Imprinted multi-layer micro structure method
US-8932474-B1 · Jan 13, 2015 · US
US9277642B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9277642-B2 |
| Application number | US-201314012216-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 28, 2013 |
| Priority date | Mar 5, 2013 |
| Publication date | Mar 1, 2016 |
| Grant date | Mar 1, 2016 |
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A method of making an imprinted micro-wire structure includes providing a substrate having an edge area and a central area separate from the edge area and providing first, second, and third different stamps. A curable bottom, connecting layer, and top layer are formed on the substrate. A bottom-layer micro-channel is imprinted in the bottom layer in the central area and the edge area, a connecting-layer micro-channel is imprinted in the connecting layer in the edge area over the bottom-layer micro-channel, an edge micro-channel is imprinted in the top layer in the edge area over the connecting-layer micro-channel, and top-layer micro-channels are imprinted in the top layer over the central area. Micro-wires are formed in each micro-channel. The bottom-layer micro-wire in the central area is electrically connected to the edge micro-wire in the edge area and is electrically isolated from the top-layer micro-wire.
Opening claim text (preview).
The invention claimed is: 1. A method of making a micro-wire structure, comprising: providing a substrate having an edge area and a central area separate from the edge area; providing first, second, and third different stamps; providing a curable bottom layer in relation to the substrate; forming an imprinted bottom-layer micro-channel in the curable bottom layer by at least imprinting the curable bottom layer with the first stamp in at least a portion of the central area and in at least a portion of the edge area and curing the curable bottom layer, the bottom-layer micro-channel extending from the central area into the edge area; locating a curable electrical conductor in the bottom-layer micro-channel and curing the curable electrical conductor to form a bottom-layer micro-wire in the bottom-layer micro-channel, the bottom-layer micro-wire extending from the central area into the edge area; providing a curable connecting layer adjacent to and in contact with the cured bottom layer and the bottom-layer micro-wire; forming an imprinted connecting-layer micro-channel in the curable connecting layer by at least imprinting the curable connecting layer with the second stamp over at least a portion of the bottom-layer micro-channel in at least a portion of the edge area and curing the curable connecting layer; forming a connecting-layer micro-wire in the connecting-layer micro-channel contacting at least a portion of the bottom-layer micro-wire; providing a curable top layer adjacent to and in contact with the cured connecting layer and the connecting-layer micro-wire; forming an imprinted edge micro-channel in the curable top layer by at least imprinting the curable top layer with the third stamp over at least a portion of the connecting-layer micro-channel in at least a portion of the edge area and forming an imprinted top-layer micro-channel in the curable top layer by at least imprinting the curable top layer with the third stamp separate from the bottom-layer micro-channel and over at least a portion of the bottom-layer micro-channel in at least a portion of the central area and curing the curable top layer; forming an edge micro-wire in the edge micro-channel contacting at least a portion of the connecting-layer micro-wire and forming a top-layer micro-wire in the top-layer micro-channel that is electrically isolated from the edge micro-wire, the connecting-layer micro-wire, and the bottom-layer micro-wire; and wherein the bottom-layer micro-wire in the central area is electrically connected to the edge micro-wire in the edge area and is electrically isolated from the top-layer micro-wire. 2. The method of claim 1 , wherein the substrate has at least one edge and the edge area is adjacent to the edge. 3. The method of claim 1 , wherein the step of forming the imprinted connecting-layer micro-channel further includes contacting the bottom-layer micro-wire with the second stamp. 4. The method of claim 1 , wherein the step of forming the imprinted edge micro-channel further includes contacting the connecting-layer micro-wire with the third stamp. 5. The method of claim 1 , wherein the bottom and connecting layers include cross-linkable material and further including cross linking the cross-linkable first-layer material to the cross-linkable second-layer material or wherein the connecting and top layers include cross-linkable material and further including cross linking the cross-linkable second-layer material to the cross-linkable third-layer material. 6. The method of claim 1 , wherein a portion of the edge micro-wire forms at least a portion of a connection pad. 7. The method of claim 6 , wherein the connection pad further includes a plurality of micro-wires. 8. The method of claim 1 , further including forming a plurality of edge micro-wires electrically connected through a corresponding plurality of connection micro-wires to a corresponding plurality of bottom-layer micro-wires. 9. The method of claim 8 , further including forming a plurality of top-layer micro-wires electrically isolated from the edge micro-wires. 10. The method of claim 1 , further including removing a portion of the cured connecting layer or removing a portion of the cured top layer. 11. The method of claim 10 , further including removing the portion of the cured second or cured top layer by treating the cured second or cured top layer with a plasma treatment. 12. The method of claim 10 , further including thinning the cured second or cured top layer by a thinning depth. 13. The method of claim 12 , wherein the thinning depth is less than the difference between the depth of the cured second or cured top layer and the depth of any micro-channels in the corresponding cured second or cured top layer. 14. A method of making a micro-wire structure, comprising: providing a substrate having an edge area and a central area separate from the edge area; providing first, second, and third different stamps; providing a curable bottom layer in relation to the substrate; forming an imprinted bottom-layer micro-channel in the curable bottom layer by at least imprinting the curable bottom layer with the first stamp in at least a portion of the central area and in at least a portion of the edge area and curing the curable bottom layer, the bottom-layer micro-channel extending from the central area into the edge area; locating a curable electrical conductor in the bottom-layer micro-channel and curing the curable electrical conductor to form a bottom-layer micro-wire in the bottom-layer micro-channel, the bottom-layer micro-wire extending from the central area into the edge area; providing a curable connecting layer adjacent to and in contact with the cured bottom layer and the bottom-layer micro-wire; forming an imprinted connecting-layer micro-channel in the curable connecting layer by at least imprinting the curable connecting layer with the second stamp over at least a portion of the bottom-layer micro-channel in at least a portion of the edge area and curing the curable connecting layer; forming a connecting-layer micro-wire in the connecting-layer micro-channel contacting at least a portion of the bottom-layer micro-wire; providing a curable top layer adjacent to and in contact with the cured connecting layer and the connecting-layer micro-wire; forming an imprinted edge micro-channel in the curable top layer by at least imprinting the curable top layer with the third stamp over at least a portion of the connecting-layer micro-channel in at least a portion of the edge area and forming an imprinted top-layer micro-channel in the curable top layer by at least imprinting the curable top layer with the third stamp separate from the bottom-layer micro-channel and over at least a portion of the bottom-layer micro-channel in at least a portion of the central area and curing the curable top layer; forming an edge micro-wire in the edge micro-channel contacting at least a portion of the connecting-layer micro-wire and forming a top-layer micro-wire in the top-layer micro-channel that is electrically isolated from the edge micro-wire, the connecting-layer micro-wire, and the bottom-layer micro-wire; forming a plurality of edge micro-wires electrically connected through a corresponding plurality of connection micro-wires to a corresponding plurality of bottom-layer micro-wires; forming a plurality of top-layer micro-wires electrically isolated from the edge micro-wires; wherein the bottom-layer micro-wire in the central area is electrically connected to the edge micro-wire in the edge area and is electrically isolated from the top-layer micro-wire; and wherein the
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