Bio signal measuring apparatus using bandwidth of pulse signal and user monitoring system including the same
US-2015366470-A1 · Dec 24, 2015 · US
Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus
US9277869B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9277869-B2 |
| Application number | US-201314047649-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 7, 2013 |
| Priority date | Nov 28, 2012 |
| Publication date | Mar 8, 2016 |
| Grant date | Mar 8, 2016 |
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Abstract
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There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (K 1-w-x Na w Sr x ) m (Nb 1-y Zr y )O 3 and which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film piezoelectric sensor each including the thin-film piezoelectric element.
First claim
Opening claim text (preview).
What is claimed is: 1. A thin-film piezoelectric element comprising: a piezoelectric thin film; and a pair of electrode films that sandwich the piezoelectric thin film, wherein the piezoelectric thin film has an alkali niobate-based perovskite structure represented by the composition formula (K 1-w-x Na w Sr x ) m (Nb 1-y Zr y )O 3 and is preferentially oriented to (001), wherein 0.95≦m<1.05, and 0.6≦(m·x/y)≦0.8. 2. The thin-film piezoelectric element according to claim 1 , wherein in the piezoelectric thin film, a Na (sodium)/(Na+K (potassium)) ratio is 0.5 or more and 0.75 or less. 3. The thin-film piezoelectric element according to claim 1 , further comprising a strontium ruthenate thin film provided between the piezoelectric thin film and at least one of the pair of electrode films. 4. The thin-film piezoelectric element according to claim 1 , wherein m=0.96 and (m·x/y)=0.67. 5. The thin-film piezoelectric element according to claim 1 , wherein m=1.00 and (m·x/y)=0.70. 6. The thin-film piezoelectric element according to claim 1 , wherein m=1.04 and (m·x/y)=0.73. 7. The thin-film piezoelectric element according to claim 1 , wherein m=1.04 and (m·x/y)=0.78. 8. A thin-film piezoelectric actuator comprising the thin-film piezoelectric element according to claim 1 . 9. A thin-film piezoelectric sensor comprising the thin-film piezoelectric element according to claim 1 . 10. A hard disk drive comprising the thin-film piezoelectric actuator according to claim 8 . 11. An ink jet printer apparatus comprising the thin-film piezoelectric actuator according to claim 8 .
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using piezoelectric devices (piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025) · CPC title
the devices involving a micromechanical structure · CPC title
Electricity · mapped topic
using fine positioning means for track acquisition separate from the coarse (e.g. track changing) positioning means · CPC title
Specific materials used · CPC title
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- What does patent US9277869B2 cover?
- There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (K 1-w-x Na w Sr x ) m (Nb 1-y Zr y )O 3 and which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film …
- Who is the assignee on this patent?
- Tdk Corp
- What technology area does this patent fall under?
- Primary CPC classification A61B5/02444. Mapped technology areas include Human Necessities.
- When was this patent published?
- Publication date Tue Mar 08 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).