Systems and methods for MEMS light modulator arrays with reduced acoustic emission

Patent metadata

Field	Value
Publication number	US-9291813-B2
Application number	US-201113330924-A
Country	US
Kind code	B2
Filing date	Dec 20, 2011
Priority date	Dec 20, 2010
Publication date	Mar 22, 2016
Grant date	Mar 22, 2016

Abstract

Systems and methods for a display having an array of pixels, a substrate, and a control matrix formed on the substrate are described. The array of pixels includes mechanical light modulators that can be referred to as micro-electro-mechanical or MEMS light modulators. The MEMS light modulators may be shutter-based light modulators, and an array of apertures may be formed on the substrate corresponding spatially to the shutters in the array of shutter-based light modulators. Each modulator is configured to be driven from a-light-blocking state to a-light-transmissive state through a movement direction. The array of light modulators are arranged to reduce the correlations in movement directions of neighboring pixels, thereby reducing the amplitude of acoustic emissions from the display.

First claim

What is claimed is:

1. A display comprising:
a substrate;
an array of apertures formed on the substrate; and
an array of MEMS light modulators spaced away from the array of apertures, the array of MEMS light modulators comprising:
a first group of MEMS light modulators capable of being driven from a light blocking state to a light-transmissive state through movement in a first direction substantially along a first axis, the first group comprising a plurality of first linear arrangements of MEMS light modulators, and
a second group of MEMS light modulators capable of being driven from a light blocking state to a light-transmissive state through movement in a second direction substantially along a second axis

oriented by one of about 45 degrees, about 60 degrees, or about 90 degrees relative to the first axis, the second group comprising a plurality of second linear arrangements of MEMS light modulators interdigitated with the first linear arrangements.

2. The display of claim 1 , wherein the second linear arrangements interdigitated with the first linear arrangements are defined by alternating groups of rows of the first and second groups of MEMS light modulators.

3. The display of claim 2 , wherein a spatial period of alternation between the alternating groups of rows of MEMS light modulators is less than about the thickness of the substrate.

4. The display of claim 1 , wherein the second linear arrangements interdigitated with the first linear arrangements are defined by alternating groups of columns of the first and second groups of light modulators.

5. The display of claim 4 , wherein a spatial period of alternation between the alternating groups of columns of MEMS light modulators is less than about the thickness of the substrate.

6. The display of claim 1 , wherein the second linear arrangements interdigitated with the first linear arrangements are defined by alternating clusters of the first and second groups of light modulators, wherein each cluster comprises at least one light modulator.

7. The display of claim 1 , wherein each MEMS light modulator in the array includes a shutter.

8. The display of claim 1 , wherein the first and second group of MEMS light modulators include a third state which partially allows light to pass through a corresponding aperture.

9. The display of claim 1 , further including a controller including a driver chip and a controller matrix for transmitting data and actuation voltages to the array of MEMS light modulators.

10. The display of claim 9 , wherein the controller matrix is capable of actuating the first group of MEMS light modulators in the first direction and the second group of light modulators in the second direction in response to a control signal to move the light modulators from the light-blocking state to the light-transmissive state.

11. The display of claim 9 , wherein the controller stores in memory which of the first and second directions of movement is appropriate to achieve the light-transmissive state for each MEMS light modulator in the array.

12. The display of claim 1 , wherein the substrate is a transparent substrate.

13. A method for manufacturing a display, comprising:
forming an array of apertures on a substrate,
forming a first group of MEMS light modulators on the substrate spaced away from the array of apertures such that the light modulators in the first group of MEMS light modulators are capable of actuating from a light-blocking state to a light-transmissive state through movement in a first direction substantially along a first axis, the first group comprising a plurality of first linear arrangements of MEMS light modulators,
forming a second group of MEMS light modulators on the substrate spaced away from the array of apertures such that the light modulators in the second group of MEMS light modulators are capable of actuating from a light-blocking state to a light-transmissive state through movement in a second direction substantially along a second axis
oriented by one of about 45 degrees, about 60 degrees, and about 90 degrees relative to the first axis, the second group comprising a plurality of second linear arrangements of MEMS light modulators interdigitated with the first linear arrangements.

14. The method of claim 13 , wherein the second linear arrangements interdigitated with the first linear arrangements are defined by alternating groups of rows of the first and second groups of MEMS light modulators.

15. The method of claim 14 , wherein a spatial period of alternation between the alternating groups of MEMS light modulators is less than about the thickness of the substrate.

16. The method of claim 13 , wherein the second linear arrangements interdigitated with the first linear arrangements are defined by alternating groups of columns of the first and second groups of MEMS light modulators.

17. The method of claim 16 , wherein a spatial period of alternation between the alternating groups of MEMS light modulators is less than about the thickness of the substrate.

18. The method of claim 13 , wherein the second linear arrangements interdigitated with the first linear arrangements are defined by alternating clusters of the first and second group of MEMS light modulators, wherein each cluster comprises at least one light modulator.

19. The method of claim 13 , further comprising forming a control matrix onto the substrate for transmitting data and actuation voltages to the array of MEMS light modulators and electrically coupling a controller to the control matrix, the controller including a memory for storing which of the first and second directions of movement is appropriate to achieve the light-transmissive state for each MEMS light modulator in the array.

20. The method of claim 13 , wherein the substrate is a transparent substrate.

21. A system for modulating light to form an image on a display including an array of apertures on a substrate and an array of MEMS light modulators spaced away from the array of apertures, comprising:
means for actuating a first group of MEMS light modulators in the array of MEMS light modulators from a light-blocking state to a light-transmissive state by initiating movement of the MEMS light modulators in a first direction substantially along a first axis, the first group comprising a plurality of first linear arrangements of MEMS light modulators, and
means for actuating a second group of MEMS light modulators in the array of MEMS light modulators from a light-blocking state to a light-transmissive state by initiating movement of the MEMS light modulators in a second direction substantially along a second axis
orientated oriented by one of about 45 degrees, about 60 degrees, and about 90 degrees relative to the first axis, the second group comprising a plurality of second linear arrangements of MEMS light modulators interdigitated with the first linear arrangements.

22. The system of claim 21 , further comprising means for determining which of the first and second directions of movement is appropriate to achieve the light-transmissive state for each MEMS light modulator in the array and means for transmitting data and actuation voltages to the array of MEMS light modulators.

23. The system of claim 21 , wherein the substrate is a transparent substrate.

24. The system of claim 21 , wherein the second linear arrangements interdigitated with the first linear arrangements are defined by alternating groups of rows of the fir

Assignees

• Steyn Jasper Lodewyk
• Gandhi Jignesh
• Pixtronix Inc

Inventors

• Steyn Jasper Lodewyk
• Gandhi Jignesh

Classifications

• G09G2300/0456

  with a reflective area and a transmissive area combined in one pixel, such as in transflectance pixels · CPC title

• G09G2320/041

  Temperature compensation · CPC title

• G09G3/3433 Primary

  using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices (using liquid crystal devices G09G3/36; using electrochromic devices G09G3/38) · CPC title

• G09G2360/144

  the light being ambient light · CPC title

• G09G2310/0262

  The addressing of the pixel, in a display other than an active matrix LCD, involving the control of two or more scan electrodes or two or more data electrodes, e.g. pixel voltage dependent on signals of two data electrodes · CPC title