Manufacturing method and manufacturing equipment of display device
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Systems and methods for processing vapor
US9302291B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9302291-B2 |
| Application number | US-201214232671-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 1, 2012 |
| Priority date | Aug 5, 2011 |
| Publication date | Apr 5, 2016 |
| Grant date | Apr 5, 2016 |
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Abstract
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A system for processing vapor. The system includes a vapor source for producing a vapor and an outlet conduit coupled to the vapor source for carrying the vapor from the vapor source. Downstream of the vapor source the outlet conduit separates into a vapor bypass conduit and a vapor feed conduit. The system further includes a first vapor control valve disposed in the bypass conduit, a second vapor control valve disposed in the feed conduit, a first vacuum chamber connected to the bypass conduit, and a second vacuum chamber connected to the feed conduit.
First claim
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What is claimed is: 1. A vapor processing system comprising: a vapor source for producing a vapor; an outlet conduit connected to the vapor source for carrying the vapor from the vapor source, wherein downstream of the vapor source the outlet conduit separates into a vapor bypass conduit and a vapor feed conduit; a first vapor control valve disposed in the vapor bypass conduit; a first vacuum chamber connected to the vapor bypass conduit, and disposed downstream of the first…
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- What does patent US9302291B2 cover?
- A system for processing vapor. The system includes a vapor source for producing a vapor and an outlet conduit coupled to the vapor source for carrying the vapor from the vapor source. Downstream of the vapor source the outlet conduit separates into a vapor bypass conduit and a vapor feed conduit. The system further includes a first vapor control valve disposed in the bypass conduit, a second va…
- Who is the assignee on this patent?
- Lyons Christopher S, Engle Kent T, Vanhoose Steven R, and 5 more
- What technology area does this patent fall under?
- Primary CPC classification C23C14/12. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 05 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).