Classification of surface features using fluorescence

Patent metadata

Field	Value
Publication number	US-9297759-B2
Application number	US-201314032187-A
Country	US
Kind code	B2
Filing date	Sep 19, 2013
Priority date	Oct 5, 2012
Publication date	Mar 29, 2016
Grant date	Mar 29, 2016

Abstract

Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article, a photon detector array configured to receive photons from surface features of the article; and a processing means configured for processing photon-detector-array signals corresponding to photons scattered from the surface features and photons fluoresced from the surface features, wherein the processing means is further configured for classifying the surface features of the article.

First claim

What is claimed is:

1. An apparatus, comprising:
a photon emitter configured to emit photons onto a surface of an article in a photon pulse;
a photon detector array coupled to a telecentric lens, configured to receive both scattered photons and fluoresced photons from surface features of the article, wherein the telecentric lens is a double telecentric lens; and
a processing means configured for
processing photon-detector-array signals corresponding to the scattered photons and the fluoresced photons received by the photon detector array during the photon pulse and subsequent to the photon pulse, respectively, and
classifying the surface features from the photon-detector-array signals corresponding to the scattered photons and the fluoresced photons.

2. The apparatus of claim 1 ,
wherein classifying the surface features comprises classifying the surface features as inorganic or organic by contrasting the photon-detector-array signals corresponding to the scattered photons and the fluoresced photons.

3. The apparatus of claim 1 ,
wherein the processing means is further configured for producing
a first map of the surface features from the scattered photons, and
a second map of the surface features from the fluoresced photons.

4. The apparatus of claim 3 ,
wherein the first map provides positional information for the surface features, and
wherein the second map provides classifying information for the surface features by contrast with the first map.

5. The apparatus of claim 1 ,
wherein the processing means comprises one or more computers or equivalent devices operable to classify the surface features from the photon-detector-array signals.

6. An apparatus, comprising:
a photon emitter configured for emitting photons onto a surface of an article;
a photon detector array coupled to a telecentric lens, configured for receiving both scattered photons and fluoresced photons from surface features of the article, wherein
the photon emitter and the photon detector array are synchronized with respect to emitting photons and receiving photons, and
the photon emitter is a flash lamp configured to minimize vibrations while the photon detector array receives the scattered photons; and

a processing means configured for
processing photon-detector-array signals corresponding to the scattered photons and the fluoresced photons received by the photon detector array during one or more pulses of photons and in-between the one or more pulses of photons, respectively, and
classifying the surface features from the photon-detector-array signals corresponding to the scattered photons and the fluoresced photons.

7. The apparatus of claim 6 ,
wherein classifying the surface features comprises classifying the surface features as inorganic or organic by contrasting the photon-detector-array signals corresponding to the scattered photons and the fluoresced photons.

8. The apparatus of claim 6 ,
wherein the processing means is further configured for producing one or more image maps of the surface features from the scattered photons during the one or more pulses of photons.

9. The apparatus of claim 8 ,
wherein the processing means is further configured for producing one or more image maps of the surface features from the fluoresced photons in-between the one or more pulses of photons.

10. The apparatus of claim 6 ,
wherein the processing means comprises one or more computers or equivalent devices operable to classify the surface features by contrasting one or more image maps of the surface features derived from the scattered photons with one or more image maps of the surface features derived from the fluoresced photons.

11. An apparatus, comprising:
a photon detector array coupled to a telecentric lens, configured to receive both scattered photons and fluoresced photons from surface features of an article, wherein the telecentric lens is a double telecentric lens; and
a processing means configured for
processing photon-detector-array signals corresponding to the scattered photons and the fluoresced photons received by the photon detector array during one or more pulses of photons and in-between the one or more pulses of photons, respectively, and
classifying the surface features from the photon-detector-array signals corresponding to the scattered photons and the fluoresced photons.

12. The apparatus of claim 11 ,
wherein classifying the surface features comprises classifying the surface features as inorganic or organic by contrasting the photon-detector-array signals corresponding to the scattered photons and the fluoresced photons.

13. The apparatus of claim 11 ,
wherein the processing means is further configured for
producing a first image map of the surface features from the scattered photons and a second image map of the surface features from the fluoresced photons, and
classifying the surface features as inorganic or organic by contrasting the first image map and the second image map.

14. The apparatus of claim 11 ,
wherein the processing means comprises one or more computers or equivalent devices operable to classify the surface features from the photon-detector-array signals.

15. The apparatus of claim 1 ,
wherein the photon detector array is a sCMOS-based photon detector array configured for imaging.

16. The apparatus of claim 1 ,
wherein the apparatus is configured to hold the article in a stationary position without rotation while the photon detector array receives the scattered photons and the fluoresced photons.

17. The apparatus of claim 16 ,
wherein the photon emitter is a flash lamp configured to minimize vibrations while the photon detector array receives the scattered photons.

18. The apparatus of claim 17 , further comprising:
an additional photon emitter for fluorescence decay analysis of organic surface features, wherein the additional photon emitter is a laser.

19. The apparatus of claim 7 ,
wherein the processing means is further configured for determining sizes of the surface features by analyzing scattering intensity distributions associated with the first map.

Assignees

• Seagate Technology Llc

Inventors

• Ahner Joachim Walter
• Tung David M
• Wong Samuel Kah Hean
• Lott Henry Luis
• Mclaurin Stephen Keith
• Nassirou Maissarath
• Zavaliche Florin

Classifications

• G01N21/94

  Investigating contamination, e.g. dust (G01N21/85 takes precedence) · CPC title

• G01N21/64

  Fluorescence; Phosphorescence · CPC title

• G01N21/63 Primary

  optically excited · CPC title

• G01N21/9501

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• G01N21/95

  characterised by the material or shape of the object to be examined (G01N21/89 - G01N21/91, G01N21/94 take precedence) · CPC title