MEMS micro-mirror device

Patent metadata

Field	Value
Publication number	US-9285668-B2
Application number	US-201213706142-A
Country	US
Kind code	B2
Filing date	Dec 5, 2012
Priority date	Jul 1, 2010
Publication date	Mar 15, 2016
Grant date	Mar 15, 2016

Abstract

A MEMS micro-mirror device includes, a single package; a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror.

First claim

The invention claimed is:

1. A MEMS micro-mirror device comprising,
a single package having a cap member which defines a top surface of the single package and a base member which defines a bottom surface of the single package, the base member comprising a first transparent portion to allow light to enter the single package through the first transparent portion, the cap member comprising a second transparent portion to allow light to exit the single package through the second transparent portion;
a first mirror and a second mirror located between the cap member and the base member and arranged to deflect light incident on the first mirror to the second mirror, at least one of the first mirror or the second mirror configured to oscillate along an oscillation axis; and
one or more magnetic elements, at least one of the one or more magnetic elements to comprise an aperture.

2. The MEMS micro-mirror device according to claim 1 , wherein the first mirror configured to oscillate along a first oscillation axis and the second mirror configured to oscillate along a second oscillation axis.

3. The MEMS micro-mirror device according to claim 2 , wherein the second oscillation axis is orthogonal to the first oscillation axis.

4. The MEMS micro-mirror device according to claim 1 , the at least one of the first mirror or the second mirror configured to oscillate along an oscillation axis is configured to oscillate along a second oscillation axis, the second oscillation axis orthogonal to the first oscillation axis.

5. The MEMS micro-mirror device according to claim 1 , comprising one or more reflectors.

6. The MEMS micro-mirror device according to claim 5 , the one or more reflectors arranged to deflect light from the first mirror to the second mirror.

7. The MEMS micro-mirror device according to claim 1 , wherein one of the first or second mirrors is larger than the other.

8. The MEMS micro-mirror device according to claim 1 , wherein the single package comprises a ceramic component.

9. The MEMS micro-mirror device according to claim 1 , comprising one or more laser sources positioned within the single package.

10. A method of manufacturing a MEMS micro-mirror device comprising the steps of:
arranging the first mirror and second mirror within the single package, such that at least one of the first mirror or the second mirror is configured to oscillate along an oscillation axis and light incident on the first mirror to be deflected to the second mirror;
providing one or more transparent windows in the single package which enable light to enter the single package through a rear end of the single package; and
providing one or more magnetic elements, at least one of the one or more magnetic elements to comprise an aperture.

11. A MEMS micro-mirror device comprising,
a single package;
a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis;
wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror;
wherein the single package comprises one or more portions which are transparent to light, and wherein the one or more portions which are transparent to light are arranged to allow light to enter the single package from a rear end of the single package,
wherein the MEMS micro-mirror device further comprises one or more magnetic elements, wherein the or each magnetic element has an aperture.

12. A MEMS micro-mirror device comprising:
a single package comprising a front end and a rear end, the rear end comprising a first transparent portion to allow light to enter the single package through the rear end of the single package, the front end comprising a second transparent portion to allow light to exit the single package through the front end of the single package, the first transparent portion and the second transparent portion lie on different planes;
a first mirror and a second mirror located between the front end and the rear end and arragned to deflect light incident on the first mirror to the second mirror, at least one of the first mirror or the second mirror to be configured to oscillate along an oscillation axis; and
one or more magnetic elements, at least one of the one or more magnetic elements to comprise an aperture.

13. The MEMS micro-mirror device according to claim 12 , the first mirror configured to oscillate along a first oscillation axis and the second mirror configured to oscillate along a second oscillation axis.

14. The MEMS micro-mirror device according to claim 13 , the second oscillation axis orthogonal to the first oscillation axis.

15. The MEMS micro-mirror device according to claim 12 , comprising a reflector to deflect light from the first mirror to the second mirror.

16. The MEMS micro-mirror device according to claim 12 , comprising one or more laser sources positioned within the single package.

17. A method comprising:
receiving light from a laser source, the light received through a first transparent portion in a base member of a single package;
deflecting light within the single package, the light at least partially deflected by a first mirror and a second mirror located between the base member and a cap member of the single package;
oscillating at least one of the first mirror or the second mirror along an oscillation axis, the at least one of the first mirror or the second mirror to oscillate at least partially based on a magnetic element comprising an aperture; and
transmitting light from a second transparent portion in the cap member.

18. The method of claim 17 , comprising transmitting the light to project the light onto a projection screen.

Assignees

• Intel Corp

Inventors

• Abele Nicolas
• Khechana Faouzi
• Kilcher Lucio

Classifications

• G03B21/28 Primary

  Reflectors in projection beam {(in illumination beam G03B21/2066)} · CPC title

• G02B26/101 Primary

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• Y10T29/49

  Method of mechanical manufacture · CPC title

• G02B26/00

  Optical devices or arrangements for the control of light using movable or deformable optical elements (control of light by modification of the optical properties of the media of the elements involved therein G02F1/00) · CPC title

• G03B21/14

  Details · CPC title