X-ray emitting target and X-ray emitting device

Patent metadata

Field	Value
Publication number	US-9281158-B2
Application number	US-201214124216-A
Country	US
Kind code	B2
Filing date	May 28, 2012
Priority date	Jun 7, 2011
Publication date	Mar 8, 2016
Grant date	Mar 8, 2016

Abstract

An X-ray emitting target including a diamond substrate, a first layer disposed on the diamond substrate and including a first metal, and a second layer disposed on the first layer and including a second metal whose atomic number is 42 or more and which has a thermal conductivity higher than that of the first metal. Carbide of the first metal is present at a boundary between the diamond substrate and the first layer. The target is prevented from overheating, so that output variation due to rising temperature is suppressed. Thus it is possible to emit stable and high output X-rays.

First claim

The invention claimed is:

1. A transmitting type X-ray emitting device comprising:
a vacuum envelope, inside of which is decompressed;
an electron emission source disposed inside the vacuum envelope; and
a transmitting type X-ray emitting target comprising:
a diamond substrate;
a first layer disposed on the diamond substrate and including a first metal; and
a second layer disposed on the first layer and including a second metal whose atomic number is 42 or more and which has a thermal conductivity higher than that of the first metal,
wherein the electron emission source and the second layer are arranged to face each other,
wherein a thickness of the first layer and a thickness of the diamond substrate are greater than or equal to 1 nm and smaller than or equal to 10 nm, and greater than or equal to 350 micrometers and smaller than or equal to 2000 micrometers, respectively, such that an X-ray generated at the second layer is transmitted through the first layer and the diamond substrate, in that order, and is emitted from the diamond substrate, and
wherein a carbide of the first metal is present at a boundary between the diamond substrate and the first layer.

2. The transmitting type X-ray emitting device according to claim 1 , wherein a solid solution of the first metal and the second metal is present at a boundary between the first layer and the second layer.

3. The transmitting type X-ray emitting device according to claim 1 , wherein the first metal is any one of titanium, vanadium, tantalum, and chromium.

4. The transmitting type X-ray emitting device according to claim 1 , wherein a standard free energy of formation of carbide of the first metal in a temperature range from 500 degrees Celsius to 1500 degrees Celsius is smaller than or equal to −40 kJ/mol degree Celsius.

5. The transmitting type X-ray emitting device according to claim 4 , wherein the first metal is titanium or tantalum.

6. The transmitting type X-ray emitting device according to claim 1 , wherein the second metal is tungsten.

7. A transmitting type X-ray emitting device comprising:
a vacuum envelope, inside of which is decompressed;
an electron emission source disposed inside the vacuum envelope; and
a transmitting type X-ray emitting target comprising:
a diamond substrate;
a first layer disposed on the diamond substrate and including a first metal where a standard free energy of formation of carbide in a temperature range from 500 degrees Celsius to 1500 degrees Celsius is negative; and
a second layer disposed on the first layer,
wherein the electron emission source and the second layer are arranged to face each other,
wherein a thickness of the first layer and a thickness of the diamond substrate are greater than or equal to 1 nm and smaller than or equal to 10 nm, and greater than or equal to 350 micrometers and smaller than or equal to 2000 micrometers, respectively, such that an X-ray generated at the second layer is transmitted through the first layer and the diamond substrate, in that order, and is emitted from the diamond substrate, and
wherein the second layer includes a second metal whose atomic number is 42 or more and which has a thermal conductivity higher than that of the first metal.

Assignees

• Ogura Takao
• Sato Yasue
• Ito Nobuhiro
• Canon Kk

Inventors

• Ogura Takao
• Sato Yasue
• Ito Nobuhiro

Classifications

• H01J35/18

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• H01J2235/1291

  Thermal conductivity · CPC title

• H01J2235/186

  Electricity · mapped topic

• H01J35/16

  Vessels; Containers; Shields associated therewith · CPC title