Thin film transistor display panel and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-9293484-B2
Application number	US-201514682627-A
Country	US
Kind code	B2
Filing date	Apr 9, 2015
Priority date	Nov 13, 2012
Publication date	Mar 22, 2016
Grant date	Mar 22, 2016

Abstract

A thin film transistor display panel includes a gate electrode on a substrate; a gate insulating layer on the substrate and the gate electrode; a planarization layer on the gate insulating layer and at opposing sides of the gate electrode, where the planarization layer exposes the gate insulating layer; a semiconductor layer on the gate insulating layer; and a source electrode and a drain electrode on the semiconductor layer and spaced apart from each other.

First claim

What is claimed is:

1. A method of manufacturing a thin film transistor display panel, the method comprising:
providing a gate electrode on a substrate;
providing a gate insulating layer on the substrate and the gate electrode;
providing a semiconductor layer on the gate insulating layer and overlapping the gate electrode;
providing a planarization layer on the gate insulating layer and at opposing sides of the gate electrode, after providing the semiconductor layer on the gate insulating layer and overlapping the gate electrode,
wherein providing the planarization layer at the opposing sides of the gate electrode after providing the semiconductor layer on the gate insulating layer and overlapping the gate electrode, exposes an upper surface of the gate insulating layer on the gate electrode; and
providing a source electrode and a drain electrode on the semiconductor layer and spaced apart from each other, after the providing a planarization layer.

2. The method of claim 1 , wherein:
the gate insulating layer is formed on a whole surface of the substrate having the gate electrode thereon, and
a portion of the gate insulating layer is formed directly on the substrate.

3. The method of claim 2 , wherein:
in the providing a gate electrode,
a metal layer comprising copper is formed on the substrate, and
the metal layer is patterned to form the gate electrode.

4. The method of claim 3 , wherein:
the gate insulating layer comprises silicon oxide.

5. The method of claim 1 , wherein:
a thickness of the gate electrode is equal to or greater than about 0.7 micrometer.

6. The method of claim 1 , wherein:
a difference between a height of the gate electrode and a height of the planarization layer taken from an upper surface of the substrate, is equal to or less than about 0.5 micrometer.

7. The method of claim 6 , wherein:
a thickness of the gate electrode is equal to or greater than about 0.7 micrometer.

8. The method of claim 1 , wherein:
a side surface of the gate electrode forms an angle equal to or greater than about 60° with respect to an upper surface of the substrate.

9. The method of claim 1 , further comprising:
providing an ohmic contact layer on the semiconductor layer;
providing a passivation film on the semiconductor layer, the source electrode and the drain electrode;
providing an organic film on the passivation film;
defining a contact hole in the passivation film and the organic film, to expose the drain electrode; and
providing a pixel electrode, which is connected to the drain electrode through the contact hole, on the organic film,
wherein in the providing a source electrode and a drain electrode, the ohmic contact layer between the source electrode and the drain electrode is removed.

10. The method of claim 1 , wherein:
in the providing a source electrode and a drain electrode,
a first portion of the source electrode and a first portion of the drain electrode are formed directly on the gate insulating layer, and
second portions of the source electrode and the drain electrode are formed directly on the planarization layer.

Assignees

• Samsung Display Co Ltd

Inventors

• Youn Joo Ae
• Kang Hoon
• Kim Sung Hoon
• Yoo Hye Won

Classifications

• H10D30/6725 Primary

  having supplementary regions or layers for improving the flatness of the device · CPC title

• H10D86/021 Primary

  of multiple TFTs · CPC title

• H10D30/031 Primary

  of thin-film transistors [TFT] · CPC title

• H10D99/00

  Subject matter not provided for in other groups of this subclass · CPC title

• H10D64/665

  the conductor comprising a layer of elemental metal contacting the insulator, e.g. tungsten or molybdenum (having lateral variation H10D64/671) · CPC title