Apparatus and method for monitoring the process of fabricating solar cells

Patent metadata

Field	Value
Publication number	US-9287437-B2
Application number	US-201414173838-A
Country	US
Kind code	B2
Filing date	Feb 6, 2014
Priority date	Feb 6, 2014
Publication date	Mar 15, 2016
Grant date	Mar 15, 2016

Abstract

A method for monitoring the process of fabricating solar cells generally comprises performing a reaction process in a chamber for a solar cell substructure, wherein the chamber includes a reaction solution that includes at least one chemical component. A concentration value is detected for the chemical component during the reaction process, via a detection assembly that is coupled to the chamber. The method further includes determining whether the detected concentration value is at a predefined threshold concentration level or within a predefined concentration range for the chemical component, via a control assembly that is coupled to the detection assembly. The concentration of the chemical component within the reaction solution is modified, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range.

First claim

What is claimed is:

1. A method for monitoring the process of fabricating solar cells, said method comprising:
performing a reaction process in a chamber, including treating a solar cell substructure

with a reaction liquid that includes at least one chemical component,
detecting a concentration value of the at least one chemical component in the chamber during the reaction process, via a detection assembly that is coupled to the chamber,
determining whether the detected concentration value in the chamber is at a predefined threshold concentration level or within a predefined concentration range for the at least one chemical component, via a control assembly coupled to the detection assembly
modifying the concentration of the at least one chemical component within the reaction liquid in pre-mixing tanks by adding chemical components or removing residual ions with an ion exchange in the pre-mixing tanks, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range;
sending the modified reaction liquid in the pre-mixing tanks into the chamber to maintain the concentration value within a predefined concentration range in the chambers.

2. The method of claim 1 , wherein detecting a concentration value comprises performing a titration.

3. The method of claim 1 , further comprising detecting a pH value of the reaction liquid during the reaction process, via a pH meter.

4. The method of claim 3 , further comprising:
determining whether the detected pH value is at a predefined threshold pH level or within a predefined pH range for the reaction liquid, via the control assembly; and
modifying the concentration of the at least one chemical component within the reaction liquid, during the reaction process, when the detected pH value is different from the predefined threshold pH level or different from the predefined pH range.

5. The method of claim 1 , wherein modifying the concentration of the at least one chemical component comprises removing at least a portion of the chemical component from the reaction liquid.

6. The method of claim 5 , wherein removing at least a portion of the chemical component from the reaction liquid comprises using ion exchange chromatography.

7. The method of claim 1 , wherein modifying the concentration of the at least one chemical component comprises adding a chemical compound to the reaction liquid, the chemical compound includes at least one of cadmium sulfate, thiourea, or ammonium hydroxide.

8. A monitoring apparatus comprising:
a detection assembly configured to detect a concentration value of at least one chemical component in a reaction liquid, during a reaction process being performed within a chamber for a solar cell substructure; and
a control assembly coupled to said detection assembly,
wherein said control assembly is configured to:
determine whether the detected concentration value is at a predefined threshold concentration level or within a predefined concentration range for the at least one chemical component;
modify the concentration of the at least one chemical component within the reaction liquid in the chamber, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range;
adjust the concentration of the chemical component to the predefined range; and
return the reaction liquid back into the chamber.

9. The monitoring apparatus of claim 8 , wherein said detection assembly comprises at least two titrators to enable said detection assembly to perform a titration to detect the concentration value of the at least one chemical component.

10. The monitoring apparatus of claim 8 , wherein said detection assembly comprises a pH meter such that said detection assembly is further configured to detect a pH value of the reaction liquid during the reaction process.

11. The monitoring apparatus of claim 10 , wherein said control assembly is further configured to:
determine whether the detected pH value is at a predefined threshold pH level or within a predefined pH range for the reaction liquid; and
modify the concentration of the at least one chemical component within the reaction liquid, during the reaction process, when the detected pH value is different from the predefined threshold pH level or different from the predefined pH range.

12. The monitoring apparatus of claim 8 , wherein said control assembly is configured to modify the concentration of the at least one chemical component by being configured to remove at least a portion of the chemical component from the reaction liquid.

13. The monitoring apparatus of claim 12 , wherein said control assembly is configured to use ion exchange chromatography for the removal of at least a portion of the chemical component from the reaction liquid.

14. The monitoring apparatus of claim 8 , wherein said control assembly is configured to modify the concentration of the at least one chemical component by adding a chemical compound to the reaction liquid, and the chemical compound includes at least one of a cadmium sulfate, thiourea, or ammonium hydroxide.

15. A solar cell fabrication system comprising:
a plurality of chambers configured to receive a solar cell substructure and to perform a reaction process on the solar cell substructure,
wherein said chambers contains at least one reaction liquid that includes at least one chemical component; and

a monitoring apparatus coupled to said chambers, wherein said monitoring apparatus comprises:
a detection assembly configured to detect a concentration value of the at least one chemical component in at least one chamber during the reaction process, and
a control assembly coupled to said detection assembly,
wherein said control assembly is configured to:
determine whether the detected concentration value is at a predefined threshold concentration level or within a predefined concentration range for the at least one chemical component; and
modify the concentration of the at least one chemical component within the reaction liquid that flows out of the chambers, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range;
pump the modified reaction liquid back into the corresponding chambers.

16. The solar cell fabrication system of claim 15 , wherein said detection assembly comprises at least two titrators to enable said detection assembly to perform a titration to detect the concentration value of the at least one chemical component.

17. The solar cell fabrication system of claim 15 , wherein said detection assembly comprises a pH meter such that said detection assembly is further configured to detect a pH value of the reaction liquid during the reaction process.

18. The solar cell fabrication system of claim 17 , wherein said control assembly is further configured to:
determine whether the detected pH value is at a predefined threshold pH level or within a predefined pH range for the reaction liquid; and
modify the concentration of the at least one chemical component within the reaction liquid, during the reaction process, when the detected pH value is different from the predefined threshold pH level or different from the predefined pH range.

19. The solar cell fabrication system of claim 15 , wherein said control assembly is c

Assignees

• Tsmc Solar Ltd

Inventors

• Wu Chung-Hsien
• Chang Hung-Yu

Classifications

• H10P14/3428

  Sulfides · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• Y02E10/50

  Photovoltaic [PV] energy · CPC title

• H10F71/1257 Primary

  comprising growth substrates not made of Group II-VI materials · CPC title

• H01L31/1836 Primary

  Electricity · mapped topic