Gas control system
US-12025319-B2 · Jul 2, 2024 · US
Flow rate control device
US9304030B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9304030-B2 |
| Application number | US-201514741416-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 16, 2015 |
| Priority date | Aug 25, 2009 |
| Publication date | Apr 5, 2016 |
| Grant date | Apr 5, 2016 |
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- Title
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Abstract
Official abstract text for this publication.
A mass flow controller comprises a flow rate measuring part that measures a flow rate of a fluid flowing in a flow channel and outputs a measured flow rate value, a control valve, a valve control part that controls an opening degree of the control valve based on an entirely-close command to entirely close the control valve compulsorily or a set flow rate value set as a target value, and an external output part that outputs an external output flow rate value based on the measured flow rate value to the outside, and at a time when the valve control part receives the entirely close command or zero as the set flow rate value, the external output part outputs zero as the external output flow rate value, irrespective of the measured flow rate value.
First claim
Opening claim text (preview).
The invention claimed is: 1. A flow rate control device comprising a flow rate measuring part that measures a flow rate of a fluid flowing in a flow channel and outputs a measured flow rate value, a control valve, a valve control part that controls an opening degree of the control valve based on an entirely-close command to entirely close the control valve compulsorily or a set flow rate value set as a target value, and an external output part that, in a first mode of operation, ou…
Assignees
Inventors
Classifications
- G05D7/0635Primary
Physics · mapped topic
- G01F25/0007Primary
Physics · mapped topic
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
- G01F25/10Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US9304030B2 cover?
- A mass flow controller comprises a flow rate measuring part that measures a flow rate of a fluid flowing in a flow channel and outputs a measured flow rate value, a control valve, a valve control part that controls an opening degree of the control valve based on an entirely-close command to entirely close the control valve compulsorily or a set flow rate value set as a target value, and an exte…
- Who is the assignee on this patent?
- Horiba Stec Co Ltd, Horiba Stec Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification G05D7/0635. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Apr 05 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).