Semiconductor device having an oxide semiconductor layer

Patent metadata

Field	Value
Publication number	US-9293598-B2
Application number	US-201314141831-A
Country	US
Kind code	B2
Filing date	Dec 27, 2013
Priority date	Dec 28, 2012
Publication date	Mar 22, 2016
Grant date	Mar 22, 2016

Abstract

The reliability of a semiconductor device is increased by suppression of a variation in electric characteristics of a transistor as much as possible. As a cause of a variation in electric characteristics of a transistor including an oxide semiconductor, the concentration of hydrogen in the oxide semiconductor, the density of oxygen vacancies in the oxide semiconductor, or the like can be given. A source electrode and a drain electrode are formed using a conductive material which is easily bonded to oxygen. A channel formation region is formed using an oxide layer formed by a sputtering method or the like under an atmosphere containing oxygen. Thus, the concentration of hydrogen in a stack, in particular, the concentration of hydrogen in a channel formation region can be reduced.

First claim

What is claimed is:

1. A semiconductor device comprising:
an oxide semiconductor layer including a channel formation region;
a first source electrode and a first drain electrode over and in contact with the oxide semiconductor layer;
a second source electrode over and in contact with the first source electrode and the oxide semiconductor layer;
a second drain electrode over and in contact with the first drain electrode and the oxide semiconductor layer;
a first insulating layer over the second source electrode, the second drain electrode and the oxide semiconductor layer;
a gate electrode over the first insulating layer; and
a second insulating layer over the gate electrode
wherein the gate electrode comprises a first layer and a second layer over the first layer,
wherein the first layer of the gate electrode is able to reduce a concentration of hydrogen in the channel formation region,
wherein the second source electrode and the second drain electrode each comprise a material layer which is able to reduce the concentration of hydrogen in the channel formation region, and
wherein a length of the channel formation region is shorter than a distance between the first source electrode and the first drain electrode.

2. The semiconductor device according to claim 1 , wherein the first layer of the gate electrode includes at least one selected from an alloy of titanium and indium, an alloy of titanium and gallium, an alloy of titanium and zinc, an alloy of titanium and cobalt, an alloy of titanium and manganese, and an alloy of titanium and iron.

3. The semiconductor device according to claim 1 , wherein the material layer includes at least one selected from an alloy of titanium and indium, an alloy of titanium and gallium, an alloy of titanium and zinc, an alloy of titanium and cobalt, an alloy of titanium and manganese, and an alloy of titanium and iron.

4. The semiconductor device according to claim 1 ,
wherein the first source electrode and the first drain electrode each include at least one selected from tungsten, titanium, aluminum, copper, molybdenum, chromium, and tantalum, and
wherein the material layer includes at least one selected from an alloy of titanium and cobalt, an alloy of titanium and manganese, and an alloy of titanium and iron.

5. The semiconductor device according to claim 1 , wherein the first insulating layer and the second insulating layer each comprise aluminum oxide.

6. The semiconductor device according to claim 1 ,
wherein the concentration of hydrogen in the channel formation region is lower than 5×10 17 atoms/cm 3 , and
wherein part of the oxide semiconductor layer which is in contact with the first source electrode or the first drain electrode has a higher concentration of hydrogen than the channel formation region.

7. The semiconductor device according to claim 1 , wherein a part of the oxide semiconductor layer which is in contact with the first source electrode or the first drain electrode includes more oxygen vacancies than the channel formation region.

Assignees

• Semiconductor Energy Lab

Inventors

• Yamazaki Shunpei
• Suzawa Hideomi
• Fujiki Hiroshi
• Godo Hiromichi
• Yamane Yasumasa

Classifications

• H10D86/423

  comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO · CPC title

• H10D86/60

  wherein the TFTs are in active matrices · CPC title

• H10D64/62

  Electrodes ohmically coupled to a semiconductor · CPC title

• H10D62/80

  characterised by the materials · CPC title

• H10D30/6755

  Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate · CPC title