Radiation image acquisition device

Patent metadata

Field	Value
Publication number	US-9279890-B2
Application number	US-201113981469-A
Country	US
Kind code	B2
Filing date	Oct 21, 2011
Priority date	Jan 25, 2011
Publication date	Mar 8, 2016
Grant date	Mar 8, 2016

Abstract

A radiation image acquisition device includes: a radiation source which emits radiation; a wavelength conversion member of a flat plate shape which generates scintillation light according to incidence of the radiation emitted from the radiation source and transmitted by an object; first imaging means which condenses and images the scintillation light emitted from an entrance surface for the radiation in the wavelength conversion member in a direction of a normal to the entrance surface; and second imaging means which condenses and images the scintillation light emitted from a surface opposite to the entrance surface in the wavelength conversion member in a direction of a normal to the opposite surface.

First claim

The invention claimed is:

1. A radiation image acquisition device comprising:
a radiation source configured to emit radiation;
a wavelength conversion member of a flat plate shape configured to generate scintillation light according to incidence of the radiation emitted from the radiation source and transmitted by an object;
first imaging means configured to condense and image the scintillation light emitted from an entrance surface for the radiation in the wavelength conversion member in a direction of a normal to the entrance surface; and
second imaging means configured to condense and image the scintillation light emitted from a surface opposite to the entrance surface in the wavelength conversion member in a direction of a normal to the opposite surface,
wherein each of the first imaging means and the second imaging means has:
a condensing lens unit configured to condense the scintillation light emitted from the wavelength conversion member; and
an imaging unit configured to image the scintillation light thus condensed,
wherein the condensing lens unit of the first imaging means is configured to focus on the entrance surface and condense the scintillation light emitted in the direction of the normal from the entrance surface toward the imaging unit, and
wherein the condensing lens unit of the second imaging means is configured to focus on the opposite surface and condense the scintillation light emitted in the direction of the normal from the opposite surface toward the imaging unit.

2. The radiation image acquisition device according to claim 1 ,
wherein an optical axis of the condensing lens unit of the first imaging means is perpendicular to the entrance surface.

3. The radiation image acquisition device according to claim 1 ,
wherein the first imaging means is arranged so that a vertical line descending from a central point of the condensing lens unit of the first imaging means to the entrance surface is within the range of the entrance surface.

4. The radiation image acquisition device according to claim 1 ,
wherein an optical axis of the condensing lens unit of the second imaging means is perpendicular to the opposite surface.

5. The radiation image acquisition device according to claim 1 ,
wherein the radiation source is arranged so that an angle between an optical axis of the radiation source and the entrance surface is larger than 0° and smaller than 90°, and
wherein the first imaging means is arranged on the normal to the entrance surface.

6. The radiation image acquisition device according to claim 1 ,
wherein the radiation source is arranged on the normal to the entrance surface, and
wherein the first imaging means is arranged at a position off the normal to the entrance surface so as to condense the scintillation light via a reflecting mirror arranged between the wavelength conversion member and the radiation source.

7. The radiation image acquisition device according to claim 6 ,
wherein the reflecting mirror is arranged so that a reflecting surface thereof makes a predetermined angle with respect to the direction of the normal to the entrance surface, and reflects the scintillation light emitted in the direction of the normal from the entrance surface in a predetermined direction with respect to the direction of the normal to the entrance surface.

8. The radiation image acquisition device according to claim 6 ,
wherein the first imaging means is arranged so that an angle between an optical axis of a condensing lens unit of the first imaging means and a reflecting surface of the reflecting mirror is equal to an angle between the normal to the entrance surface and the reflecting surface.

9. The radiation image acquisition device according to claim 1 ,
wherein the second imaging means is arranged at a position off the normal to the opposite surface so as to condense the scintillation light via a reflecting mirror arranged on the normal to the opposite surface.

10. The radiation image acquisition device according to claim 9 ,
wherein the reflecting mirror is arranged so that a reflecting surface thereof makes a predetermined angle with respect to the direction of the normal to the opposite surface, and reflects the scintillation light emitted in the direction of the normal to the opposite surface from the opposite surface in a predetermined direction with respect to the direction of the normal to the opposite surface.

11. The radiation image acquisition device according to claim 9 ,
wherein the second imaging means is arranged so that an angle between an optical axis of a condensing lens unit of the second imaging means and a reflecting surface of the reflecting mirror is equal to an angle between the normal to the opposite surface and the reflecting surface.

12. The radiation image acquisition device according to claim 1 ,
wherein a tapered fiber is arranged between the opposite surface of the wavelength conversion member and the second imaging means so as to face the opposite surface.

13. The radiation image acquisition device according to claim 12 ,
wherein the tapered fiber is arranged so that an axis thereof is coincident with the normal to the opposite surface, and guides the scintillation light emitted in the direction of the normal to the opposite surface from the opposite surface to a condensing lens unit of the second imaging means.

14. The radiation image acquisition device according to claim 1 ,
wherein a light receiving surface of the first imaging means is parallel to the entrance surface.

15. The radiation image acquisition device according to claim 1 ,
wherein a light receiving surface of the second imaging means is parallel to the opposite surface.

16. The radiation image acquisition device according to claim 1 ,
wherein the first imaging means faces the entrance surface and is arranged on the normal to the entrance surface.

17. The radiation image acquisition device according to claim 1 ,
wherein the second imaging means faces the opposite surface and is arranged on the normal to the opposite surface.

18. The radiation image acquisition device according to claim 1 ,
wherein an optical path length from the entrance surface to the first imaging means is equal to an optical path length from the opposite surface to the second imaging means.

19. The radiation image acquisition device according to claim 1 ,
wherein the first and second imaging means are configured so as to perform imaging simultaneously.

20. The radiation image acquisition device according to claim 1 ,
wherein the object is a semiconductor device,
said radiation image acquisition device being applied to a semiconductor failure inspection device an inspection target of which is the semiconductor device.

21. The radiation image acquisition device according to claim 1 ,
wherein the object is an electronic component.

Assignees

• SUGIYAMA Mototsugu
• Suyama Toshiyasu
• Hamamatsu Photonics Kk

Inventors

• SUGIYAMA Mototsugu
• Suyama Toshiyasu

Classifications

• G01T1/20

  with scintillation detectors · CPC title

• G01N2223/611

  patterned objects; electronic devices · CPC title

• G01T1/2002 Primary

  Optical details, e.g. reflecting or diffusing layers · CPC title

• G01N23/04 Primary

  and forming images of the material · CPC title