Different scaling ratio in FEOL / MOL/ BEOL

Patent metadata

Field	Value
Publication number	US-9292649-B2
Application number	US-201314082487-A
Country	US
Kind code	B2
Filing date	Nov 18, 2013
Priority date	Nov 18, 2013
Publication date	Mar 22, 2016
Grant date	Mar 22, 2016

Abstract

The present disclosure relates to a method of generating a scaled integrated chip design by scaling a FEOL and a BEOL of an original IC design at different scaling ratios, and an associated apparatus. In some embodiments, the method is performed by forming an original integrated chip (IC) design that is a graphical representation of an integrated chip. The original IC design has a front-end-of-the-line (FEOL) section, a back-end-of-the-line (BEOL) section, and a middle-of-the-line (MOL) section that is disposed between the FEOL and BEOL sections. A scaled integrated chip design is formed by scaling (i.e., shrinking) the FEOL section and the BEOL section of the original integrated chip design at different scaling ratios, and by scaling different design layers within the MOL section at different scaling ratios to avoid misalignment errors between the FEOL section and the BEOL section.

First claim

What is claimed is:

1. A method for generating a scaled integrated chip design, comprising:
forming an original integrated chip (IC) design,. comprising a graphical representation of a layout corresponding to an integrated chip to be formed on a semiconductor substrate, having a front-end-of- the-line (FEOL) section comprising gate regions and active regions, a back-end-of-the- line (BEOL) section comprising a metal via design layer, and a middle-of-the-line (MOL) section comprising a first MOL design layer configured to connect the gate regions to the metal via design layer and a second MOL design layer configured to connect the active regions to the metal via design layer;
scaling the first MOL design layer at a first scaling ratio to achieve a scaled first MOL design layer within a scaled IC design having a first pitch that matches a pitch of scaled gate regions within the scaled IC design; and
scaling the second MOL design layer at a second scaling ratio to achieve a scaled second MOL design layer within the scaled IC design having a second pitch that is different than the pitch of the scaled gate regions.

2. The method of claim 1 ,
wherein a difference between the first scaling ratio and the second scaling ratio avoids misalignment errors between the FEOL section and the BEOL section.

3. The method of claim 1 , wherein the BEOL section comprises:
a metal wire design layer disposed above the metal via design layer.

4. The method of claim 3 ,
wherein the FEOL section comprises poly-silicon design layer disposed over the semiconductor substrate; and
wherein the first MOL design layer is configured to connect the poly-silicon design layer to the metal via design layer.

5. The method of claim 4 ,
wherein the BEOL section is scaled at a BEOL scaling ratio that is greater than a FEOL scaling ratio at which the FEOL section is scaled;
wherein the first scaling ratio is equal to the FEOL scaling ratio; and
wherein the second scaling ratio is greater than the FEOL scaling ratio.

6. The method of claim 5 , wherein the FEOL scaling ratio is in a range of between approximately 70% and approximately 80% of the original IC design.

7. The method of claim 6 , wherein the FEOL scaling ratio is equal to a pitch of the poly-silicon design layer in the original IC design divided by a scaled pitch of the poly-silicon design layer in the scaled IC design.

8. The method of claim 1 , further comprising:
generating the integrated chip on the semiconductor substrate based upon the scaled integrated chip design.

9. The method of claim 1 , wherein the first MOL design layer corresponds to a first conductive contact having a smaller height than a second conductive contact corresponding to the second MOL design layer.

10. The method of claim 9 , wherein the first conductive contact is laterally separated from the second conductive contact.

11. A method for generating a scaled integrated chip design, comprising:
forming an original integrated chip (IC) design, comprising a graphical representation of a layout corresponding to an integrated chip to be formed on a semiconductor substrate, having a front-end-of-the-line (FEOL) section, a middle-of-the-line (MOL) section, and a back-end-of-the-line (BEOL) section;
scaling the FEOL section at a FEOL scaling ratio;
scaling a first design layer within the MOL section at a first MOL scaling ratio to achieve a scaled first MOL design layer having a first pitch that matches a pitch of a gate design layer within the FEOL section;
scaling a second design layer within the MOL section at a second MOL scaling ratio; and
scaling the BEOL section at a BEOL scaling ratio that is different than the FEOL scaling ratio.

12. The method of claim 11 , wherein the BEOL section comprises:
a first metal via design layer; and
a first metal wire design layer disposed above the first metal via design layer.

13. The method of claim 12 ,
wherein the FEOL section comprises poly-silicon design layer disposed over the semiconductor substrate;
wherein the first design layer is configured to connect the poly-silicon design layer to the first metal via design layer; and
wherein the second design layer is configured to connect active regions within the semiconductor substrate to the first via design layer.

14. The method of claim 11 ,
wherein the BEOL scaling ratio is greater than the FEOL scaling;
wherein the first MOL scaling ratio is equal to the FEOL scaling ratio; and
wherein the second MOL scaling ratio is greater than the FEOL scaling ratio.

15. The method of claim 11 , wherein the FEOL scaling ratio is in a range of between approximately 70% and approximately 80%.

16. An EDA (Electronic design automation) tool, comprising:
a memory element configured to store an original integrated chip (IC) design, comprising a graphical representation of a layout corresponding to an integrated chip to be formed on a semiconductor substrate, having a front-end-of-the-line (FEOL) section, a back-end-of-the-line (BEOL) section, and a middle-of-the-line (MOL) section disposed between the FEOL section and the BEOL section; and
a scaling element configured to form a scaled integrated chip (IC) design by scaling the FEOL section at a FEOL scaling ratio, scaling a first MOL design layer within the MOL section at a first MOL scaling ratio to achieve a scaled first MOL design layer having a first pitch that matches a pitch of a gate design layer within the FEOL section, scaling a second MOL design layer within the MOL section at a second MOL scaling ratio, and scaling the BEOL section at a BEOL scaling ratio that is different than the FEOL scaling ratio.

17. The EDA tool of claim 16 ,
wherein the BEOL section comprises a first metal via design layer, and a first metal wire design layer disposed above the first metal via design layer;
wherein the FEOL section comprises a poly-silicon design layer disposed over the semiconductor substrate; and
wherein the MOL section comprises a first MOL design layer disposed at a position that is configured to connect the poly-silicon design layer to the first metal via design layer and a second MOL design layer disposed at a position that is configured to connect the semiconductor substrate to the first metal via design layer.

18. The EDA tool of claim 17 ,
wherein the scaling element is configured to scale the first MOL design layer within the original IC design at the first MOL scaling ratio to achieve the scaled first MOL design layer within the scaled IC design, wherein the scaled first MOL design layer has the first pitch that matches a pitch of a scaled poly-silicon design layer within the scaled IC design; and
wherein the scaling element is configured to scale an original MP design layer of the original IC design at the second MOL scaling ratio to achieve the scaled first MOL design layer within the scaled IC design having a second pitch that is different than the pitch of the scaled poly-silicon design layer.

19. The EDA tool of claim 16 , wherein the BEOL scaling ratio is greater than the FEOL scaling ratio.

20. The EDA tool of claim 16 , wherein the FEOL scaling ratio is in a range of between approximately 70% and approximately 80% of the original IC design.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lee Liang-Yao
• Tsai Tsung-Chieh
• Wu Juing-Yi
• Lee Chun-Yi

Classifications

• H10W20/42

  Vias, e.g. via plugs · CPC title

• H10W20/435 Primary

  Cross-sectional shapes or dispositions of interconnections · CPC title

• G06F30/398

  Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36) · CPC title

• G06F30/39 Primary

  Circuit design at the physical level (physical level design for reconfigurable circuits G06F30/347) · CPC title

• H10D89/00

  Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00 · CPC title