Semiconductor device and method for growing semiconductor crystal

Patent metadata

Field	Value
Publication number	US-9269776-B2
Application number	US-201213981750-A
Country	US
Kind code	B2
Filing date	Jan 20, 2012
Priority date	Jan 25, 2011
Publication date	Feb 23, 2016
Grant date	Feb 23, 2016

Abstract

A semiconductor device comprises a base substrate, a pattern on the base substrate, a buffer layer on the base substrate, and an epitaxial layer on the buffer. The pattern is a self-assembled pattern. A method for growing a semiconductor crystal comprises cleaning a silicon carbide substrate, forming a self-assembled pattern on the silicon carbide substrate, forming a buffer layer on the silicon carbide substrate, and forming an epitaxial layer on the buffer layer. A semiconductor device comprises a base substrate comprising a pattern groove and an epitaxial layer on the base substrate. A method for growing a semiconductor crystal comprises cleaning a silicon carbide substrate, forming a self-assembled projection on the silicon carbide substrate, forming a pattern groove in the silicon carbide, and forming an epitaxial layer on the silicon carbide.

First claim

The invention claimed is:

1. A semiconductor device comprising: a base substrate; patterns on the base substrate; a buffer layer on the base substrate; and an epitaxial layer on the buffer layer; wherein the pattern is patterns are a-self-assembled patterns; and wherein the base substrate, the patterns, the buffer layer, and the epitaxial layer each comprises a same material; wherein the buffer layer is laterally grown between the patterns, wherein the buffer layer is horizontally grown on only the surfaces of the base substrate exposed between the patterns to completely fill the spaces between the patterns, and wherein a height of each of the patterns corresponds to a height of the buffer layer.

2. The semiconductor device according to claim 1 , wherein each of the base substrate and the patterns is formed of silicon carbide.

3. The semiconductor device according to claim 1 , wherein the patterns vertically protrude from the base substrate.

4. The semiconductor device according to claim 3 , wherein the protruding shape of each of the patterns is an elliptical cone shape.

5. The semiconductor device according to claim 4 , wherein the elliptical cone shape has a long axis diameter of 10 nm to 30 nm and a height of 100 nm or less.

6. The semiconductor device according to claim 1 , wherein the buffer layer is formed of silicon carbide.

7. A method for growing a semiconductor crystal, the method comprising: cleaning a silicon carbide substrate; forming a-self-assembled patterns on the silicon carbide substrate; forming a buffer layer on the silicon carbide substrate by an epitaxy lateral over growth (ELOG) method; and forming an epitaxial layer on the buffer layer; wherein the self-assembled patterns comprise an ordered structure, wherein the buffer layer is laterally grown between the patterns, wherein the buffer layer is horizontally grown on only the surfaces of the silicon carbide substrate exposed between the patterns to completely fill the spaces between the patterns.

8. The method according to claim 7 , wherein the cleaning of the silicon carbide and the forming of the patterns are performed under a gas atmosphere containing at least one of carbon compound gases selected from methane, ethane, propane, fluoromethane, and hydrofluorocarbon.

9. The method according to claim 8 , wherein the forming of the patterns is performed at a humidity of about 30% or more.

10. The method according to claim 9 , wherein the forming of the patterns is maintained for about 20 minutes to about 30 minutes.

11. The method according to claim 7 , wherein the forming of the epitaxial layer is performed using an epitaxial growth method, and
wherein the epitaxial layer and the buffer layer each comprises a same material.

12. The method according to claim 11 , wherein the forming of the buffer layer and the forming of the epitaxial layer are performed at a temperature of about 1600° C. under a gas atmosphere containing ethane, methane, propane, and a hydrogen gas.

13. A semiconductor device comprising:
a base substrate comprising a pattern groove; and
an epitaxial layer on the base substrate,
wherein the base substrate, the pattern groove, and the epitaxial layer each comprises a same material;
wherein the pattern groove comprises an ordered structure,
wherein the epitaxial layer is directly disposed on the base substrate, and
wherein the pattern groove is filled with the epitaxial layer.

14. The semiconductor device according to claim 13 , wherein the pattern groove has a depth of about 5 nm to about 10 nm.

15. The semiconductor device according to claim 13 , wherein the pattern groove has a width of about 1 nm to about 10 nm.

16. The semiconductor device according to claim 13 , wherein each of the base substrate and the epitaxial layer is formed of silicon carbide.

Assignees

• Kim Moo Seong
• Jo Yeong Deuk
• Son Chang Hyun
• Kim Bum Sup
• Lg Innotek Co Ltd

Inventors

• Kim Moo Seong
• Jo Yeong Deuk
• Son Chang Hyun
• Kim Bum Sup

Classifications

• H10P14/3408

  Silicon carbide · CPC title

• H10P14/3208

  Silicon carbide · CPC title

• H10P14/2925

  Surface structures · CPC title

• H10P14/2904 Primary

  Silicon carbide · CPC title

• H10P14/276

  Lateral overgrowth · CPC title