Color shift of high LSG low emissivity coating after heat treatment

Patent metadata

Field	Value
Publication number	US-9279910-B2
Application number	US-201313801465-A
Country	US
Kind code	B2
Filing date	Mar 13, 2013
Priority date	Mar 13, 2013
Publication date	Mar 8, 2016
Grant date	Mar 8, 2016

Abstract

Low emissivity panels can include a protection layer of silicon nitride on a layer of ZnO on a layer of Zn 2 SnO x . The low emissivity panels can also include NiNbTiO x as a barrier layer. The low emissivity panels have high light to solar gain, color neutral, together with similar observable color and light transmission before and after a heat treatment process.

First claim

What is claimed is:

1. A coated article comprising
first layer disposed on a substrate,
wherein the first layer comprises Zn 2 SnO x
wherein the first layer is operable as a base layer and has a thickness of 12 nm;

a second layer disposed on the first layer,
wherein the second layer comprises silver,
wherein the second layer is operable as an infrared reflective layer;

a third layer disposed on the second layer,
wherein the third layer comprises nickel, niobium, titanium and oxygen,
wherein the third layer is operable as a barrier layer;

a fourth layer disposed on the third layer,
wherein the fourth layer comprises zinc tin oxide in contact with the third layer and has a thickness between 50 nm and 100 nm;

a fifth layer disposed on the fourth layer,
wherein the fifth layer comprises silver,
wherein the fifth layer is operable as an infrared reflective layer;

a sixth layer on the fifth layer,
wherein the sixth layer comprises nickel, niobium, titanium and oxygen,
wherein the sixth layer is operable as a barrier layer;

a seventh layer disposed on the sixth layer,
wherein the seventh layer comprises Zn 2 SnO x and has a thickness between 2 nm and 30 nm;

an eighth layer on the seventh layer,
wherein the eighth layer is made of zinc oxide and has a thickness between 1 nm and 10 nm; and

a ninth layer on the eighth layer
wherein the ninth layer comprises silicon nitride,

wherein the transmission of the coated article is greater than 80% and the reflection of the heat treated coated article is less than 6%.

2. A coated article as in claim 1 wherein the color change of the coated article after an anneal at a temperature above 600 C is less than 4.

3. A coated article as in claim 1 wherein the fourth layer comprises Zn 2 SnO x .

4. A coated article as in claim 1 wherein the thickness of the fourth layer is 74 nm, and the thickness of the seventh layer is 6 nm.

5. A coated article as in claim 1 wherein the thickness of the eighth layer is 3 nm.

6. A coated article as in claim 1 wherein the third layer and the sixth layer comprise NiNbTiO x , wherein the NiNbTiO x has an oxygen concentration of between 10 and 30 at %.

7. A coated article as in claim 1 wherein a thickness of the second layer is between 8 nm and 12 nm, and a thickness of the fifth layer is between 14 nm and 18 nm.

8. A coated article as in claim 1 further comprising an tenth layer between the first and second layers and an eleventh layer between the fourth and fifth layers, wherein the tenth layer comprises zinc oxide, wherein the tenth layer is operable as a seed layer for the second layer, wherein the eleventh layer comprises zinc oxide, wherein the eleventh layer is operable as a seed layer for the fifth layer, wherein the thicknesses of the tenth layer and the eleventh layer are between 3 and 10 nm.

9. A coated article comprising:
a first layer formed above a substrate,
wherein the first layer comprises Zn 2 SnO x and has a thickness of 12 nm;

a second layer formed above the first layer,
wherein the second layer comprises zinc and oxygen and has a thickness between 3 nm and 10 nm;

a third layer formed above the second layer,
wherein the third layer comprises silver and has a thickness between 8 nm and 12 nm;

a fourth layer formed above the third layer,
wherein the fourth layer comprises nickel, niobium, titanium and oxygen and has a thickness between 1 nm and 5 nm;

a fifth layer formed above the fourth layer,
wherein the fifth layer comprises zinc tin oxide in contact with the fourth layer and has a thickness between 50 nm and 100 nm;

a sixth layer formed above the fifth layer,
wherein the sixth layer comprises zinc and oxygen and has a thickness between 3 nm and 10 nm;

a seventh layer formed above the sixth layer,
wherein the seventh layer comprises silver and has a thickness between 14 nm and 18 nm;

an eighth layer formed above the seventh layer,
wherein the eighth layer comprises nickel, niobium, titanium and oxygen and has a thickness between i nm and 5 nm;

a ninth layer formed above the eighth layer,
wherein the ninth layer comprises Zn 2 SnO x and has a thickness between 2 nm and 30 nm; and

a tenth layer formed above the ninth layer,
wherein the tenth layer comprises zinc and oxygen and has a thickness between 1 nm and 10 nm,

wherein the transmission of the coated article is greater than 80% and the reflection of the heat treated coated article is less than 6%.

10. A coated article as in claim 9 wherein the thickness of the fifth layer is 74 nm and the thickness of the ninth layer is 6 nm.

11. A coated article as in claim 10 wherein the thickness of the second layer is 4 nm, the thickness of the sixth layer is 4 nm, and the thickness of the tenth layer is 3 nm.

12. A coated article as in claim 11 wherein the thickness of the third layer is 9 nm, and the thickness of the seventh layer is 14 nm.

13. A coated article as in claim 12 wherein the thickness of the fourth layer is 2.4 nm, and the thickness of the eighth layer is 2.4 nm.

14. A coated article as in claim 13 further comprising:
an eleventh layer formed between the substrate and the first layer, wherein the eleventh layer comprises silicon nitride and has a thickness between 10 nm and 30 nm; and
a twelfth layer formed above the eleventh layer, wherein the twelfth layer comprises silicon nitride and has a thickness between 10 nm and 30 nm.

15. A coated article as in claim 9 wherein the fourth and eighth layers comprise NiNbTiO x , wherein the NiNbTiO x has an oxygen concentration of between 10 and 30 at %.

16. A coated article comprising: a substrate;
a first layer formed above the substrate,
wherein the first layer comprises silicon nitride and has a thickness of 14 nm;

a second layer formed above the first layer,
wherein the second layer comprises Zn 2 SnO x and has a thickness of 12 nm;

a third layer formed above the second layer,
wherein the third layer comprises zinc oxide and has a thickness of 4 nm;

a fourth layer formed above the third layer,
wherein the fourth layer comprises silver and has a thickness of 9 nm;

a fifth layer formed above the fourth layer,
wherein the fifth layer comprises nickel niobium titanium oxide and has a thickness of 2.4 nm;

a sixth layer formed directly on the fifth layer,
wherein the sixth layer comprises zinc tin oxide and has a thickness of 74 nm;

a seventh layer formed above the sixth layer,
wherein the seventh layer comprises zinc oxide and has a thickness of 4 nm;

a eighth layer formed above the seventh layer,
wherein the eighth layer comprises silver and has a thickness of 14 nm;

an ninth layer formed above the eighth layer,
wherein the ninth layer comprises nickel niobium titanium oxide and has a thickness of 2.4 nm;

a tenth layer formed above the ninth layer,
wherein the tenth layer comprises Zn 2 SnO x and has a thickness of 6 nm;

an eleventh layer formed above the tenth layer,
wherein the eleventh layer comprises zinc oxide and has a thickness of 3 nm; and

a twelfth layer formed above the eleventh layer,
wherein the twelfth layer comprises silicon nitride and has a thickness of 20 nm.

17. A coated article as in claim 16 wherein the first layer is formed directly on the substrate, the second layer is formed directly on the first layer, the third layer is formed directly on the second layer, the fourth layer is formed directly on the third layer, the fifth layer is formed directly on the fourth layer, the seventh layer is formed directly on the sixth

Assignees

• Intermolecular Inc
• Intermolecular Inc

Inventors

• Ding Guowen
• Cheng Jeremy
• Ju Tong
• Le Minh Huu
• Schweigert Daniel
• Zhang Guizhen

Classifications

• G02B1/10 Primary

  Optical coatings produced by application to, or surface treatment of, optical elements (G02B1/08 takes precedence) · CPC title

• Y10T428/265

  1 mil or less · CPC title

• Y10T428/24975

  No layer or component greater than 5 mils thick · CPC title

• C03C17/3644

  the metal being silver · CPC title

• G02B5/282 Primary

  reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection · CPC title