System for positioning a tool relative to a workpiece

Patent metadata

Field	Value
Publication number	US-9303980-B2
Application number	US-201414508553-A
Country	US
Kind code	B2
Filing date	Oct 7, 2014
Priority date	Oct 7, 2013
Publication date	Apr 5, 2016
Grant date	Apr 5, 2016

Abstract

A system for positioning a tool relative to a workpiece includes a movable table for accommodating a workpiece, and executing movements in two main moving directions during processing of the workpiece, one or more planar measuring standards provided in stationary fashion about the tool and extend in the plane of the main moving directions, and scanning heads, mounted in at least three corners of the table, for detecting the position of the table relative to the measuring standards. The position of the table is determinable by the scanning heads in six degrees of freedom. In at least one of the corners, one or more scanning heads having a total of at least three measuring axes is/are provided for 3-D position detection in three independent spatial directions. Sensitivity vectors of the measuring axes for the 3-D position detection are neither parallel to the X-Z plane nor parallel to the Y-Z plane.

First claim

What is claimed is:

1. A system for positioning a tool relative to a workpiece, comprising:
a movable table adapted to accommodate a workpiece and to execute movements in first and second main moving directions during processing of the workpiece;
at least one planar measuring standard arranged stationary about the tool and extending in a plane of the main moving directions; and
scanning heads, mounted in at least three corners of the table, adapted to detect a position of the table relative to the measuring standards, in six degrees of freedom, in at least one of the corners, at least one scanning head having a total of at least three measuring axes being provided for 3-D position detection in three independent spatial directions;
wherein sensitivity vectors of the measuring axes for the 3-D position detection are arranged neither parallel to a first plane defined by the first main moving direction and a direction orthogonal to the first and second main moving directions nor parallel to a second plane defined by the second main moving direction and the direction orthogonal to the first and second main moving directions.

2. The system according to claim 1 , wherein the sensitivity vectors of the measuring axes for the 3-D position detection form an angle of at least 1° with the first and second planes, respectively.

3. The system according to claim 1 , wherein a first and second sensitivity vector of a first and second measuring axis for the 3-D position detection are arranged in mirror symmetry relative to a third plane defined by the first and second main moving directions.

4. The system according to claim 3 , wherein projections of the first and second sensitivity vectors, in mirror symmetry to the third plane, onto the third plane supply two identical vectors rotated by 45, 135, 225 or 315 degrees relative to the first main moving direction in the third plane.

5. The system according to claim 3 , wherein a third sensitivity vector of a third measuring axis is arranged in the third plane and is linearly independent of the first and second sensitivity vectors.

6. The system according to claim 5 , wherein the third sensitivity vector is perpendicular to the first and second sensitivity vectors.

7. The system according to claim 3 , wherein for 3-D position detection, a third and fourth measuring axis are provided having a third and fourth sensitivity vector, which in each case is obtained by a rotation of the first and second sensitivity vector of 90 degrees about the direction orthogonal to the first and second main moving directions.

8. The system according to claim 7 , wherein the first and second measuring axes are integrated in a first scanning head and the third and fourth measuring axes are integrated in a second scanning head.

9. The system according to claim 1 , wherein all measuring axes for the 3-D position detection are integrated in a single scanning head.

10. The system according to claim 1 , wherein measuring axes for 3-D position detection are present in at least three corners of the table.

Assignees

• Heidenhain Gmbh Dr Johannes

Inventors

• Holzapfel Wolfgang
• Drescher Jörg
• Dodds-Eden Katie
• Musch Bernhard

Classifications

• G01B11/14 Primary

  for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) · CPC title

• B23Q3/18

  for positioning only · CPC title

• G03F7/70775 Primary

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title

• H10P76/202 Primary

  for lift-off processes · CPC title