Shape measurement apparatus and method

Patent metadata

Field	Value
Publication number	US-9275292-B2
Application number	US-78470710-A
Country	US
Kind code	B2
Filing date	May 21, 2010
Priority date	May 21, 2009
Publication date	Mar 1, 2016
Grant date	Mar 1, 2016

Abstract

A shape measurement apparatus includes a work stage supporting a target substrate, a pattern-projecting section including a light source, a grating part partially transmitting and blocking light generated by the light source to generate a grating image and a projecting lens part making the grating image on a measurement target of the target substrate, an image-capturing section capturing the grating image reflected by the measurement target of the target substrate, and a control section controlling the work stage, the pattern-projecting section and the image-capturing section, calculating a reliability index of the grating image and phases of the grating image, which is corresponding to the measurement target, and inspecting the measurement target by using the reliability index and the phases. Thus, the accuracy of measurement may be enhanced.

First claim

What is claimed is:

1. A method of measuring a three dimensional shape comprising:
illuminating grating pattern lights in a plurality of directions onto a measurement target while changing each of the grating pattern lights by N times and detecting the grating pattern lights reflected by the measurement target, to acquire N pattern images of the measurement target with respect to each direction;
extracting a phase, a brightness and a visibility with respect to each direction corresponding to each position from the pattern images;
extracting a height weight with respect to each direction by using a weight function employing the brightness and the visibility as a parameter;
calculating a weight height with respect to each direction by using a height based on the phase with respect to each direction and the height weight; and
calculating a height at each position by using weight heights with respect to the plurality of directions,
wherein the visibility is an amplitude of brightness signal divided by an average brightness.

2. The method of claim 1 , wherein the brightness corresponds to an average brightness that is obtained by averaging the detected grating pattern lights.

3. The method of claim 2 , wherein the weight function further employs at least one of a visibility and an SNR (signal-to-noise ratio) with respect to each direction extracted from the pattern images with respect to each direction as parameters.

4. The method of claim 3 , wherein the weight function further employs a measurement scope (X) corresponding to a grating pitch of each grating pattern light extracted from the pattern images with respect to each direction as a parameter.

5. The method of claim 4 , wherein the measurement scope has at least two values according to the grating pattern lights.

6. The method of claim 4 , wherein the weight function decreases the height weight, as the measurement scope increases.

7. The method of claim 4 , wherein extracting the height weight with respect to each direction comprising dividing the pattern images into a shadow area, a saturation area and a non-saturation area, and
wherein the shadow area corresponds to an area, in which the average brightness is below a minimum brightness and the visibility or the SNR is below a minimum reference value,
the saturation area corresponds to an area, in which the average brightness is more than a maximum brightness and the visibility or the SNR is below the minimum reference value, and
the non-saturation area corresponds to a remaining area except the shadow area and the saturation area.

8. The method of claim 7 , wherein the weight function is regarded as ‘0’ to obtain the height weight in the shadow area and the saturation area.

9. The method of claim 8 , wherein the weight function corresponding to the non-saturation area decreases the height weight, as the average brightness increases or decreases from a mid value of the average brightness, increases the height weight as the visibility or the SNR increases, and decreases the height weight as the measurement scope increases.

10. The method of claim 3 , wherein the weight function decreases the height weight, as the average brightness increases or decreases from a predetermined value.

11. The method of claim 10 , wherein the predetermined value is a mid value of the average brightness.

12. The method of claim 3 , wherein the weight function increases the height weight, as the visibility or the SNR increases.

13. The method of claim 1 , wherein sum of the height weights with respect to the plurality of directions is equal to 1, and
wherein the height at each position is calculated by summing the weight heights with respect to the plurality of directions.

14. The method of claim 1 , further comprising measuring a three dimensional shape by combining the height at each position.

15. A method of measuring a three dimensional shape comprising:
illuminating grating pattern lights in a plurality of directions onto a measurement target while changing each of the grating pattern lights by N times and detecting the grating pattern lights reflected by the measurement target, to acquire N pattern images of the measurement target with respect to each direction;
extracting a phase and a brightness with respect to each direction corresponding to each position from the pattern images;
extracting a height weight with respect to each direction by using a weight function employing the brightness as a parameter, wherein the pattern images are divided into a shadow area, a saturation area and a non-saturation area at least based on the brightness with respect to each direction, and the height weight with respect to each direction is determined according to the shadow area, the saturation area and the non-saturation area;
calculating a weight height with respect to each direction by multiplying a height based on the phase by the height weight, and
calculating a height at each position by using weight heights with respect to the plurality of directions,
wherein the brightness corresponds to an average brightness that is obtained by averaging the detected grating pattern lights,
wherein the weight function further employs a visibility with respect to each direction extracted from the pattern images with respect to each direction as parameters, and
wherein the visibility is an amplitude of brightness signal divided by an average brightness.

16. The method of claim 15 , wherein the shadow area corresponds to an area, in which the average brightness is below a minimum brightness and the visibility is below a minimum reference value,
the saturation area corresponds to an area, in which the average brightness is more than a maximum brightness and the visibility is below the minimum reference value, and
the non-saturation area corresponds to a remaining area except the shadow area and the saturation area.

17. The method of claim 15 , wherein sum of the height weights with respect to the plurality of directions is equal to 1, and
wherein the height at each position is calculated by summing the weight heights with respect to the plurality of directions.

18. The method of claim 15 , further comprising measuring a three dimensional shape by combining the height at each position.

Assignees

• Jeong Joong-Ki
• Kim Min-Young
• Lee Seung-Jun
• Koh Young Tech Inc

Inventors

• Jeong Joong-Ki
• Kim Min-Young
• Lee Seung-Jun

Classifications

• G01B11/254

  Projection of a pattern, viewing through a pattern, e.g. moiré · CPC title

• G01B11/2531 Primary

  using several gratings, projected with variable angle of incidence on the object, and one detection device · CPC title

• G06K9/036 Primary

  Physics · mapped topic

• G01N2021/95638

  for PCB's · CPC title

• G01B11/2513

  with several lines being projected in more than one direction, e.g. grids, patterns · CPC title