Imprint apparatus and method of manufacturing article

Patent metadata

Field	Value
Publication number	US-9280048-B2
Application number	US-201414261889-A
Country	US
Kind code	B2
Filing date	Apr 25, 2014
Priority date	Mar 24, 2010
Publication date	Mar 8, 2016
Grant date	Mar 8, 2016

Abstract

An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, comprises a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces, and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other, wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold.

First claim

What is claimed is:

1. An imprint apparatus which cures a resin dispensed on a substrate while the resin and a mold are in contact with each other,
the mold including a porous portion having a portion forming a side surface of the mold, and
the imprint apparatus comprising:
a chuck configured to hold the mold; and
a suction portion configured to communicate only with the porous portion on the side surface of the mold and to draw a gas only from the side surface of the mold by suction, so that the gas is drawn via the porous portion from a concave portion of a pattern formed in a pattern portion of the mold which is in contact with the resin, to accelerate filling of the concave portion with the resin.

2. The apparatus according to claim 1 , further comprising
a supply portion configured to supply a gas to the porous portion of the mold so that the gas is exhausted from the porous potion to accelerate separating the mold from the cured resin.

Assignees

• Canon Kk

Inventors

• Sato Hiroshi
• Ina Hideki

Classifications

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• B29C59/02

  by mechanical means, e.g. pressing {(B29C59/007 takes precedence; embossing expanded porous articles B29C44/5627)} · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B29C35/0233 Primary

  the curing continuing after removal from the mould · CPC title