Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator
US-9082591-B2 · Jul 14, 2015 · US
Impedance matching device
US9300271B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9300271-B2 |
| Application number | US-201414185268-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 20, 2014 |
| Priority date | Jun 4, 2013 |
| Publication date | Mar 29, 2016 |
| Grant date | Mar 29, 2016 |
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Abstract
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An impedance matching device includes an input port connected to a high-frequency power supply, an output port connected to a load, an impedance variable circuit, a T-parameter memory for storing sets of T-parameters in a manner such that each of the sets of T-parameters is related to a corresponding one of adjustable impedance values of the device, an input voltage detector for detecting a forward wave voltage and a reflected wave voltage at the input port, and a p-p value calculator for computation of a p-p value of a high-frequency voltage at the output port. The computation of the p-p value of the high-frequency voltage is performed by using the forward wave voltage and the reflected wave voltage detected at the input port and also using one set of the T-parameters stored in the T-parameter memory.
First claim
Opening claim text (preview).
The invention claimed is: 1. An impedance matching device configured to be disposed between a high-frequency power supply and a load, the matching device comprising: an input port connected to the high-frequency power supply; an output port connected to the load; an impedance variable circuit having a plurality of impedance values to be selected; a T-parameter memory that stores sets of T-parameters relating to the impedance matching device in a manner such that each of the…
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- H03H7/40Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9300271B2 cover?
- An impedance matching device includes an input port connected to a high-frequency power supply, an output port connected to a load, an impedance variable circuit, a T-parameter memory for storing sets of T-parameters in a manner such that each of the sets of T-parameters is related to a corresponding one of adjustable impedance values of the device, an input voltage detector for detecting a for…
- Who is the assignee on this patent?
- Daihen Corp
- What technology area does this patent fall under?
- Primary CPC classification H03H7/40. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 29 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).