Pressure sensing and flow control in diffusion-bonded planar devices for fluid chromatography

US9304115B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9304115-B2
Application numberUS-201113696965-A
CountryUS
Kind codeB2
Filing dateMay 10, 2011
Priority dateMay 10, 2010
Publication dateApr 5, 2016
Grant dateApr 5, 2016

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Abstract

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Flow through pressure sensors for use in fluid chromatography systems include a planar device formed from diffusion bonding of a plurality of metallic sheets and at least one sensing element. The planar device has a top surface, a bottom surface and a flow through channel. A diaphragm formed from a portion of one of the top or bottom surfaces is located adjacent to a sensing region of the flow through channel and is attached to the sensing element. The diaphragm is sized to deflect a distance in response to fluid pressure in the sensing region, which has an internal volume of less than about 25 microliters. The diaphragm and attached sensing element form a pressure sensor that measures strain or deflection of the diaphragm to calculate a pressure within the sensing region.

First claim

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What is claimed is: 1. A flow through pressure sensor for use in a system for chromatographic separation, the flow through pressure sensor able to withstand pressures of at least about 40 megapascals and comprising: a planar device formed from a plurality of metallic parts attached by diffusion bonding, the planar device having a top surface, a bottom surface, and at least one flow through channel disposed between the top and bottom surfaces; and a sensing element located on a d…

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What does patent US9304115B2 cover?
Flow through pressure sensors for use in fluid chromatography systems include a planar device formed from diffusion bonding of a plurality of metallic sheets and at least one sensing element. The planar device has a top surface, a bottom surface and a flow through channel. A diaphragm formed from a portion of one of the top or bottom surfaces is located adjacent to a sensing region of the flow …
Who is the assignee on this patent?
Bunner Bernard, Gerhardt Geoff C, Dourdeville Theodore A, and 1 more
What technology area does this patent fall under?
Primary CPC classification G01N30/00. Mapped technology areas include Physics.
When was this patent published?
Publication date Tue Apr 05 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).