System and method for monitoring an accelerometer

Patent metadata

Field	Value
Publication number	US-9297826-B2
Application number	US-201313791343-A
Country	US
Kind code	B2
Filing date	Mar 8, 2013
Priority date	Mar 8, 2013
Publication date	Mar 29, 2016
Grant date	Mar 29, 2016

Abstract

Systems and methods are provided for monitoring operation of MEMS accelerometers ( 100 ). In these embodiments a control loop ( 112 ) having a forward path ( 114 ) is coupled a MEMS transducer ( 110 ), and a test signal generator ( 124 ) and test signal detector ( 126 ) is provided. The test signal generator ( 124 ) is configured to generate a test signal and apply the test signal to the forward path ( 114 ) of the control loop ( 112 ) during operation of the MEMS accelerometer transducer ( 110 ). The test signal detector ( 126 ) is configured to receive an output signal from the control loop and detect the effects of the test signal in the output signal. Finally, the test signal detector ( 126 ) is further configured to generate a monitor output indicative of the operation of the sensing device to provide for the continuous monitoring of the operation of the MEMS accelerometer ( 100 ).

First claim

What is claimed is:

1. A system for monitoring operation of a sensing device, where the sensing device includes microelectromechanical (MEMS) accelerometer transducer and a control loop having a forward path coupled to the MEMS accelerometer transducer, the system comprising:
a test signal generator, the test signal generator configured to generate a test signal and apply the test signal to the forward path of the control loop during operation of the MEMS accelerometer transducer; and
a test signal detector, the test signal detector configured to receive an output signal from the control loop and detect effects of the test signal in the output signal, the test signal detector further configured to generate a monitor output indicative of the operation of the sensing device based at least in part on the detected effects of the test signal in the output signal, and wherein the test signal detector is configured to detect effects of the test signal in the output signal by demodulating the output signal using a demodulation signal received from the test signal generator.

2. The system of claim 1 wherein the test signal generator is coupled to the test signal detector to provide the demodulation signal to the test signal detector, where the demodulation signal has a frequency content equal to the test signal.

3. The system of claim 1 wherein the test signal generator uses modulation techniques to generate the test signal.

4. The system of claim 1 wherein the test signal generator includes a first clock having an output, a first divider having an output and a second divider having an output, the output of the first clock coupled to the first divider and the second divider, and wherein the test signal generator generates the test signal by XORing the output of the first divider with the output of the second divider.

5. The system of claim 4 wherein the first divider divides by a first prime number, and wherein the second divider divides by a second prime number different than the first prime number.

6. The system of claim 4 wherein the test signal generator further includes a second clock having an output, a third divider having an output and a fourth divider having an output, the output of the second clock coupled to the third divider and the fourth divider, and wherein the test signal generator generates a demodulation signal by XORing the output of the third divider with the output of the fourth divider, and wherein the demodulation signal is provided to the test signal detector.

7. The system of claim 1 wherein the test signal detector includes a comparator and an accumulator, and wherein the test signal detector compares the demodulated output signal to a threshold value using the comparator, and wherein the test signal detector accumulates an output of the comparator using the accumulator, and wherein the monitor output is generated based at least in part of the accumulated output of the comparator.

8. The system of claim 1 wherein the test signal detector is further configured to determine a measure of an amplitude of the detected effects of the test signal.

9. A sensing device, comprising:
a microelectromechanical (MEMS) accelerometer transducer;
a control loop coupled to the MEMS accelerometer transducer, the control loop having a forward path generating an output of the sensing device and a feedback path feeding back the output of the sensing device to the MEMS accelerometer transducer;
a test signal generator, the test signal generator configured to generate a test signal and a demodulation signal, where the test signal and the demodulation signal have identical frequency content, and wherein the test signal generator is configured to apply the test signal to the forward path of the control loop during operation of the sensing device; and
a test signal detector, the test signal detector configured to receive the output of the sensing device from the control loop and demodulate the output of the sensing device using the demodulation signal to detect effects of the test signal in the output of the sensing device, the test signal detector further configured to generate a monitor output indicative of the operation of the sensing device based at least in part on the detected effects of the test signal in the output of the sensing device.

10. The sensing device of claim 9 wherein the test signal generator includes a first clock having an output, a first divider having an output and a second divider having an output, the output of the first clock coupled to the first divider and the second divider, and wherein the test signal generator is configured to generate the test signal by XORing the output of the first divider with the output of the second divider, where the first divider is configured to divide by a first prime number and the second divider is configured to divide by a second prime number different than the first prime number.

11. The sensing device of claim 9 wherein the output of the sensing device is a quantized output, and wherein the test signal detector includes a comparator and an accumulator, and wherein the test signal detector compares the demodulated output of the sensing device to a first threshold value using the comparator, and wherein the test signal detector accumulates an output of the comparator using the accumulator, and wherein the monitor output is generated when the accumulated output passes a second threshold value.

12. A method of monitoring operation of a sensing device, where the sensing device includes microelectromechanical (MEMS) accelerometer transducer and a control loop having a forward path coupled to the MEMS accelerometer transducer, the method comprising:
generating a test signal;
applying the test signal to the forward path of the control loop during operation of the MEMS accelerometer transducer;
receiving an output signal from the control loop;
detecting effects of the test signal in the output signal, wherein the detecting effects of the test signal in the output signal comprises demodulating the output signal using a demodulation signal; and
generating a monitor output indicative of the operation of the sensing device based at least in part on the detected effects of the test signal.

13. The method of claim 12 wherein the generating the test signal comprises generating a modulated signal.

14. The method of claim 12 wherein the generating the test signal comprises dividing a first clock with a first divider to generate a first divider output, dividing the first clock with a second divider to generate a second divider output, and XORing the first divider output with the second divider output to generate the test signal.

15. The method of claim 14 wherein the dividing the first clock with the first divider comprises dividing by a first prime number, and wherein dividing the first clock with the second divider comprises dividing by second prime number different than the first prime number.

16. The method of claim 14 further comprising generating the demodulation signal by dividing a second clock with a third divider to generate a third divider output, dividing the second clock with a fourth divider to generate a fourth divider output, and XORing the third divider output with the fourth divider output.

17. The method of claim 12 wherein the generating the monitor output indicative of the operation of the sensing device based at least in part on the detected effects of the test signal comprises comparing the demodulated output signal to a threshold value and accumulating an output of the comparison.

18. The me

Assignees

• Freescale Semiconductor Inc
• Freescale Semiconductor Inc

Inventors

• Fang Deyou
• Kraver Keith L
• Loreck Heinz
• Margules Mike A
• Schlarmann Mark E

Classifications

• G01P21/00 Primary

  Testing or calibrating of apparatus or devices covered by the preceding groups · CPC title

• G01P15/125

  by capacitive pick-up · CPC title