Low warp fan-out processing method and production of substrates therefor
US-11875993-B2 · Jan 16, 2024 · US
US9272945B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9272945-B2 |
| Application number | US-201213660702-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 25, 2012 |
| Priority date | Oct 25, 2012 |
| Publication date | Mar 1, 2016 |
| Grant date | Mar 1, 2016 |
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A thermo-electric method for texturing a glass surface including, for example, simultaneously heating a glass substrate to a temperature less than its glass transition temperature and applying a bias across the glass substrate using a template electrode. The applied bias at the processing temperature induces localized ion migration within the glass, which results in the formation in the glass surface of a negative topographical image of the pattern formed in the electrode.
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What is claimed is: 1. A method for forming texture in a surface of a glass substrate, comprising: contacting a glass surface of a glass substrate having a glass transition temperature and a template electrode; heating the electrode-contacted glass surface to a temperature at least 200° C. less than the glass transition temperature; and applying a DC bias to the electrode effective to transport ions within the glass surface and form a textured glass surface. 2. The method according to claim 1 , wherein the texture of the textured glass surface is selected from the group consisting of bumps, divots, hillocks, pillars, lines, gratings, arrays and channels. 3. The method according to claim 1 , wherein the texture of the textured glass surface is at least one negative topographical image of a positive topographical image on the electrode. 4. The method according to claim 1 , wherein the electrode is maintained in physical contact with the glass surface during the heating and applying the DC bias. 5. The method according to claim 1 , wherein contacting the glass surface and the template electrode comprises relative movement of the glass substrate and the electrode while maintaining physical contact during the simultaneous heating and applying the DC bias. 6. The method according to claim 1 , wherein heating the glass surface includes heating or cooling to at least 300° C. less than the glass transition temperature. 7. The method according to claim 1 , wherein heating the glass surface includes heating from 100 to 300° C. 8. The method according to claim 1 , wherein heating the glass surface includes heating from 300 to 600° C. 9. The method according to claim 1 , wherein applying the DC bias to the electrode positively biases the electrode relative to the glass substrate. 10. The method according to claim 1 , wherein the DC bias is at a constant magnitude. 11. The method according to claim 1 , wherein applying the DC bias is accomplished in a plurality of discrete steps. 12. The method according to claim 1 , wherein the bulk composition of the glass substrate includes less than 1 mol % alkali metal oxide or alkaline earth metal oxide. 13. The method according to claim 1 , wherein the bulk composition of the glass substrate includes less than 1 mol % alkali metal oxide. 14. The method according to claim 1 , further comprising acid etching the textured glass substrate. 15. A method for forming texture in a surface of a glass substrate, comprising: contacting a glass surface of a glass substrate and a template electrode at a temperature ranging from 20° C. to (T g −200° C.), wherein T g is the glass transition temperature of the substrate; and applying a DC bias to the electrode effective to transport ions within the glass substrate and form a textured glass surface. 16. The method according to claim 15 , wherein the contacting and applying are accomplished simultaneously, sequentially, or a combination thereof.
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