Apparatus and method for coating organic film

Patent metadata

Field	Value
Publication number	US-9273390-B2
Application number	US-201514708786-A
Country	US
Kind code	B2
Filing date	May 11, 2015
Priority date	Jun 9, 2013
Publication date	Mar 1, 2016
Grant date	Mar 1, 2016

Abstract

An apparatus and method for coating an organic film are disclosed. The apparatus comprises an evaporation device, an electron emission device and a spray device; wherein the evaporation device comprises an evaporation container, the evaporation container is a linear evaporation container, in which a uniform organic gas is generated; the electron emission device is horizontally arranged over the evaporation container such that the organic gas evaporated in the evaporation container is uniformly charged and becomes charged organic gas; the spray device is provided with an electric field, under which the charged organic gas is moved toward a substrate so as to deposit the organic film on the substrate.

First claim

What is claimed is:

1. An apparatus for coating an organic film, wherein the apparatus comprises:
an evaporation device, an electron emission device and a spray device;
wherein said evaporation device comprises an evaporation container, said evaporation container is a linear evaporation container, in which a uniform organic gas is generated;
said electron emission device is horizontally arranged over the evaporation container such that the organic gas evaporated in the evaporation container is uniformly charged and becomes charged organic gas;
said spray device is provided with an electric field, under which the charged organic gas is moved toward a substrate so as to deposit the organic film on the substrate; and
a movable barrier arranged neighboring to the evaporation opening for opening or closing said evaporation opening;
wherein said evaporation container comprises a slit-like evaporation opening arranged at top of the evaporation container, said electron emission device comprises an electron emission port arranged over the evaporation opening;
wherein the spray device comprises an electrode plate, a spray chamber and a spray head;
wherein said electrode plate is arranged in top of the spray chamber, said spray head is arranged at bottom of the spray chamber; a bias voltage provided by an exterior power supply is applied to the electrode plate and an vertically downward electric field is generated, the charged organic gas is moved under effect of the electric field from an upper portion to an lower portion of the spray chamber and then sprayed out of the spray head;
wherein a gas channel is arranged between said evaporation container and said spray chamber, said charged organic gas is horizontally moved from the evaporation chamber into the spray chamber through the gas channel.

2. The apparatus according to claim 1 , wherein said evaporation device further comprises: a heating source, said heating source is a linear heating source or a plurality of heating sources parallel to each other and is arranged at bottom of the evaporation container to provide uniform heat for organic material evaporation.

3. The apparatus according to claim 2 , wherein said evaporation container comprises a slit-like evaporation opening arranged at top of the evaporation container, said electron emission device comprises an electron emission port arranged over the evaporation opening.

4. The apparatus according to claim 1 , wherein said evaporation container further comprises a cooling pipe arranged around the evaporation container for maintaining the evaporation container at a constant temperature.

5. The apparatus according to claim 1 , wherein said electron emission device is a linear electron gun or a plurality of small-sized electron guns arranged with equal interval, which emits electrons uniformly.

6. The apparatus according to claim 1 , wherein the magnitude of the bias voltage provided by the exterior power supply is adjusted depending on situation of the organic film deposition.

7. The apparatus according to claim 1 , wherein an insulator is arranged between the electrode plate and the spray chamber.

8. The apparatus according to claim 1 , wherein a mask is arranged between the spray head and the substrate.

9. The apparatus according to claim 1 , wherein a relative motion with a constant velocity in a horizontal direction is generated between said apparatus and said substrate.

10. The apparatus according to claim 1 , wherein said charged organic gas is sprayed out of the spray device from top to bottom.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Shen Wulin
• Jiang Chunsheng
• Dai Qing
• Chen Haijing
• Yuan Guangcai
• Fang Jingang

Classifications

• B05D1/007

  using an electrostatic field (B05D1/02 - B05D1/16 take precedence) · CPC title

• C23C14/30 Primary

  by electron bombardment · CPC title

• C23C14/32

  by explosion; by evaporation and subsequent ionisation of the vapours {, e.g. ion-plating}(C23C14/34 - C23C14/48 take precedence) · CPC title

• B05B5/057

  Arrangements for discharging liquids or other fluent material without using a gun or nozzle · CPC title

• C23C14/12 Primary

  Organic material · CPC title