Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and ultrasonic sensor

Patent metadata

Field	Value
Publication number	US-9283757-B2
Application number	US-201414179187-A
Country	US
Kind code	B2
Filing date	Feb 12, 2014
Priority date	Feb 28, 2013
Publication date	Mar 15, 2016
Grant date	Mar 15, 2016

Abstract

A liquid ejecting head which includes a piezoelectric element which includes a first electrode, a piezoelectric layer which is provided on the first electrode, and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, in which a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a first direction and a second direction which cross a third direction which goes from the first electrode to the second electrode.

First claim

What is claimed is:

1. A liquid ejecting head comprising:
a piezoelectric element including a first electrode, a piezoelectric layer which is provided on the first electrode and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, wherein the second electrode is common to multiple piezoelectric elements; and
a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element,
wherein a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a direction which crosses a direction which goes from the first electrode to the second electrode,
wherein the second electrode is formed on the side surface of the piezoelectric layer,
wherein the second electrode is deposited to continuously cover an inside surface of the plurality of grooves, and
wherein each of the plurality of grooves has a similar shape and orientation.

2. The liquid ejecting head according to claim 1 ,
wherein the piezoelectric layer is formed so that the piezoelectric film on the first electrode side protrudes to an outside of the piezoelectric film on the second electrode side.

3. The liquid ejecting head according to claim 1 ,
wherein the second electrode is formed using an electroless plating method.

4. The liquid ejecting head according to claim 1 ,
wherein the second electrode includes a first layer formed of conductive metal oxide which is formed on the piezoelectric layer, and a conductive second layer which is formed on the first layer.

5. The liquid ejecting head according to claim 4 ,
wherein the second layer of the second electrode is formed using an electroless plating method.

6. A liquid ejecting apparatus comprising:
the liquid ejecting head according to claim 1 .

7. A liquid ejecting apparatus comprising:
the liquid ejecting head according to claim 2 .

8. A liquid ejecting apparatus comprising:
the liquid ejecting head according to claim 3 .

9. A liquid ejecting apparatus comprising:
the liquid ejecting head according to claim 4 .

10. A liquid ejecting apparatus comprising:
the liquid ejecting head according to claim 5 .

11. A piezoelectric element comprising:
a first electrode;
a piezoelectric layer which is provided on the first electrode and on which a plurality of piezoelectric films are laminated;
a second electrode which is provided on the piezoelectric layer, wherein the second electrode is a common electrode that is common to multiple piezoelectric elements; and
a plurality of active units which are interposed between the first electrode and the second electrode,
wherein a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric layers along a direction which crosses a direction which goes from the first electrode to the second electrode,
wherein the second electrode is formed on the side surface of the piezoelectric layer,
wherein the second electrode is deposited to continuously cover an inside surface of the plurality of grooves, and
wherein each of the plurality of grooves has a similar shape and orientation.

12. An ultrasonic sensor comprising:
the piezoelectric element according to claim 11 .

Assignees

• Seiko Epson Corp

Inventors

• Furuya Noboru
• Nakayama Masao

Classifications

• B41J2/1646

  thin film formation by sputtering · CPC title

• B41J2/1629

  wet etching · CPC title

• B41J2002/14241

  having a cover around the piezoelectric thin film element · CPC title

• B41J2/1631

  photolithography · CPC title

• B41J2/14201 Primary

  Structure of print heads with piezoelectric elements · CPC title