Conveying robot

Patent metadata

Field	Value
Publication number	US-9302395-B2
Application number	US-201213609254-A
Country	US
Kind code	B2
Filing date	Sep 11, 2012
Priority date	Jan 26, 2012
Publication date	Apr 5, 2016
Grant date	Apr 5, 2016

Abstract

A robot system according to an aspect of the embodiments includes a plurality of work holding units and a heat insulating member. The work holding units each hold a work to be conveyed on one surface and are arranged vertically one over another in some cases during conveying of the work. The heat insulating member is provided on another surface side of at least one of the work holding units.

First claim

What is claimed is:

1. A conveying robot comprising:
a first work holder having a first supporter, a first plate, a first surface, and a second surface opposite to the first surface to hold a first work on the first surface;
a second work holder having a second supporter, a second plate, a third surface, and a fourth surface opposite to the third surface to hold a second work on the third surface, the first work holder and the second work holder being vertically overlapped each other during conveying of the first work and the second work;
a first heat insulator provided on the first supporter, the first heat insulator being rotatable together with the first plate; and
a second heat insulator provided on the second supporter, the second heat insulator being rotatable together with the second plate,
wherein the first supporter and the second supporter individually rotate about a same rotation axis,
wherein the first heat insulator includes a first heat insulating plate spaced a predetermined interval from the second surface,
wherein the second heat insulator includes a second insulating plate spaced a predetermined interval from the fourth surface.

2. The conveying robot according to claim 1 ,
wherein the first heat insulating plate has a shape same as the second surface and is provided to overlap with the first work holder in top view,
and wherein the second heat insulating plate has a shape same as the fourth surface and is provided to overlap with the second work holder in top view.

3. The conveying robot according to claim 2 ,
wherein the first work holder and the second work holder are provided on a tip side of an arm to be rotatable about the same rotation axis,
and wherein the second work holder that conveys the second work at a temperature above a room temperature is provided at a position closer to the arm than to the first work holder that conveys the first work at a room temperature.

4. The conveying robot according to claim 2 , further comprising a first arm and a second arm,
wherein the first work holder and the second work holder are provided on a tip side of the second arm,
wherein the first work holder and the second work holder each convey the first work and the second work on planes parallel to each other,
and wherein the second work holder that conveys the second work at a temperature above a room temperature is in some cases located below the first work holder that conveys the first work at a room temperature.

5. The conveying robot according to claim 1 ,
wherein the first heat insulator includes a first heat insulating resin,
and wherein the second heat insulator includes a second heat insulating resin.

6. The conveying robot according to claim 5 ,
wherein the first work holder and the second work holder are provided on a tip side of an arm to be rotatable about the same rotation axis,
and wherein the second work holder that conveys the second work at a temperature above a room temperature is provided at a position closer to the arm than to the first work holder that conveys the first work at a room temperature.

7. The conveying robot according to claim 5 , further comprising a first arm and a second arm,
wherein the first work holder and the second work holder are provided on a tip side of the second arm,
wherein the first work holder and the second work holder each convey the first work and the second work on planes parallel to each other,
and wherein the second work holder that conveys the second work at a temperature above a room temperature is in some cases located below the first work holder that conveys the first work at a room temperature.

8. The conveying robot according to claim 1 ,
wherein the first work holder and the second work holder are provided on a tip side of an arm to be rotatable about the same rotation axis,
and wherein the second work holder that conveys the second work at a temperature above a room temperature is provided at a position closer to the arm than to the first work holder that conveys the first work at a room temperature.

9. The conveying robot according to claim 1 , further comprising a first arm and a second arm,
wherein the first work holder and the second work holder are provided on a tip side of the second arm,
wherein the first work holder and the second work holder each convey the first work and the second work on planes parallel to each other,
and wherein the second work holder that conveys the second work at a temperature above a room temperature is in some cases located below the first work holder that conveys the first work at a room temperature.

10. The conveying robot according to claim 1 , further comprising a first arm and a second arm,
wherein the second heat insulator is configured to protect the first arm and the second arm from heat when the second plate is disposed above the first arm and the second arm.

11. A conveying robot comprising:
a first work holding means having a first supporter, a first plate, a first surface, and a second surface opposite to the first surface for holding a first work on the first surface;
a second work holding means having a second supporter, a second plate, a third surface, and a fourth surface opposite to the third surface for holding a second work on the third surface, the first work holding means and the second work holding means being vertically overlapped each other during conveying of the first work and the second work;
a first heat insulating means that is provided on the first supporter, the first heat insulating means being rotatable together with the first plate; and
a second heat insulating means that is provided on the second supporter, the second heat insulating means being rotatable together with the second plate,
wherein the first supporter and the second supporter individually rotate about a same rotation axis,
wherein the first heat insulating means includes a first heat insulating plate spaced a predetermined interval from the second surface,
wherein the second heat insulating means includes a second insulating plate spaced a predetermined interval from the fourth surface.

12. The conveying robot according to claim 11 , further comprising a first arm and a second arm,
wherein the second heat insulating means is configured to protect the first arm and the second arm from heat when the second plate is disposed above the first arm and the second arm.

Assignees

• Ando Ryuji
• Hino Kazunori
• Furutani Akihiro
• Yaskawa Denki Seisakusho Kk

Inventors

• Ando Ryuji
• Hino Kazunori
• Furutani Akihiro

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• Y10S901/49

  Protective device · CPC title

• Y10S414/141

  includes means for gripping wafer · CPC title

• B25J9/042

  comprising an articulated arm · CPC title