Image pickup apparatus and image pickup system

Patent metadata

Field	Value
Publication number	US-9299739-B2
Application number	US-201514735485-A
Country	US
Kind code	B2
Filing date	Jun 10, 2015
Priority date	Jan 18, 2012
Publication date	Mar 29, 2016
Grant date	Mar 29, 2016

Abstract

In a photoelectric conversion apparatus that adds signals of a plurality of photoelectric conversion elements included in photoelectric conversion units, each of the plurality of photoelectric conversion elements includes a first semiconductor region of a first conductivity type that collects signal carriers. The first semiconductor regions included in photoelectric conversion elements that are included in each of the photoelectric conversion units and that are arranged adjacent to each other sandwich a second semiconductor region of a second conductivity type. A height of a potential barrier for the signal carriers generated in a certain region of the second semiconductor region is smaller than a height of a potential barrier for the signal carriers generated in a third semiconductor region between each of the first semiconductor regions and an overflow drain region of the first conductivity type.

First claim

What is claimed is:

1. A photoelectric conversion apparatus comprising:
a plurality of photoelectric conversion units, each including a plurality of photoelectric conversion elements on which light condensed by a single microlens is incident,
wherein each of the plurality of photoelectric conversion elements includes a first semiconductor region of a first conductivity type that collects signal carriers,
wherein the first semiconductor regions included in photoelectric conversion elements that are included in each of the photoelectric conversion units and that are arranged adjacent to each other sandwich a second semiconductor region of a second conductivity type, and
wherein an impurity concentration of the second semiconductor region is lower than an impurity concentration of a region between each of the first semiconductor regions and an overflow drain region of the first conductivity type.

2. The photoelectric conversion apparatus according to claim 1 ,
wherein the region between each of the first semiconductor regions and the overflow drain region of the first conductivity type is a third semiconductor region of the second conductivity type.

3. The photoelectric conversion apparatus according to claim 2 ,
wherein an impurity concentration of the third semiconductor region is at least three times higher than an impurity concentration of a certain region or portion of the second semiconductor region.

4. The photoelectric conversion apparatus according to claim 3 ,
wherein the impurity concentration of the third semiconductor region is at least ten times higher than the impurity concentration of the certain region or portion of the second semiconductor region.

5. The photoelectric conversion apparatus according to claim 1 ,
wherein each of the photoelectric conversion units includes a plurality of photoelectric conversion elements on which light collected by a single microlens is incident.

6. The photoelectric conversion apparatus according to claim 1 ,
wherein the overflow drain region is a semiconductor region of the first conductivity type arranged in a vertical direction of the first semiconductor region.

7. The photoelectric conversion apparatus according to claim 6 ,
wherein the semiconductor region of the first conductivity type is a semiconductor substrate of the first conductivity type.

8. The photoelectric conversion apparatus according to claim 1 ,
wherein the overflow drain region is a semiconductor region of the first conductivity type arranged in a lateral direction of the first semiconductor region.

9. The photoelectric conversion apparatus according to claim 8 ,
wherein the semiconductor region of the first conductivity type is a source region or a drain region of a transistor of the first conductivity type included in each of the photoelectric conversion units.

10. The photoelectric conversion apparatus according to claim 1 ,
wherein the second semiconductor region includes a first part and a second part, and an impurity concentration of the first part is lower than an impurity concentration of the second part or a width of the first part when viewed in plan is smaller than a width of the second part when viewed in plan.

11. The photoelectric conversion apparatus according to claim 10 ,
wherein the first part is arranged at a depth different from a depth at which the second part is arranged.

12. The photoelectric conversion apparatus according to claim 10 ,
wherein a depth of an impurity concentration peak of the first part is different from a depth of an impurity concentration peak of the first semiconductor region.

13. The photoelectric conversion apparatus according to claim 1 ,
wherein a fourth semiconductor region of the second conductivity type is provided between the first semiconductor regions included in adjacent photoelectric conversion elements included in different photoelectric conversion units arranged adjacent to each other, and a height of a potential barrier generated at least in a certain region of the second semiconductor region is smaller than a height of a potential barrier generated in the fourth semiconductor region.

14. The photoelectric conversion apparatus according to claim 13 ,
wherein the height of the potential barrier generated in the fourth semiconductor region is larger than a height of a potential barrier generated in the third semiconductor region.

15. An image pickup system comprising:
the photoelectric conversion apparatus according to claim 1 ,
wherein capture of an image is performed using signals obtained by adding signals of the plurality of photoelectric conversion elements included in the plurality of photoelectric conversion units, and
wherein focus detection during the capture of the image is performed using at least one of the signals of the plurality of photoelectric conversion elements included in the plurality of photoelectric conversion units.

16. The image pickup system according to claim 15 ,
wherein the focus detection is stopped when an amount of charge that is accumulated by one or more photoelectric conversion elements in the plurality of photoelectric conversion units has been exceeded.

17. A photoelectric conversion apparatus comprising:
a plurality of photoelectric conversion units, each including a plurality of photoelectric conversion elements on which light condensed by a single microlens is incident,
wherein each of the plurality of photoelectric conversion elements includes a first semiconductor region of a first conductivity type that collects signal carriers,
wherein the first semiconductor regions included in photoelectric conversion elements that are included in each of the photoelectric conversion units and that are arranged adjacent to each other sandwich a second semiconductor region of a second conductivity type, and
wherein an impurity concentration of the second semiconductor region is lower than an impurity concentration of a region between each of the first semiconductor regions and a semiconductor substrate of the first conductivity type.

18. A photoelectric conversion apparatus comprising:
a plurality of photoelectric conversion units, each including a plurality of photoelectric conversion elements on which light condensed by a single microlens is incident, and
a floating diffusion region of a first conductivity type that receives charge from the first semiconductor region,
wherein each of the plurality of photoelectric conversion elements includes a first semiconductor region of a first conductivity type that collects signal carriers,
wherein the first semiconductor regions included in photoelectric conversion elements that are included in each of the photoelectric conversion units and that are arranged adjacent to each other sandwich a second semiconductor region of a second conductivity type, and
wherein an impurity concentration of the second semiconductor region is lower than an impurity concentration of a region between each of the first semiconductor regions and the floating diffusion region.

Assignees

• Canon Kk

Inventors

• Kobayashi Masahiro
• Kishi Takafumi
• Yamashita Yuichiro

Classifications

• H04N25/57

  Control of the dynamic range · CPC title

• H04N25/70

  SSIS architectures; Circuits associated therewith · CPC title

• H04N25/59

  by controlling the amount of charge storable in the pixel, e.g. modification of the charge conversion ratio of the floating node capacitance · CPC title

• H10D1/68

  Capacitors having no potential barriers · CPC title

• H10F39/8063

  Microlenses · CPC title