Sputter neutral particle mass spectrometry apparatus

Patent metadata

Field	Value
Publication number	US-9299552-B2
Application number	US-201514640766-A
Country	US
Kind code	B2
Filing date	Mar 6, 2015
Priority date	Mar 18, 2014
Publication date	Mar 29, 2016
Grant date	Mar 29, 2016

Abstract

A sputter neutral particle mass spectrometry apparatus includes a sample table holding a sample which is a mass spectrometry target, and comprising a temperature control mechanism for the sample, an ion beam irradiation device which irradiates an ion beam on the sample to generate neutral particles, a laser irradiation device which irradiates the neutral particles with a laser to obtain photoexcited ions, a mass spectrometer which draws in the drawn out photoexcited ions and performs mass analysis, a driving system mirror which is provided retractably on a laser light path between the laser irradiation device and the sample table, and reflects the laser when positioned within the laser light path, and, a profiler which is arranged in a reflective direction of the driving system mirror and detects a feature of the laser.

First claim

What is claimed is:

1. A sputter neutral particle mass spectrometry apparatus comprising:
a sample table holding a sample which is a mass spectrometry target, and comprising a temperature control mechanism for the sample;
an ion beam irradiation device which irradiates an ion beam on the sample held by the sample table to generate neutral particles;
a laser irradiation device which irradiates the neutral particles with a laser to obtain photoexcited ions;
a draw-out electrod…

Assignees

• Toshiba Kk

Inventors

• Yorisaki Toma

Classifications

• H01J49/162

  Electricity · mapped topic

• H01J49/0468

  Electricity · mapped topic

• H01J49/06

  Electricity · mapped topic

• H01J49/0486

  Electricity · mapped topic

• H01J49/161 Primary

  Electricity · mapped topic