physical sensors whose sensor data overlaps; and identifying if there is a faulty physical sensor in the subset of physical sensors based on results of the comparison. 5. The method of claim 1 , wherein the one or more sensor interfaces are one or more standardized application programming interfaces (APIs) with which the plurality of physical sensors communicate and which communicate data to the virtual sensor storage system. 6. The method of claim 5 , wherein the one or more standardized APIs comprises at least one first standardized API for communication with a first type of physical sensor in the plurality of physical sensors, and at least one second standardized API for communication with a second type of physical sensor in the plurality of physical sensors, the first type of physical sensor being different than the second type of physical sensor, and the at least one first standardized API being different from the at least one second standardized API. 7. A method, in a data processing system, for virtualizing physical sensors and providing sensor data to a requestor using the virtualized physical sensors, the method comprising: obtaining, in the data processing system, sensor data from a plurality of physical sensors; storing the sensor data in a virtual sensor storage system of the data processing system in at least one standardized format; receiving, in the virtual sensor storage system, a request from a requestor for a first type of sensor data, wherein the request does not specify a particular physical sensor; retrieving, by the virtual sensor storage system, a portion of the sensor data stored in the virtual sensor storage system in response to receiving the request, wherein the portion of sensor data corresponds to the type of sensor data requested in the request from the requestor; and returning, by the virtual sensor storage system, the retrieved portion of the sensor data to the requestor in a format corresponding to a physical sensor configured to provide the requested type of sensor data, wherein retrieving a portion of the sensor data stored in the virtual sensor storage system in response to receiving the request further comprises: determining if there is a constraint associated with the portion of the sensor data, wherein the constraint specifies a limitation on which requestors may be provided the portion of the sensor data; determining if the requestor satisfies a condition of the constraint; and retrieving the portion of the sensor data only in response to the requestor not satisfying a condition of the constraint. 8. A method, in a data processing system, for virtualizing physical sensors and providing sensor data to a requestor using the virtualized physical sensors, the method comprising: obtaining, in the data processing system, sensor data from a plurality of physical sensors; storing the sensor data in a virtual sensor storage system of the data processing system in at least one standardized format; receiving, in the virtual sensor storage system, a request from a requestor for a first type of sensor data, wherein the request does not specify a particular physical sensor; retrieving, by the virtual sensor storage system, a portion of the sensor data stored in the virtual sensor storage system in response to receiving the request, wherein the portion of sensor data corresponds to the type of sensor data requested in the request from the requestor; and returning, by the virtual sensor storage system, the retrieved portion of the sensor data to the requestor in a format corresponding to a physical sensor configured to provide the requested type of sensor data, wherein retrieving a portion of the sensor data stored in the virtual sensor storage system in response to receiving the request comprises: retrieving sensor data obtained from more than one physical sensor in the plurality of physical sensors based on the type of sensor data requested in the request and criteria specified in the request; and combining the sensor data from the more than one physical sensor into a single resultant set of sensor data representing a sensor output of a single virtual sensor, and wherein returning the retrieved portion of the sensor data to the requestor comprises returning the single resultant set of sensor data to the requestor as the sensor output of the single virtual sensor.
Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods · CPC title
Virtual sensor · CPC title
Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00 · CPC title
characterised by monitoring or safety (G05B19/19 takes precedence) · CPC title
Hypervisor-specific management and integration aspects · CPC title
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