Mode-tuning sense interface

Patent metadata

Field	Value
Publication number	US-9304155-B2
Application number	US-201213720984-A
Country	US
Kind code	B2
Filing date	Dec 19, 2012
Priority date	Dec 19, 2012
Publication date	Apr 5, 2016
Grant date	Apr 5, 2016

Abstract

A MEMS capacitive sensing interface includes a sense capacitor having a first terminal and a second terminal, and having associated therewith a first electrostatic force. Further included in the MEMS capacitive sensing interface is a feedback capacitor having a third terminal and a fourth terminal, the feedback capacitor having associated therewith a second electrostatic force. The second and the fourth terminals are coupled to a common mass, and a net electrostatic force includes the first and second electrostatic forces acting on the common mass. Further, a capacitance measurement circuit measures the sense capacitance and couples the first terminal and the third terminal. The capacitance measurement circuit, the sense capacitor, and the feedback capacitor define a feedback loop that substantially eliminates dependence of the net electrostatic force on a position of the common mass.

First claim

What we claim is:

1. A MEMS capacitive sensing interface comprising:
a sense capacitor having a first terminal and a second terminal, the sense capacitor having associated therewith a first electrostatic force;
a feedback capacitor having a third terminal and a fourth terminal, the feedback capacitor having associated therewith a second electrostatic force, the second and the fourth terminals coupled mechanically and electrically to a movable common mass, a net electrostatic force comprising the first and second electrostatic forces acting on the common mass, wherein in response to a change in position of the movable common mass, the sense capacitor being operable to output a signal indicative of the change in position and the feedback capacitor being responsive to the output signal; and
a capacitance measurement circuit operable to measure the sense capacitance and to couple the first terminal and the third terminal, the capacitance measurement circuit, the sense capacitor, and the feedback capacitor defining a feedback loop operable to substantially eliminate dependence of the net electrostatic force on a position of the movable common mass.

2. The MEMS capacitive sensing interface of claim 1 wherein the second and fourth terminals are a common terminal coupled to the movable common mass.

3. The MEMS capacitive sensing interface of claim 1 wherein the movable common mass has a first common mass terminal and a second common mass terminal, the first common mass terminal being coupled to the second terminal and the second common mass terminal being coupled to the fourth terminal.

4. The MEMS capacitive sensing interface of claim 1 wherein the first and second electrostatic forces each have a direction and their directions are the same.

5. The MEMS capacitive sensing interface of claim 1 wherein the first and second electrostatic forces each have a direction and their directions are opposite to each other.

6. The MEMS capacitive sensing interface of claim 1 further including an inverter and wherein the capacitance measurement circuit has an output, the inverter operable to invert the capacitance measurement circuit output, the inverted output coupled to the third terminal.

7. The MEMS capacitive sensing interface of claim 1 further including a high voltage bias applied to the movable common mass.

8. The MEMS capacitive sensing interface of claim 1 wherein the movable common mass is a part of a MEMS device.

9. The MEMS capacitive sensing interface of claim 1 wherein the output signal causes a change in a voltage of the feedback capacitor.

10. The MEMS capacitive sensing interface of claim 1 wherein the output signal is indicative of a change in the sense capacitance.

11. A MEMS capacitive sensing interface comprising:
a sense capacitor having a first terminal and a second terminal, the sense capacitor having associated therewith a first electrostatic force;
a feedback capacitor having a third terminal and a fourth terminal, the feedback capacitor having associated therewith a second electrostatic force, the second and the fourth terminals coupled mechanically and electrically to a movable common mass, a net electrostatic force comprising the first and second electrostatic forces acting on the common mass, wherein in response to a change in position of the movable common mass, the sense capacitor being operable to generate a signal indicative of the change in position and the generated signal causing a reaction by the feedback capacitor in response to the change in position;
a capacitance measurement circuit coupled to the first terminal and operable to measure the sense capacitance, the capacitance measurement circuit, the sense capacitor, and the feedback capacitor defining a feedback loop operable to substantially eliminate dependence of the net electrostatic force on a position of the movable common mass; and
a signal conditioning circuit coupled to the capacitance measurement circuit and the third terminal and operable to provide at least one of an amplitude or phase adjustment of the net electrostatic force.

12. The MEMS capacitive sensing interface of claim 11 , wherein the signal conditioning circuit further comprises a phase reversal circuit operable to select between electrostatic spring stiffening or softening.

13. The MEMS capacitive sensing interface of claim 11 , wherein the signal conditioning circuit further comprises an amplitude adjustment circuit to tune the MEMS device resonance frequency by electrostatic spring softening or stiffening.

14. The MEMS capacitive sensing interface of claim 11 , wherein the signal conditioning circuit further comprises a phase adjustment circuit providing phase advance or delay operable to electrostatically increase or decrease damping in the MEMS device dynamics.

15. The MEMS capacitive sensing interface of claim 11 wherein the second and fourth terminals are a common terminal coupled to the movable common mass.

16. The MEMS capacitive sensing interface of claim 11 wherein the movable common mass has a first common mass terminal and a second common mass terminal, the first common mass terminal being coupled to the second terminal and the second common mass terminal being coupled to the fourth terminal.

17. The MEMS capacitive sensing interface of claim 11 wherein the first and second electrostatic forces each have a direction and their directions are the same.

18. The MEMS capacitive sensing interface of claim 11 wherein the first and second electrostatic forces each have a direction and their directions are opposite to each other.

19. The MEMS capacitive sensing interface of claim 11 further including an inverter and wherein the capacitance measurement circuit has an output, wherein the inverter is operable to invert the capacitance measurement circuit output, the inverted output being coupled to the third terminal.

20. The MEMS capacitive sensing interface of claim 11 further including a high voltage bias applied to the movable common mass.

21. The MEMS capacitive sensing interface of claim 11 wherein the movable common mass is a part of a MEMS device.

22. The MEMS capacitive sensing interface of claim 11 wherein the generated signal causes a change in a voltage of the feedback capacitor.

23. The MEMS capacitive sensing interface of claim 11 wherein the generated signal is indicative of a change in the sense capacitance.

24. A MEMS capacitive sensing interface comprising:
a sense capacitor having a first terminal and a second terminal, the sense capacitor having associated therewith a first electrostatic force during a first operating period, and a second electrostatic force during a second operating period, the second terminal coupled mechanically and electrically to a movable common mass, the first and second electrostatic forces acting on the movable common mass and a net electrostatic force defined by a time average of the first and second electrostatic forces;
a capacitance measurement circuit coupled to the first terminal and operable to measure the sense capacitance during the first operating period and further operable to apply feedback to the first terminal during the second operating period to substantially eliminate dependence of the net electrostatic force on a position of the common mass; and
a feedback capacitor having a third terminal and a fourth terminal, the feedback capacitor being mechanically and electrically coupled to the movable common mass, a net elect

Assignees

• Invensense Inc

Inventors

• Cagdaser Baris
• Shaeffer Derek
• Seeger Joseph

Classifications

• G01C19/5726 Primary

  Signal processing · CPC title

• G01D5/24

  by varying capacitance · CPC title

• G01R27/2605 Primary

  Measuring capacitance (capacitive sensors G01D5/24) · CPC title

• G01C25/00

  Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass (testing, calibrating or compensating compasses G01C17/38) · CPC title