Vibrator element, manufacturing method of vibrator element, sensor unit, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-9299912-B2
Application number	US-201313856620-A
Country	US
Kind code	B2
Filing date	Apr 4, 2013
Priority date	Apr 6, 2012
Publication date	Mar 29, 2016
Grant date	Mar 29, 2016

Abstract

A vibration gyro-element includes a base portion, an excitation vibrating arm and a detection vibrating arm extending from the base portion, and a first adjustment vibrating arm and a second adjustment vibrating arm extending from the base portion and vibrating along with excitation vibration of the excitation vibrating arm, wherein an output signal of the first adjustment vibrating arm at least is out of phase with respect to an output signal of leakage vibration of the detection vibrating arm, and wherein an amplitude of the output signal of the first adjustment vibrating arm is larger than an amplitude of the output signal of the second adjustment vibrating arm.

First claim

What is claimed is:

1. A vibrator element comprising:
a base portion;
an excitation vibrating arm and a detection vibrating arm extending from the base portion; and
a first adjustment vibrating arm and a second adjustment vibrating arm extending from the base portion and vibrating along with excitation vibration of the excitation vibrating arm,
wherein an output signal of the first adjustment vibrating arm at least is in an opposite phase with respect to an output signal of leakage vibration of the detection vibrating arm, and
wherein when a vibration frequency of the first adjustment vibrating arm is indicated by f tu1 , a vibration frequency of the second adjustment vibrating arm is indicated by f tu2 , a vibration frequency of the excitation vibrating arm is indicated by fk, and Δf1=|fk−f tu1 | and Δf2=|fk−f tu2 |, Δf1<Δf2 is satisfied.

2. The vibrator element according to claim 1 , wherein the detection vibrating arm is provided with a detection electrode which electrically detects vibration generated according to a physical quantity applied when the excitation vibrating arm is excited, and
wherein each of the first adjustment vibrating arm and the second adjustment vibrating arm is provided with an adjustment electrode which is electrically connected to the detection electrode.

3. The vibrator element according to claim 1 , wherein the excitation vibrating arm extends from one end of the base portion,
wherein the detection vibrating arm extends from the other end of the base portion on an opposite side to one end,
wherein the first adjustment vibrating arm extends in the extending direction of the excitation vibrating arm, and
wherein the second adjustment vibrating arm extends in the extending direction of the detection vibrating arm.

4. The vibrator element according to claim 1 , wherein a length of the first adjustment vibrating arm is greater than a length of the second adjustment vibrating arm.

5. A sensor unit comprising:
the vibrator element according to claim 1 ;
an electronic component including an excitation circuit which excites the excitation vibrating arm and a detection circuit which detects a detection signal occurring in the detection vibrating arm; and
a package accommodating the vibrator element and the electronic component.

6. An electronic apparatus comprising the vibrator element according to claim 1 .

Assignees

• Seiko Epson Corp

Inventors

• Matsuo Atsushi

Classifications

• H01L41/25

  Electricity · mapped topic

• H01L41/107 Primary

  Electricity · mapped topic

• H01L41/047

  Electricity · mapped topic

• G01C19/5607 Primary

  using vibrating tuning forks (double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719) · CPC title

• Y10T29/42

  Piezoelectric device making · CPC title