System and method for generating extreme ultraviolet light, and laser apparatus
US-2015351210-A1 · Dec 3, 2015 · US
US9281653B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9281653-B2 |
| Application number | US-201213553690-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 19, 2012 |
| Priority date | Apr 26, 2006 |
| Publication date | Mar 8, 2016 |
| Grant date | Mar 8, 2016 |
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Systems and methods are disclosed for shutting down a laser system in an intelligent and flexible manner. An intelligent laser interlock system includes both hardwired components, and intelligent components configured to execute computing instructions. The hardwired components and the intelligent components are configured to shutdown the laser system to one or more alternative shutdown states in response to one or more interlock signals.
Opening claim text (preview).
What is claimed is: 1. A system comprising: a light source including an amplifier and an oscillator, the oscillator configured to generate a laser light pulse; the amplifier configured to receive the laser light pulse from the oscillator and amplify the laser light pulse; a first interlock module communicatively coupled with the oscillator and configured to shutdown a first component of the light source; a second interlock module communicatively coupled with the oscillator and configured to shutdown a second component of the light source by executing computing instructions; and a control system comprising an input configured to receive an interlock signal, an integrated circuit configured to select a shutdown state from a plurality of alternative shutdown states based on the interlock signal, and an output configured to place the system in the selected shutdown state. 2. The system of claim 1 , wherein one shutdown state includes shutting down the amplifier but not the oscillator. 3. The system of claim 1 , further including an external interface, said external interface being connected to an external system, wherein one shutdown state includes shutting down the external system by communicating a signal to the external system. 4. The system of claim 1 , wherein the control system is configured to control a plurality of oscillators. 5. The system of claim 1 , wherein the control system is configured to control a plurality of amplifiers. 6. The system of claim 1 , wherein the control system is configured to store a snapshot of a system state. 7. The system of claim 1 , wherein the control system is configured to communicate with an external computer system. 8. The system of claim 1 , wherein a duration of the laser light pulse is less than 1 nanosecond. 9. The system of claim 1 , wherein a duration of the laser light pulse is less than 3 picoseconds. 10. A method comprising: receiving an output signal from a sensor at a first trigger logic of a first interlock module; generating a first interlock trigger using first trigger logic of the first interlock module; processing the first interlock trigger; changing a laser system to a first shutdown state responsive to the interlock signal processing of the first interlock trigger, the first shutdown state being an intermediate shutdown state; receiving and processing a second interlock trigger by second interlock logic; analyzing the interlock signal; and shutting down the laser system to a second shutdown state based on the processing of the second interlock trigger. 11. The method of claim 10 , wherein changing the laser system comprises shutting down one or more system components in a sequence from a downstream component to an upstream component. 12. The method of claim 10 , further comprising storing a snapshot of a system state. 13. The method of claim 10 , wherein changing the laser system to the first shutdown state includes halting the amplification of pulses, and changing the laser system to a second shutdown state includes halting the generation of laser pulses.
Amplifier arrangements, e.g. MOPA · CPC title
Amplitude control · CPC title
for electric control systems · CPC title
Electronics or drivers for the pump source, i.e. details of drivers or circuitry specific for laser pumping (laser diode drivers H01S5/042) · CPC title
Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title
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